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1.发明授权Displacement information detection apparatus for receiving a divergent light beam 失效位移信息检测装置，用于接收发散光束
公开(公告)号：US5390022A
公开(公告)日：1995-02-14
申请号：US42589
申请日：1993-04-05
CPC分类号： G01D5/38
摘要： A displacement information detection apparatus for detecting relative displacement information regarding the apparatus and an object to be detected includes an illumination system for radiating coherent light. A first diffraction grating splits the coherent light from the illumination system into first and second light beams, which are radiated onto the object. A second diffraction grating synthesizes the first and second light beams emerging from the object to generate an interference light beam. A light-receiving element detects the interference light beam and detects the relative displacement information regarding the object and the apparatus upon reception of the interference light beam. The illumination system is configured to focus the first and second light beams at a location along an optical path between the first diffraction grating and the second diffraction grating, so that the interference light beam incident on the light-receiving element is a divergent light beam.
摘要翻译： 一种用于检测关于装置和待检测物体的相对位移信息的位移信息检测装置，包括用于照射相干光的照明系统。 第一衍射光栅将来自照明系统的相干光分解成辐射到物体上的第一和第二光束。 第二衍射光栅合成从物体出射的第一和第二光束以产生干涉光束。 光接收元件检测干涉光束并且在接收干涉光束时检测关于物体和装置的相对位移信息。 照明系统被配置为将第一和第二光束聚焦在沿着第一衍射光栅和第二衍射光栅之间的光路的位置处，使得入射在光接收元件上的干涉光束是发散光束。
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公开(公告)号：US5283434A
公开(公告)日：1994-02-01
申请号：US992418
申请日：1992-12-17
摘要： Disclosed is a displacement detecting device for measuring displacement or velocity of an object. The device is provided with a casing having an optical window, a light-emitting element and a light-receiving element incorporated in the casing, a transparent plate member provided in the vicinity of the window, a first optical function element provided on the transparent plate member for splitting the light generated by the light-emitting element into plural light beams emitted therefrom, and a second optical function element provided on the transparent plate member for guiding the lights to the light-receiving element, the lights being modulated when the emitted light beams are irradiated onto a relatively displacing object.
摘要翻译： 公开了一种用于测量物体的位移或速度的位移检测装置。 该装置设置有具有光学窗口，发光元件和结合在壳体中的光接收元件的壳体，设置在窗口附近的透明板构件，设置在透明板上的第一光学功能元件 用于将由发光元件产生的光分解成从其发射的多个光束的构件;以及设置在透明板构件上用于将光引导到光接收元件的第二光学功能元件，当发射的光 光束照射到相对位移的物体上。
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公开(公告)号：US5021649A
公开(公告)日：1991-06-04
申请号：US496259
申请日：1990-03-20
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： An encoder of this invention radiates a light beam onto an optical scale, in which a reflection film is formed on a surface of a relief type diffraction grating formed on one surface of a light-transmission substrate, from a surface opposite to the formation surface of the diffraction grating, and detects a change in intensity of interference light caused by diffracted light produced by the diffraction grating, thereby measuring a displacement of the optical scale.
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公开(公告)号：US4979826A
公开(公告)日：1990-12-25
申请号：US380038
申请日：1989-07-14
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A displacement measuring apparatus has an illuminating device for illuminating a diffraction grating with a radiation beam, an optical system for directing first and second diffracted beams created by the diffraction grating with to the diffraction grating, the optical system being provided so that the first and second diffracted beams have a common optical path and travel in opposite directions along the optical path. In addition, a device receives an interference beam formed by first and second re-diffracted beams created by the first and second diffracted beams being diffracted by the diffraction grating, and outputs a signal conforming to the displacement of the diffraction grating relative to the radiation beam.
摘要翻译： 位移测量装置具有用于用辐射束照射衍射光栅的照明装置，用于将由衍射光栅产生的第一和第二衍射光束引导到衍射光栅的光学系统，所述光学系统被设置成使得第一和第二 衍射光束具有公共光路并沿着光路在相反方向上行进。 此外，设备接收由由衍射光栅衍射的第一和第二衍射光束产生的第一和第二重衍射光束形成的干涉光束，并且输出符合衍射光栅相对于辐射束的位移的信号 。
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5.发明授权
公开(公告)号：US5159192A
公开(公告)日：1992-10-27
申请号：US641891
申请日：1991-01-16
申请人： Tetsuharu Nishimura , Koh Ishizuka
发明人： Tetsuharu Nishimura , Koh Ishizuka
CPC分类号： H03M1/30 , G01D5/34715
摘要： A rotary encoder and a scanning system using the same for detecting rotation of a galvano scanner which comprises a rotary scale coupled to a rotating driver, a scale with slits formed at a non-uniform pitch circumferentially on the rotary scale within a limited rotation angle and detection means for detecting a rotation status by reading the slits.
摘要翻译： 一种旋转编码器和使用该旋转编码器的扫描系统，用于检测电动扫描器的旋转，其包括耦合到旋转驱动器的旋转刻度，具有在受限旋转角度内在旋转刻度上沿圆周非均匀间距形成的狭缝的刻度， 用于通过读取狭缝来检测旋转状态的检测装置。
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公开(公告)号：US5146085A
公开(公告)日：1992-09-08
申请号：US522051
申请日：1990-05-11
申请人： Koh Ishizuka , Tetsuharu Nishimura
发明人： Koh Ishizuka , Tetsuharu Nishimura
摘要： A light beam is incident on a first position on a scale at such an angle that diffracted lights substantially coincide with an incident optical path, and two diffracted lights are directed along a substantially common optical path and are incident on a second position symmetrical with the first position. An interference light formed by rediffracted lights reflected from the second position is detected to thereby detect the displaced state of the scale.
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公开(公告)号：US5066130A
公开(公告)日：1991-11-19
申请号：US347397
申请日：1989-05-04
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A displacement measuring apparatus comprises a scale relatively displaced to an irradiating beam, a reading head to read the scale by the irradiating beam, and control device to control the apparatus for avoiding substantially the leakage of the irradiating beam out of the apparatus in response to the positional error of the scale and the irradiating beam.
摘要翻译： 位移测量装置包括与照射光束相对位移的标尺，用于通过照射光束读取标尺的读取头以及控制装置，用于控制装置，以便基本上避免照射光束从设备中泄漏出来，以响应于 刻度和照射光束的位置误差。
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公开(公告)号：US5051579A
公开(公告)日：1991-09-24
申请号：US532108
申请日：1990-06-01
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： An encoder for measuring movement of an optical scale by photoelectrically converting light from the optical scale obtained by applying light from a light source to the optical scale, by means of light receiving element, includes detector for detecting a variation in intensity of the light received by the light receiving element and a comparator for comparing a signal from the detector with a predetermined reference signal. Consequently, a predetermined alarm signal is generated on the basis of the result of comparison obtained from the comparator. A measuring system for detecting a moving condition of an object, includes an optical scale connected to the object; a light source for applying light to the optical scale; a first detector for receiving light from the optical scale and for detecting the moving condition of the object; a second detector for detecting a variation in intensity of the light received by the first detector; and a signal forming device for forming a predetermined alarm signal on the basis of an output signal from the second detector.
摘要翻译： 一种编码器，用于通过光电转换由光源将光从光源施加到光刻尺上的光通过光接收元件测量光标的移动，包括用于检测由光接收元件接收的光的强度变化的检测器 光接收元件和用于将来自检测器的信号与预定参考信号进行比较的比较器。 因此，基于从比较器获得的比较结果来生成预定的报警信号。 用于检测物体的移动状态的测量系统包括连接到物体的光学刻度; 用于将光施加到光学刻度的光源; 第一检测器，用于接收来自光刻尺的光并检测物体的移动状态; 第二检测器，用于检测由第一检测器接收的光的强度变化; 以及信号形成装置，用于根据来自第二检测器的输出信号形成预定报警信号。
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9.发明授权
公开(公告)号：US5038491A
公开(公告)日：1991-08-13
申请号：US369862
申请日：1989-06-22
CPC分类号： G01D5/24442 , G01D5/24476 , G01D5/347
摘要： A scale, for measuring the displacement of an object to be examined, has a division and a mark for alignment of the division, and a displacement measuring apparatus, for measuring the displacement of a scale, has a device for reading the division of the scale and a detector for detecting the positional error of the division relative to the direction of the displacement.
摘要翻译： 用于测量待检测物体的位移的刻度具有划分的划分和标记，并且用于测量刻度的位移的位移测量装置具有用于读取刻度的分割的装置 以及用于检测相对于位移方向的分割的位置误差的检测器。
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10.发明授权Device having signal interpolation circuit and displacement measuring apparatus comprising the device 失效具有信号插值电路的装置和包括该装置的位移测量装置
公开(公告)号：US5067089A
公开(公告)日：1991-11-19
申请号：US419705
申请日：1989-10-11
CPC分类号： G01D5/24404 , H03M1/645
摘要： A device comprises output device for receiving signals having predetermined phases and outputting first and second signals having different phase angles and amplitudes, conversion device for converting the first signal into a first binary signal and the second signal into a second binary signal, the conversion device being arranged so that widths of the first and second binary signals are substantially equal to each other regardless of a difference in amplitude of the first and second signals, and generating device for generating first and second pulses according to phase angles on the basis of the first and second binary signals.
摘要翻译： 一种设备包括用于接收具有预定相位的信号的输出装置，并且输出具有不同相位角和幅度的第一和第二信号，用于将第一信号转换为第一二进制信号的转换装置和第二信号转换为第二二进制信号，转换装置 布置成使得第一和第二二进制信号的宽度彼此基本相等，而与第一和第二信号的幅度差无关，以及用于根据第一和第二信号的相位角产生第一和第二脉冲的产生装置， 第二个二进制信号。
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