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24 条记录 (耗时 0.211 秒)

    Method of fabricating self-aligned contacts and local interconnects in CMOS and BICMOS processes using chemical mechanical polishing (CMP)
    23.
    发明授权
    Method of fabricating self-aligned contacts and local interconnects in CMOS and BICMOS processes using chemical mechanical polishing (CMP) 失效
    在CMOS和BICMOS工艺中使用化学机械抛光（CMP）制造自对准触点和局部互连的方法

    公开(公告)号：US5759882A

    公开(公告)日：1998-06-02

    申请号：US732018

    申请日：1996-10-16

    申请人： Dah-Bin Kao ,  John Pierce

    发明人： Dah-Bin Kao ,  John Pierce

    IPC分类号： H01L21/768 ,  H01L21/8249

    CPC分类号： H01L21/768

    摘要： A method of fabricating external contacts in an integrated circuit structure utilizes chemical mechanical polishing (CMP). The structure includes an active device substrate region defined by field oxides. First and second diffusions formed in the active region define a substrate surface region therebetween. In accordance with the method, a layer of amorphous or polycrystalline silicon is formed in contact with the diffusion regions, subjected to a chemical mechanical polishing (CMP) step and then etched to form external contacts. The process flow can be applied to CMOS technologies and adapted to bipolar technologies to provide a BiCMOS flow.

    摘要翻译： 在集成电路结构中制造外部触点的方法采用化学机械抛光（CMP）。 该结构包括由场氧化物限定的有源器件衬底区域。 在有源区域中形成的第一和第二扩散限定了它们之间的衬底表面区域。 根据该方法，形成与扩散区接触的非晶或多晶硅层，经受化学机械抛光（CMP）步骤，然后蚀刻以形成外部触点。 工艺流程可以应用于CMOS技术，并适用于双极技术以提供BiCMOS流程。

    Star shot wave tumbler systems
    24.
    发明授权
    Star shot wave tumbler systems 失效
    星射波倒转系统

    公开(公告)号：US5653625A

    公开(公告)日：1997-08-05

    申请号：US657543

    申请日：1996-06-04

    申请人： John Pierce ,  John R. Pierce

    发明人： John Pierce ,  John R. Pierce

    IPC分类号： B24B31/02 ,  B24B31/14

    CPC分类号： B24B31/02 ,  B24B31/14

    摘要： A new Star Shot Wave Tumbler System for polishing objects such as jewelry or coins with a simple water, soap and scrubbing tumbler shot solution in a short period of time with a quality polish. The inventive device includes a circular tumbler drum to retain the objects being polished, a stability means preventing undue vibration of the circular tumbler drum, a tumbler rotation means rotating the circular tumbler drum, at least one scrubbing tumbler shot for every two jewelry pieces or every two charms or any combination of two thereof, to polish the object and a wave tumbler member to agitate the objects during polishing.

    摘要翻译： 一个新的Star Shot Wave Tumbler系统，用于在短时间内用简单的水，肥皂和擦洗滚筒式溶液抛光物体，如珠宝​​或硬币，并使用优质抛光。 本发明的装置包括一个圆形滚筒，用于保持被抛光的物体，一种可以防止圆形滚筒的不适当振动的稳定装置，一个旋转滚筒滚筒的滚筒旋转装置，每两个首饰件或每一个的至少一个擦洗滚筒镜头 两个魅力或其两个的任何组合，以抛光物体和波浪滚筒构件以在抛光期间搅动物体。