Electrostatic chuck and semiconductor manufacturing apparatus

    公开(公告)号:US11830755B2

    公开(公告)日:2023-11-28

    申请号:US17693623

    申请日:2022-03-14

    Applicant: TOTO LTD.

    CPC classification number: H01L21/6833 H01J37/32724

    Abstract: An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The ceramic dielectric substrate includes a first major surface, a second major surface, a groove part, and a plurality of cooling gas holes. The groove part includes first and second circumferential grooves, and first and second radial-direction grooves. The plurality of cooling gas holes includes first and second holes. The first hole overlaps the first radial-direction groove. The second hole overlaps the second radial-direction groove. The base plate includes a gas inlet path that supplies the cooling gas to the first and second holes. The first circumferential groove includes first and second end portions. The second circumferential groove includes third and fourth end portions. The third end portion and the fourth end portion do not overlap the first end portion in the radial direction.

    Sanitary washing device
    22.
    发明授权

    公开(公告)号:US11821193B2

    公开(公告)日:2023-11-21

    申请号:US17804899

    申请日:2022-06-01

    Applicant: TOTO LTD.

    CPC classification number: E03D9/08

    Abstract: A sanitary washing device includes a casing, a nozzle, and a nozzle drive unit. The nozzle drive unit advances and retracts the nozzle between a storage position and an advanced position. The nozzle drive unit includes a supporter, a gear, and a cable rack. The supporter includes a rail allowing the nozzle to slide. The gear applies a drive force to advance and retract the nozzle. The cable rack is connected with the nozzle and meshes with the gear. The cable rack includes a nozzle connection part connected with the nozzle. The gear and the cable rack mesh at a meshing part. The meshing part is positioned at a same position in a longitudinal direction as the nozzle connection part or further frontward than the nozzle connection part when the nozzle is at the storage position.

    Spout apparatus
    23.
    发明授权

    公开(公告)号:US11821186B2

    公开(公告)日:2023-11-21

    申请号:US17579097

    申请日:2022-01-19

    Applicant: TOTO LTD.

    CPC classification number: E03C1/0404 B05B1/34 E03C1/084

    Abstract: Summary Problem: To provide a spout apparatus in which sagging of the mesh structure portion in the flow-conditioning member due to water pressure can be suppressed even if the flow-conditioning member is formed by a fine diameter mesh structure, and the flow-conditioning member can be compactly constituted and flow velocity distribution made uniform.
    Solution Means: The embodiment of the invention is a spout apparatus 2, including a spout apparatus main unit 6, a flow-conditioning member 12, and a spray member 16; wherein the flow-conditioning member 12 is formed by a mesh structure in which numerous fine holes are formed, and the mesh structure is layered and formed three dimensionally, such that the mesh structure portion of at least a portion of the mesh structure extends in a direction parallel to the direction of water flowing into the flow-conditioning member.

    TOILET SYSTEM
    24.
    发明公开
    TOILET SYSTEM 审中-公开

    公开(公告)号:US20230309845A1

    公开(公告)日:2023-10-05

    申请号:US18128606

    申请日:2023-03-30

    Applicant: TOTO LTD.

    Abstract: A toilet system includes: a toilet seat having a seat surface on which a user is to sit; a sensor provided in or on the toilet seat, configured to measure a physical quantity which reflects blood flow conditions of the user; a health index calculator configured to calculate a health index of the user based on measurement results of the sensor; a health index output part configured to output the health index of the user which has been calculated by the health index calculator; a temperature determining part configured to determine whether a temperature state of the seat surface satisfies a predetermined condition or not, and an operation change instruction part configured to change an operation of the health index calculator and/or an operation of the health index output part when the temperature determining part determines that the temperature state of the seat surface satisfies the predetermined condition.

    Toilet
    25.
    外观设计
    Toilet 有权

    公开(公告)号:USD999349S1

    公开(公告)日:2023-09-19

    申请号:US29771850

    申请日:2021-02-25

    Applicant: TOTO Ltd.

    Abstract: FIG. 1 is a perspective view of a toilet showing our new design;
    FIG. 2 is a front view thereof;
    FIG. 3 is a rear view thereof;
    FIG. 4 is a right side view thereof;
    FIG. 5 is a left side view thereof;
    FIG. 6 is a top view thereof; and,
    FIG. 7 is a bottom view thereof.
    The broken lines in the figures are included for the purpose of illustrating portions of the toilet that form no part of the claimed design.

    FLUSH TOILET
    26.
    发明公开
    FLUSH TOILET 审中-公开

    公开(公告)号:US20230272608A1

    公开(公告)日:2023-08-31

    申请号:US18174369

    申请日:2023-02-24

    Applicant: TOTO LTD.

    CPC classification number: E03D11/08 E03D11/13

    Abstract: A flush toilet according to the present invention includes a bowl including a bowl-shaped waste receiving surface, a rim, a spouting port formed in the rim and a pooled water portion having a front region and a rear region, and includes a configuration where a ratio of an inflow flow rate of flush water into the front region of the pooled water portion in a second half of flushing period in a flushing period to “a total inflow flow rate of flush water into the pooled water portion” is larger than a ratio of an inflow flow rate of flush water into the front region of the pooled water portion in a first half of flushing period to “the total inflow flow rate of flush water into the pooled water portion”.

    Shower head
    28.
    发明授权

    公开(公告)号:US11648572B2

    公开(公告)日:2023-05-16

    申请号:US16568587

    申请日:2019-09-12

    Applicant: TOTO LTD.

    CPC classification number: B05B1/1636 B05B1/18

    Abstract: The present invention is a shower head for which a plurality of spout modes can be switched. The shower head includes: a storage chamber configured to store water supplied from a water supply source; a secondary-side flow-path member provided on a spout-surface side with respect to the storage chamber, the secondary-side flow-path member having a plurality of flow paths, each of which corresponds to each of the plurality of spout modes; and a plurality of diaphragm valves, each of which is configured to control a communicated/blocked state between each of the plurality of flow paths and the storage chamber.

    Electrostatic chuck
    29.
    发明授权

    公开(公告)号:US11626310B2

    公开(公告)日:2023-04-11

    申请号:US16576289

    申请日:2019-09-19

    Applicant: TOTO LTD.

    Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a first porous part. The ceramic dielectric substrate has a first major surface and a second major surface on opposite side from the first major surface. The base plate supports the ceramic dielectric substrate and includes a gas feed channel. The first porous part is provided at a position between the base plate and the first major surface of the ceramic dielectric substrate. The position is opposed to the gas feed channel. The first porous part includes a plurality of sparse portions each including a plurality of pores. The plurality of sparse portions are spaced from each other. Each of the plurality of sparse portions extends in a direction inclined by a prescribed angle with respect to a first direction from the base plate to the ceramic dielectric substrate.

    TOILET DEVICE
    30.
    发明申请

    公开(公告)号:US20230094041A1

    公开(公告)日:2023-03-30

    申请号:US17931154

    申请日:2022-09-12

    Applicant: TOTO LTD.

    Abstract: A toilet device includes a casing, a lock part, and a release part. The casing is mounted to an upper surface of a toilet. The lock part restricts movement of the casing with respect to the toilet. The release part releases the restriction by the lock part. The release part includes an operation part and a transmission part. The transmission part transmits the operating force applied to the operation part to the lock part. The operation part is located at a position separated upward or downward from a lower end of the casing.

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