摘要:
A regulator for regulating a flow rate is provided with an upper connector having a downwardly opened channel in communication with the regulator. An on-off valve connected to the regulator is provided with a lower connector having an upwardly opened channel in communication with the on-off valve. The upper connector is lapped over the lower connector and removably joined thereto with a screw so as to cause the downwardly opened channel to communicate with the upwardly opened channel. Accordingly, the regulator can be removed singly, for example, when malfunctioning.
摘要:
Lower members each have a bolt bore comprising a large-diameter portion larger than the head of a bolt in diameter, and a small diameter portion extending downward from the large-diameter portion with a stepped portion formed therebetween and having a diameter intermediate between the diameter of the bolt head and the diameter of the shank of the bolt. The small-diameter portion of the bolt bore has fitted therein a hollow cylindrical spacer with an inside diameter larger than the diameter of the bolt shank. The spacer has a lower end supported by a support member and an upper end positioned in the large-diameter portion. A hollow cylindrical elastic member is interposed between the bolt head and the stepped portion for biasing the lower member toward the support member.
摘要:
A diaphragm valve is provided with a removable metallic elastic seating ring (7) having a first passage (10) and at least one second passage (11) extending through it. The first passage communicates with an inlet passage (8) of the valve while the second passage communicates with the outflow passage (9). A first surface (7a) of the seating ring is provided with a valve seat (12) against which the diaphragm (6) may be pressed to block fluid flow through the valve. A second surface (7b) of the seating ring has two annular and axially extending projections (15, 16). The first projection (15) contacts a bottom surface (2a) of valve chamber (2) in a region surrounding the opening where the inflow passage joins the valve chamber. The second projection (16) contacts the bottom surface of the valve chamber around the periphery of the valve chamber. The first projection extends axially of the seating ring to a slightly greater extent than the second projection so that when a diaphragm holder ( 5) presses the diaphragm against the periphery of the seating ring, the seating ring flexes thus causing increased contact pressure between the first projection and the bottom surface of the valve chamber. This reduces the possibility of leakage flow between the bottom wall and the seating ring from the inflow passage to the outflow passage.
摘要:
Bolt bores in lower members each comprise a large-diameter portion larger than the head of a bolt in diameter, and a small diameter portion extending downward from the large-diameter portion with a stepped portion formed therebetween and having a diameter intermediate between the diameter of the bolt head and the diameter of the shank of the bolt. A heat insulator has a spacer inserting hole. A hollow cylindrical spacer having an inside diameter larger than the diameter of the bolt shank is inserted through the small-diameter portion of the bolt bore and the spacer inserting hole so that the upper end of the spacer is positioned in the large-diameter portion. The spacer has a lower end bearing on a support member. A hollow cylindrical elastic member is interposed between the bolt head and the stepped portion for biasing the lower member toward the support member.
摘要:
A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent on-off valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.
摘要:
A fluid controller 2 comprises a controller main body 6 formed with an inlet channel 42 and an outlet channel 43 each having a downwardly open end, an operating portion 7 provided on the main body 6 and integral therewith for opening and closing the outlet channel 43, and a connector 11 provided beneath the main body 6. The connector 11 has an inlet channel 41 for causing an inlet channel 40 of an inlet pipe joint member 1 to communicate with the inlet channel 42 of the main body 6, and a leftwardly open outlet channel 44 communicating with the outlet channel 43 of the main body 6. The controller main body 6 is fastened to the connector 11 with screws 17. The operating portion 7 can be removed from the connector 11 together with the main body 6.
摘要:
Each of ridges 7 on respective opposite side surfaces of a gasket 4 has a trapezoidal cross sectional shape defined by an outer tapered face 7a providing an outer peripheral surface, an inner tapered face 7b providing an inner peripheral surface and a flat face 7c providing a top end surface. The hardness of the gasket 4, the angle between the tapered faces 7a, 7b of the ridge 7, the height of the ridge 7 and the area of the flat top end face 7c of the ridge are so determined that the value of thrust for tightening up the coupling is between a predetermined minimum value and a predetermined maximum value.
摘要:
A fluid control device 71 includes a working member 75 in automatic opening and closing, which is moved vertically by introduction or discharge of compressed fluid to or from a compressed fluid inlet chamber 90 formed in a casing 73 to move a valve element holder 5 to an opening position against bias force of a compression coil spring 77, and an working member 74 in manual opening and closing, which is moved vertically by a manual operation and directly presses the valve element holder 5 downward when it is moved downward.
摘要:
Each of ridges 7 on respective opposite side surfaces of a gasket 4 has a trapezoidal cross sectional shape defined by an outer tapered face 7a providing an outer peripheral surface, an inner tapered face 7b providing an inner peripheral surface and a flat face 7c providing a top end surface. The hardness of the gasket 4, the angle between the tapered faces 7a, 7b of the ridge 7, the height of the ridge 7 and the area of the flat top end face 7c of the ridge are so determined that the value of thrust for tightening up the coupling is between a predetermined minimum value and a predetermined maximum value.
摘要:
Each of ridges 7 on respective opposite side surfaces of a gasket 4 has a trapezoidal cross sectional shape defined by an outer tapered face 7a providing an outer peripheral surface, an inner tapered face 7b providing an inner peripheral surface and a flat face 7c providing a top end surface. The hardness of the gasket 4, the angle between the tapered faces 7a, 7b of the ridge 7, the height of the ridge 7 and the area of the flat top end face 7c of the ridge are so determined that the value of thrust for tightening up the coupling is between a predetermined minimum value and a predetermined maximum value