摘要:
A displacement information detection apparatus for detecting relative displacement information regarding the apparatus and an object to be detected includes an illumination system for radiating coherent light. A first diffraction grating splits the coherent light from the illumination system into first and second light beams, which are radiated onto the object. A second diffraction grating synthesizes the first and second light beams emerging from the object to generate an interference light beam. A light-receiving element detects the interference light beam and detects the relative displacement information regarding the object and the apparatus upon reception of the interference light beam. The illumination system is configured to focus the first and second light beams at a location along an optical path between the first diffraction grating and the second diffraction grating, so that the interference light beam incident on the light-receiving element is a divergent light beam.
摘要:
Disclosed is a displacement detecting device for measuring displacement or velocity of an object. The device is provided with a casing having an optical window, a light-emitting element and a light-receiving element incorporated in the casing, a transparent plate member provided in the vicinity of the window, a first optical function element provided on the transparent plate member for splitting the light generated by the light-emitting element into plural light beams emitted therefrom, and a second optical function element provided on the transparent plate member for guiding the lights to the light-receiving element, the lights being modulated when the emitted light beams are irradiated onto a relatively displacing object.
摘要:
This invention relates to a light-emitting apparatus, a photosemiconductor apparatus and a method for producing a photosemiconductor wherein the light-emitting apparatus for emitting light on an object comprises a substrate; a light-emitting element provided on the substrate; an optical member provided on a predetermined position to the substrate; a light-receiving element provided on the substrate, the light-receiving element receiving a part of light beam emitted from the light-emitting element on the object via the optical member; and means for controlling a quantity of the beam projected from the light-emitting element on the object, based on an output signal from the light-receiving element.
摘要:
An apparatus for detecting information relating to displacement of an object on which a grating scale is affixed. The apparatus includes a beam-emitting system for irradiating the grating scale with a beam. The apparatus also includes a light-detecting element having a light-receiving surface. A grating portion is integrally formed on at least a part of the light-receiving surface for detecting a beam from the grating scale which is irradiated by the beam from the beam-emitting system. Information relating to displacement of the object is detected on the basis of the detection by the grating portion of the light-detecting element.
摘要:
A displacement detection apparatus has a light source 1, a first diffraction grating G1 for diffracting and dividing the light from the light source and applying O-order diffracted light and +1st-order diffracted light to a second diffraction grating G2, a third diffraction grating G3 for combining +1st-order reflected diffracted light created by the O-order diffracted light being reflected and diffracted by the second diffraction grating and -lst-order reflected diffracted light created by the +lst-order diffracted light being diffracted by the second diffraction grating, to thereby form interference light, and a light receiving element 3 for photoelectrically converting the interference light, the third diffraction grating including four diffraction gratings given a phase difference of .pi./2 each, the light receiving element being provided with light receiving portions 3a1, 3a2, 3b1 and 3b2 corresponding to the four diffraction gratings of the third diffraction grating, and cruciform light intercepting means is provided between adjacent ones of the light receiving portions.
摘要:
A displacement detection apparatus comprises a light source 1, a first diffraction grating including a blazed grating for diffracting and splitting light from the light source to irradiate a 0-order diffraction light and a +1-order diffraction light to a second diffraction grating, a third diffraction grating including a blazed grating for combining a +1-order reflected diffraction light produced by the reflection and diffraction of the 0-order diffraction light by the second diffraction grating and a -1-order reflected diffraction light produced by the diffraction of the +1-order diffraction light by the second diffraction grating to produce an interference light, and a photo-sensing element for converting the interference light to a signal representing a change in the second diffraction grating.
摘要:
A displacement detection apparatus includes a light source (1), a first diffraction grating (G1) which is arranged on the same substrate as a second diffraction grating (G2) so as to diffract and split light emitted from the light source and to irradiate .+-.1st-order diffracted light beams onto the second diffraction grating (G2), a third diffraction grating (G3) for synthesizing a +1st-order reflectively diffracted light beam generated by reflectively diffracting the +1st-order diffracted light beam by the second diffraction grating, and a -1st-order reflectively diffracted light beam generated by reflectively diffracting the +1st-order diffracted light beam by the second diffraction grating to form interference light, and a light-receiving element (3) for converting the interference light into a signal representing a displacement of the substrate.
摘要:
A device comprises output device for receiving signals having predetermined phases and outputting first and second signals having different phase angles and amplitudes, conversion device for converting the first signal into a first binary signal and the second signal into a second binary signal, the conversion device being arranged so that widths of the first and second binary signals are substantially equal to each other regardless of a difference in amplitude of the first and second signals, and generating device for generating first and second pulses according to phase angles on the basis of the first and second binary signals.
摘要:
In an optical type encoder for projecting a light beam onto an optical type scale having a diffraction grating formed thereon, forming an interferenced light by the use of a diffracted light from the scale, and photoelectrically converting the interferenced light to thereby measure the displacement of the scale, first and second light beams are caused to enter substantially the same position on the scale from different first and second directions, first and second diffracted light beams emerging from the scale by the first and second light beams being diffracted by the scale are directed to the aforementioned position by a reflecting device, the diffracted light beams emerging in the first and second directions by the first and second diffracted light beams being diffracted by the scale are superposed one upon the other to thereby form an interferenced light, and light components created by the first and second light beams being regularly reflected at the aforementioned position are not included in the interferenced light.
摘要:
An encoder for detecting the state of movement of a scale having a plurality of tracks consisting of arranged predetermined codes comprises first detecting device for reading the codes of the plurality of tracks and detecting data comprising a row of the codes, and second detecting device for detecting the state of movement of the codes of a particular track plurality of tracks to obtain more detailed data. The state of movement of the scale is detected on the basis of the signals from the first and second detecting devices.