-
21.发明授权Method and apparatus for detecting a reference position of a rotating scale with two sensors 失效用两个传感器检测旋转刻度尺的参考位置的方法和装置
公开(公告)号：US5026985A
公开(公告)日：1991-06-25
申请号：US409796
申请日：1989-09-20
IPC分类号： G01D5/36
CPC分类号： G01D5/36
摘要： In the reference-position detection method and apparatus for detecting a reference position of a scale, first and second patterns are disposed on the scale so that respective detection timings shift inversely to each other in response to a deviation in attitude of the scale. The first and second patterns are detected with timings different from each other by corresponding first and second sensors, and the reference position of the scale is determined according to outputs of respective sensors. Hence, even if the attitude of the scale changes from a predetermined attitude due to an inclination of the scale or a deviation in position of the scale, it is possible to exactly detect the reference position of the scale. Accordingly, it becomes also possible to increase the performance of a displacement measuring apparatus.
-
22.发明授权
公开(公告)号：US4975570A
公开(公告)日：1990-12-04
申请号：US494860
申请日：1990-03-14
CPC分类号： G01D5/38
摘要： A rotary encoder for detecting a rotation status of a rotary scale having a diffraction grating formed along a rotational direction comprises a directing device for directing a radiation beam to a first position on the rotary scale and directing a plurality of diffracted beams generated at the first position to a second position different from the first position. The direction device is constructed such that the plurality of diffracted beams gave a common light path between the first position and the second position. The encoder also includes a forming device for forming an interference beam from a plurality of rediffracted beams generated at the second position, and a convertor for converting the interference beam to a signal to produce the signal representing the rotation status.
摘要翻译： 一种旋转编码器，用于检测具有沿着旋转方向形成的衍射光栅的旋转刻度的旋转状态，包括用于将辐射束引导到旋转刻度上的第一位置并引导在第一位置处产生的多个衍射光束的引导装置 到与第一位置不同的第二位置。 方向装置被构造成使得多个衍射光束在第一位置和第二位置之间给出公共光路。 编码器还包括用于从在第二位置处产生的多个重衍红光束形成干涉光束的成形装置，以及用于将干涉光束转换成信号以产生表示旋转状态的信号的转换器。
-
公开(公告)号：US4970388A
公开(公告)日：1990-11-13
申请号：US410509
申请日：1989-09-21
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： An encoder for measuring the displacement of a movable diffraction grating has means for applying a radiation beam to the diffraction grating, a reflecting optical system for causing first and second reflected and diffracted beams created on the diffraction grating by the application of the radiation beam to be reflected and diffracted at least twice by the diffraction grating, and means for receiving an interference beam formed by the first and second reflected and diffracted beams reflected and diffracted at least twice and converting it into a signal conforming to the displacement of the diffraction grating.
摘要翻译： 用于测量可移动衍射光栅的位移的编码器具有将辐射束施加到衍射光栅的装置，用于通过施加辐射束使在衍射光栅上产生的第一和第二反射和衍射光束的反射光学系统的反射光学系统 由衍射光栅反射和衍射至少两次，以及用于接收由反射和衍射的第一和第二反射和衍射光束形成的干涉光束至少两次并将其转换成符合衍射光栅位移的信号的装置。
-
公开(公告)号：US4967072A
公开(公告)日：1990-10-30
申请号：US481684
申请日：1990-02-20
申请人： Tetsuharu Nishimura
发明人： Tetsuharu Nishimura
CPC分类号： G01D5/38 , G01P13/045 , G01P3/366
摘要： A rotating condition detection apparatus includes a light source for illuminating a radial lattice having a plurality of lattice patterns marked on a periphery of a rotating body at an equi-angle; an optical unit for superimposing two refraction lights having a predetermined number of order reflected in two predetermined directions by the radial lattice; a photosensing device for sensing the superimposed light; and a detector for detecting a rotating condition of the rotating body in accordance with the output of the photosensing means.
摘要翻译： 旋转状态检测装置包括用于照射具有以等角的旋转体的周边上标记的多个格子图案的径向格子的光源; 光学单元，用于通过径向晶格将预定数量的次序反射的两个折射光叠加在两个预定方向上; 光敏装置，用于感测叠加的光; 以及检测器，用于根据光敏装置的输出来检测旋转体的旋转状态。
-
公开(公告)号：US4868385A
公开(公告)日：1989-09-19
申请号：US196850
申请日：1988-05-17
申请人： Tetsuharu Nishimura
发明人： Tetsuharu Nishimura
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A rotating state detection apparatus comprising, an optical device for detecting coherent beams toward a plurality of positions on a diffraction grating present along a rotational direction of a rotating object, an interfering device for superposing diffraction beams of a specific order with each other, the diffraction beams being diffracted at the plurality of different positions on the diffraction grating, and light-receiving device for receiving the superposed beams obtained by the interfering device, and for photoelectrically converting interference fringes formed by the superposed beams.
摘要翻译： 一种旋转状态检测装置，包括：用于检测沿着旋转对象的旋转方向存在的衍射光栅上的多个位置的相干光束的光学装置，用于叠加具有特定次序的衍射光束的干涉装置，衍射 在衍射光栅上的多个不同位置衍射的光束，以及用于接收由该干涉装置获得的叠加光束的光接收装置，以及用于光电转换由叠加的光束形成的干涉条纹。
-
公开(公告)号：US5568337A
公开(公告)日：1996-10-22
申请号：US935927
申请日：1995-08-27
申请人： Tadashi Eguchi , Katsumi Momose , Hiroji Narumi , Tetsuharu Nishimura , Kotaro Hosaka , Masaaki Tsukiji , Koh Ishizuka
发明人： Tadashi Eguchi , Katsumi Momose , Hiroji Narumi , Tetsuharu Nishimura , Kotaro Hosaka , Masaaki Tsukiji , Koh Ishizuka
CPC分类号： G11B5/59677 , G11B21/106
摘要： A device for detecting the position of an information recording or reproducing head relative to a recording medium; the head is relatively rotatable around a first axis with respect to the recording medium, and rotatable around a second axis parallel to the first axis. The device includes an autocollimator for measuring a relative positional relationship of the head substantially along the direction of the rotation around the second axis, a rotating table on which either the combination of the recording medium and the head or the autocollimator is mounted to activate the rotational movement substantially around the second axis, and a control unit. The control unit rotates the rotating table in response to the obtained position of the head with respect to the recording medium. According to the measurement result by the autocollimator, the control unit accomplishes a relative positional controlling in which a relative positional relationship between the autocollimator and the head is kept constant. As a result, a compact and high-accuracy head positioning device is achieved.
摘要翻译： 一种用于检测信息记录或再现头相对于记录介质的位置的装置; 头部相对于记录介质相对于第一轴线相对旋转，并且能够围绕平行于第一轴线的第二轴线旋转。 该装置包括自动准直仪，用于基本上围绕第二轴线的旋转方向测量头部的相对位置关系;旋转台，其上安装有记录介质和头部或自动准直仪的组合以激活旋转 基本上围绕第二轴线的运动，以及控制单元。 控制单元响应于获得的头部相对于记录介质的位置旋转旋转台。 根据自动准直仪的测量结果，控制单元实现自动准直仪和头部之间的相对位置关系保持恒定的相对位置控制。 结果，实现了紧凑且高精度的头部定位装置。
-
27.发明授权Apparatus for measuring relative movement using a diffraction grating having an orthogonally polarized input beam 失效用于使用具有正交极化输入光束的衍射光栅测量相对运动的装置
公开(公告)号：US5436724A
公开(公告)日：1995-07-25
申请号：US956059
申请日：1992-10-02
申请人： Koh Ishizuka , Tetsuharu Nishimura
发明人： Koh Ishizuka , Tetsuharu Nishimura
CPC分类号： G01D5/38 , G03F9/7049
摘要： An apparatus for measuring relative movement by the use of a diffraction grating includes a light beam generating portion generating a light beam including light wave components having planes of polarization orthogonal to each other, an interference optical system for directing the light beam from the light beam generating portion to the diffraction grating, the light beam directed by the interference optical system being diffracted by the diffraction grating to thereby at least create two diffracted light beams of different orders having planes of polarization orthogonal to each other, the interference optical system being disposed so as to superpose the two diffracted lights one upon the other or upon other light and cause them to interfere with each other, and a detecting system for detecting the interfering light beams from the interference optical system. The relative movement of the diffraction grating and the interference optical system is measured by the detection by the detecting system. The interference optical system has in at least a portion of the optical path from the diffraction grating to the detecting system a polarization maintaining optical fiber for propagating the two diffracted light beams therethrough.
摘要翻译： 用于通过使用衍射光栅测量相对运动的装置包括产生包括彼此具有正交平面的光波分量的光束的光束产生部分，用于引导来自光束产生的光束的干涉光学系统 由干涉光学系统引导的光束被衍射光栅衍射，从而至少产生具有彼此正交的极化平面的不同阶数的两个衍射光束，干涉光学系统被布置成 将两个衍射光彼此叠加或以其他光叠加并使它们彼此干涉;以及检测系统，用于检测来自干涉光学系统的干涉光束。 通过检测系统的检测来测量衍射光栅和干涉光学系统的相对运动。 干涉光学系统在从衍射光栅到检测系统的光路的至少一部分中具有用于传播两个衍射光束的偏振保持光纤。
-
28.发明授权
公开(公告)号：US5404220A
公开(公告)日：1995-04-04
申请号：US955979
申请日：1992-10-02
CPC分类号： G01D5/38 , G03F9/7049
摘要： A method and an apparatus for measuring a very small displacement of an object. The first and second beat signals are produced by light beams of different frequencies diffracted by a diffraction grating. The phase difference between the first and second beat signals is detected, thereby measuring the relative displacement of the diffraction grating.
摘要翻译： 一种用于测量物体的非常小位移的方法和装置。 第一和第二拍频信号由衍射光栅衍射的不同频率的光束产生。 检测第一和第二拍动信号之间的相位差，从而测量衍射光栅的相对位移。
-
29.发明授权Displacement information detection apparatus for receiving a divergent light beam 失效位移信息检测装置，用于接收发散光束
公开(公告)号：US5390022A
公开(公告)日：1995-02-14
申请号：US42589
申请日：1993-04-05
CPC分类号： G01D5/38
摘要： A displacement information detection apparatus for detecting relative displacement information regarding the apparatus and an object to be detected includes an illumination system for radiating coherent light. A first diffraction grating splits the coherent light from the illumination system into first and second light beams, which are radiated onto the object. A second diffraction grating synthesizes the first and second light beams emerging from the object to generate an interference light beam. A light-receiving element detects the interference light beam and detects the relative displacement information regarding the object and the apparatus upon reception of the interference light beam. The illumination system is configured to focus the first and second light beams at a location along an optical path between the first diffraction grating and the second diffraction grating, so that the interference light beam incident on the light-receiving element is a divergent light beam.
摘要翻译： 一种用于检测关于装置和待检测物体的相对位移信息的位移信息检测装置，包括用于照射相干光的照明系统。 第一衍射光栅将来自照明系统的相干光分解成辐射到物体上的第一和第二光束。 第二衍射光栅合成从物体出射的第一和第二光束以产生干涉光束。 光接收元件检测干涉光束并且在接收干涉光束时检测关于物体和装置的相对位移信息。 照明系统被配置为将第一和第二光束聚焦在沿着第一衍射光栅和第二衍射光栅之间的光路的位置处，使得入射在光接收元件上的干涉光束是发散光束。
-
公开(公告)号：US5283434A
公开(公告)日：1994-02-01
申请号：US992418
申请日：1992-12-17
摘要： Disclosed is a displacement detecting device for measuring displacement or velocity of an object. The device is provided with a casing having an optical window, a light-emitting element and a light-receiving element incorporated in the casing, a transparent plate member provided in the vicinity of the window, a first optical function element provided on the transparent plate member for splitting the light generated by the light-emitting element into plural light beams emitted therefrom, and a second optical function element provided on the transparent plate member for guiding the lights to the light-receiving element, the lights being modulated when the emitted light beams are irradiated onto a relatively displacing object.
摘要翻译： 公开了一种用于测量物体的位移或速度的位移检测装置。 该装置设置有具有光学窗口，发光元件和结合在壳体中的光接收元件的壳体，设置在窗口附近的透明板构件，设置在透明板上的第一光学功能元件 用于将由发光元件产生的光分解成从其发射的多个光束的构件;以及设置在透明板构件上用于将光引导到光接收元件的第二光学功能元件，当发射的光 光束照射到相对位移的物体上。
-
-
-
-
-
-
-
-
-
搜索结果
39 条记录 (耗时 0.019 秒)
