Substrate ion exchange systems with single- and multi-component ion exchange baths and methods for maintaining such systems
    30.
    发明授权
    Substrate ion exchange systems with single- and multi-component ion exchange baths and methods for maintaining such systems 有权
    具有单组分和多组分离子交换浴的底物离子交换系统和用于维持这种系统的方法

    公开(公告)号:US09359250B2

    公开(公告)日:2016-06-07

    申请号:US14288909

    申请日:2014-05-28

    CPC classification number: C03C21/001 C03C21/005

    Abstract: A substrate ion exchange system, along with methods of maintain such a system, is provided that includes a substrate having an outer region containing a plurality of substrate metal ions, an ion exchange bath that includes a plurality of first metal ions at a first metal ion concentration and a plurality of second metal ions at a second metal ion concentration, and a vessel for containing the ion exchange bath and the substrate. The ion exchange system also includes a temperature sensor coupled to the vessel, and a processor configured to receive a vessel temperature from the sensor and to evaluate the first metal ion concentration based at least in part on a first metal ion consumption rate relationship and the vessel temperature. Further, the first metal ion consumption rate relationship is predetermined.

    Abstract translation: 提供了一种衬底离子交换系统以及保持这种系统的方法,其包括具有包含多个衬底金属离子的外部区域的衬底,在第一金属离子处包括多个第一金属离子的离子交换浴 浓度和多个第二金属离子浓度的第二金属离子,以及用于容纳离子交换浴和基底的容器。 离子交换系统还包括耦合到容器的温度传感器,以及处理器,其被配置为从传感器接收容器温度并且至少部分地基于第一金属离子消耗速率关系和容器来评估第一金属离子浓度 温度。 此外,第一金属离子消耗速率关系是预定的。

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