Displacement information detection apparatus for receiving a divergent
light beam
    1.
    发明授权
    Displacement information detection apparatus for receiving a divergent light beam 失效
    位移信息检测装置,用于接收发散光束

    公开(公告)号:US5390022A

    公开(公告)日:1995-02-14

    申请号:US42589

    申请日:1993-04-05

    IPC分类号: G01D5/38 G01B9/02

    CPC分类号: G01D5/38

    摘要: A displacement information detection apparatus for detecting relative displacement information regarding the apparatus and an object to be detected includes an illumination system for radiating coherent light. A first diffraction grating splits the coherent light from the illumination system into first and second light beams, which are radiated onto the object. A second diffraction grating synthesizes the first and second light beams emerging from the object to generate an interference light beam. A light-receiving element detects the interference light beam and detects the relative displacement information regarding the object and the apparatus upon reception of the interference light beam. The illumination system is configured to focus the first and second light beams at a location along an optical path between the first diffraction grating and the second diffraction grating, so that the interference light beam incident on the light-receiving element is a divergent light beam.

    摘要翻译: 一种用于检测关于装置和待检测物体的相对位移信息的位移信息检测装置,包括用于照射相干光的照明系统。 第一衍射光栅将来自照明系统的相干光分解成辐射到物体上的第一和第二光束。 第二衍射光栅合成从物体出射的第一和第二光束以产生干涉光束。 光接收元件检测干涉光束并且在接收干涉光束时检测关于物体和装置的相对位移信息。 照明系统被配置为将第一和第二光束聚焦在沿着第一衍射光栅和第二衍射光栅之间的光路的位置处,使得入射在光接收元件上的干涉光束是发散光束。

    Displacement detecting device with integral optics
    2.
    发明授权
    Displacement detecting device with integral optics 失效
    带集成光学元件的位移检测装置

    公开(公告)号:US5283434A

    公开(公告)日:1994-02-01

    申请号:US992418

    申请日:1992-12-17

    IPC分类号: G01D5/38 G01P3/36 H01J3/14

    CPC分类号: G01P3/36 G01D5/38

    摘要: Disclosed is a displacement detecting device for measuring displacement or velocity of an object. The device is provided with a casing having an optical window, a light-emitting element and a light-receiving element incorporated in the casing, a transparent plate member provided in the vicinity of the window, a first optical function element provided on the transparent plate member for splitting the light generated by the light-emitting element into plural light beams emitted therefrom, and a second optical function element provided on the transparent plate member for guiding the lights to the light-receiving element, the lights being modulated when the emitted light beams are irradiated onto a relatively displacing object.

    摘要翻译: 公开了一种用于测量物体的位移或速度的位移检测装置。 该装置设置有具有光学窗口,发光元件和结合在壳体中的光接收元件的壳体,设置在窗口附近的透明板构件,设置在透明板上的第一光学功能元件 用于将由发光元件产生的光分解成从其发射的多个光束的构件;以及设置在透明板构件上用于将光引导到光接收元件的第二光学功能元件,当发射的光 光束照射到相对位移的物体上。

    Apparatus including a light-detecting element having a photo-electric
conversion surface and an integral light blocking member
    4.
    发明授权
    Apparatus including a light-detecting element having a photo-electric conversion surface and an integral light blocking member 失效
    一种装置,包括具有光电转换表面的光检测元件和一体的遮光件

    公开(公告)号:US5657125A

    公开(公告)日:1997-08-12

    申请号:US454501

    申请日:1995-05-30

    IPC分类号: G01D5/347 G01D5/38 G01B9/02

    CPC分类号: G01D5/34715 G01D5/38

    摘要: An apparatus for detecting information relating to displacement of an object on which a grating scale is affixed. The apparatus includes a beam-emitting system for irradiating the grating scale with a beam. The apparatus also includes a light-detecting element having a light-receiving surface. A grating portion is integrally formed on at least a part of the light-receiving surface for detecting a beam from the grating scale which is irradiated by the beam from the beam-emitting system. Information relating to displacement of the object is detected on the basis of the detection by the grating portion of the light-detecting element.

    摘要翻译: 一种用于检测与其上贴有光栅刻度的物体的位移相关的信息的装置。 该装置包括用于用光束照射光栅尺的光束发射系统。 该装置还包括具有光接收表面的光检测元件。 光栅部分整体地形成在光接收表面的至少一部分上,用于检测来自光栅尺的光束,该光束由来自光束发射系统的光束照射。 基于光检测元件的光栅部分的检测来检测与物体的位移有关的信息。

    Displacement detection apparatus using multiple displacement detection
signals formed by a multiple phase combination grating
    5.
    发明授权
    Displacement detection apparatus using multiple displacement detection signals formed by a multiple phase combination grating 失效
    使用由多相组合光栅形成的多位移检测信号的位移检测装置

    公开(公告)号:US5574559A

    公开(公告)日:1996-11-12

    申请号:US608029

    申请日:1996-02-28

    IPC分类号: G01B11/00 G01D5/38 G01B9/02

    CPC分类号: G01D5/38

    摘要: A displacement detection apparatus has a light source 1, a first diffraction grating G1 for diffracting and dividing the light from the light source and applying O-order diffracted light and +1st-order diffracted light to a second diffraction grating G2, a third diffraction grating G3 for combining +1st-order reflected diffracted light created by the O-order diffracted light being reflected and diffracted by the second diffraction grating and -lst-order reflected diffracted light created by the +lst-order diffracted light being diffracted by the second diffraction grating, to thereby form interference light, and a light receiving element 3 for photoelectrically converting the interference light, the third diffraction grating including four diffraction gratings given a phase difference of .pi./2 each, the light receiving element being provided with light receiving portions 3a1, 3a2, 3b1 and 3b2 corresponding to the four diffraction gratings of the third diffraction grating, and cruciform light intercepting means is provided between adjacent ones of the light receiving portions.

    摘要翻译: 位移检测装置具有光源1,用于衍射和分割来自光源的光并且将O级衍射光和+ 1级衍射光施加到第二衍射光栅G2的第一衍射光栅G1,第三衍射光栅 G3,用于组合由被第二衍射光栅反射和衍射的O级衍射光产生的+ 1阶反射衍射光,并且由被第二衍射衍射的+ 1级衍射光产生的一级反射衍射光 光栅,从而形成干涉光;以及用于光电转换干涉光的光接收元件3,第三衍射光栅包括四个衍射光栅,每个衍射光栅各自具有π/ 2的相位差,光接收元件设置有光接收部分3a1 ,3a2,3b1和3b2对应于第三衍射光栅的四个衍射光栅和十字形 在相邻的光接收部分之间提供遮光装置。

    Displacement detection apparatus
    6.
    发明授权
    Displacement detection apparatus 失效
    位移检测装置

    公开(公告)号:US5483377A

    公开(公告)日:1996-01-09

    申请号:US169402

    申请日:1993-12-20

    CPC分类号: G01D5/38

    摘要: A displacement detection apparatus comprises a light source 1, a first diffraction grating including a blazed grating for diffracting and splitting light from the light source to irradiate a 0-order diffraction light and a +1-order diffraction light to a second diffraction grating, a third diffraction grating including a blazed grating for combining a +1-order reflected diffraction light produced by the reflection and diffraction of the 0-order diffraction light by the second diffraction grating and a -1-order reflected diffraction light produced by the diffraction of the +1-order diffraction light by the second diffraction grating to produce an interference light, and a photo-sensing element for converting the interference light to a signal representing a change in the second diffraction grating.

    摘要翻译: 位移检测装置包括光源1,第一衍射光栅,包括用于衍射和分离来自光源的光的闪耀光栅,以将0级衍射光和+ 1级衍射光照射到第二衍射光栅, 第三衍射光栅,包括用于组合通过第二衍射光栅的0级衍射光的反射和衍射产生的+ 1级反射衍射光的闪耀光栅和通过第二衍射光栅衍射产生的-1级反射衍射光 + 1级衍射光以产生干涉光;以及光敏元件,用于将干涉光转换成表示第二衍射光栅的变化的信号。

    Apparatus for optically detecting displacement of an object using a
synthesizing means utilizing a substrate with two diffraction gratings
thereon
    7.
    发明授权
    Apparatus for optically detecting displacement of an object using a synthesizing means utilizing a substrate with two diffraction gratings thereon 失效
    一种用于利用其上具有两个衍射光栅的基板的合成装置来光学检测物体的位移的装置

    公开(公告)号:US5680211A

    公开(公告)日:1997-10-21

    申请号:US525249

    申请日:1995-09-08

    CPC分类号: G01P3/36 G01D5/38

    摘要: A displacement detection apparatus includes a light source (1), a first diffraction grating (G1) which is arranged on the same substrate as a second diffraction grating (G2) so as to diffract and split light emitted from the light source and to irradiate .+-.1st-order diffracted light beams onto the second diffraction grating (G2), a third diffraction grating (G3) for synthesizing a +1st-order reflectively diffracted light beam generated by reflectively diffracting the +1st-order diffracted light beam by the second diffraction grating, and a -1st-order reflectively diffracted light beam generated by reflectively diffracting the +1st-order diffracted light beam by the second diffraction grating to form interference light, and a light-receiving element (3) for converting the interference light into a signal representing a displacement of the substrate.

    摘要翻译: 位移检测装置包括光源(1),与第二衍射光栅(G2)配置在同一基板上的第一衍射光栅(G1),以衍射和分离从光源发出的光并照射+ / -1级衍射光束到第二衍射光栅(G2)上,第三衍射光栅(G3),用于合成通过第二级反射衍射+ 1级衍射光束而产生的+ 1级反射衍射光束 衍射光栅和通过第二衍射光栅反射衍射+ 1级衍射光束而产生的-1级反射衍射光束,以形成干涉光;以及光接收元件(3),用于将干涉光转换成 表示基板的位移的信号。

    Device having signal interpolation circuit and displacement measuring
apparatus comprising the device
    8.
    发明授权
    Device having signal interpolation circuit and displacement measuring apparatus comprising the device 失效
    具有信号插值电路的装置和包括该装置的位移测量装置

    公开(公告)号:US5067089A

    公开(公告)日:1991-11-19

    申请号:US419705

    申请日:1989-10-11

    IPC分类号: H03K5/00 G01D5/244 H03M1/64

    CPC分类号: G01D5/24404 H03M1/645

    摘要: A device comprises output device for receiving signals having predetermined phases and outputting first and second signals having different phase angles and amplitudes, conversion device for converting the first signal into a first binary signal and the second signal into a second binary signal, the conversion device being arranged so that widths of the first and second binary signals are substantially equal to each other regardless of a difference in amplitude of the first and second signals, and generating device for generating first and second pulses according to phase angles on the basis of the first and second binary signals.

    摘要翻译: 一种设备包括用于接收具有预定相位的信号的输出装置,并且输出具有不同相位角和幅度的第一和第二信号,用于将第一信号转换为第一二进制信号的转换装置和第二信号转换为第二二进制信号,转换装置 布置成使得第一和第二二进制信号的宽度彼此基本相等,而与第一和第二信号的幅度差无关,以及用于根据第一和第二信号的相位角产生第一和第二脉冲的产生装置, 第二个二进制信号。

    Optical type encoder
    9.
    发明授权
    Optical type encoder 失效
    光学型编码器

    公开(公告)号:US5000542A

    公开(公告)日:1991-03-19

    申请号:US346701

    申请日:1989-05-03

    IPC分类号: G01D5/38

    CPC分类号: G01D5/38

    摘要: In an optical type encoder for projecting a light beam onto an optical type scale having a diffraction grating formed thereon, forming an interferenced light by the use of a diffracted light from the scale, and photoelectrically converting the interferenced light to thereby measure the displacement of the scale, first and second light beams are caused to enter substantially the same position on the scale from different first and second directions, first and second diffracted light beams emerging from the scale by the first and second light beams being diffracted by the scale are directed to the aforementioned position by a reflecting device, the diffracted light beams emerging in the first and second directions by the first and second diffracted light beams being diffracted by the scale are superposed one upon the other to thereby form an interferenced light, and light components created by the first and second light beams being regularly reflected at the aforementioned position are not included in the interferenced light.

    摘要翻译: 在用于将光束投射到其上形成有衍射光栅的光学刻度尺的光学型编码器中,通过使用来自刻度的衍射光形成介入光,并对该干涉光进行光电转换,从而测量 使第一和第二光束在不同的第一和第二方向上在刻度上进入基本上相同的位置,第一和第二光束通过刻度被衍射的第一和第二衍射光束被引导到 通过反射装置的上述位置,由第一和第二方向由第一和第二衍射光束以标尺衍射的第一和第二方向的衍射光束彼此重叠,从而形成介入光,并且由 在上述位置规则地反射的第一和第二光束为No t包含在干涉光中。

    Encoder
    10.
    发明授权
    Encoder 失效
    编码器

    公开(公告)号:US4933673A

    公开(公告)日:1990-06-12

    申请号:US171435

    申请日:1988-03-21

    摘要: An encoder for detecting the state of movement of a scale having a plurality of tracks consisting of arranged predetermined codes comprises first detecting device for reading the codes of the plurality of tracks and detecting data comprising a row of the codes, and second detecting device for detecting the state of movement of the codes of a particular track plurality of tracks to obtain more detailed data. The state of movement of the scale is detected on the basis of the signals from the first and second detecting devices.

    摘要翻译: 一种用于检测具有由布置的预定代码组成的多个轨道的标尺的移动状态的编码器,包括用于读取多个轨道的代码和检测包括代码行的数据的第一检测装置和用于检测的第二检测装置 特定轨道多个轨道的代码的移动状态以获得更详细的数据。 基于来自第一和第二检测装置的信号检测标尺的移动状态。