MULTIPE ZONE CARRIER HEAD WITH FLEXIBLE MEMBRANE
    21.
    发明申请
    MULTIPE ZONE CARRIER HEAD WITH FLEXIBLE MEMBRANE 有权
    带有柔性膜的多区域载体头

    公开(公告)号:US20070272356A1

    公开(公告)日:2007-11-29

    申请号:US11837412

    申请日:2007-08-10

    IPC分类号: C23F1/00

    CPC分类号: B24B37/30

    摘要: A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.

    摘要翻译: 用于基板的化学机械抛光的承载头包括基部和在基部下方延伸的柔性膜。 柔性膜包括具有提供基板接收表面的外表面的中心部分,将中心部分连接到基部的周边部分和从中心部分的内表面延伸的至少一个折片。 翼片将柔性膜和基部之间的体积分成多个室,并且该翼片包括横向延伸的第一部分和在第一部分下方延伸并且将横向延伸的第一部分连接到中心部分的成角度的第二部分。

    Methods and systems for roaming in 802.11 wireless networks
    23.
    发明申请
    Methods and systems for roaming in 802.11 wireless networks 审中-公开
    802.11无线网络中漫游的方法和系统

    公开(公告)号:US20060209758A1

    公开(公告)日:2006-09-21

    申请号:US11081989

    申请日:2005-03-16

    IPC分类号: H04Q7/00 H04L12/56

    摘要: The present invention discloses a system and method for fast and smooth roaming in a wireless network with plural access points. In order to keep better communication quality, the client device may have dual-transceiver. One transceiver is applied for transmitting and receiving data packets to and from a current associated access point. Concurrently, the other transceiver would scan for another suitable access point and prepare to re-associate with it. As the communication quality degrades to a predetermined level, which indicates that the linkage between the client device and the currently associated access point might be broken, the transceiver in scanning mode would begin to re-associate with a new access point to reduce the latency time. After that, the transceiver originally in the linking mode would switch to scan for another suitable access point while the other transceiver is associated with the newly associated access point.

    摘要翻译: 本发明公开了一种在具有多个接入点的无线网络中快速平滑漫游的系统和方法。 为了保持更好的通信质量,客户端设备可能具有双收发器。 应用一个收发器用于向和从当前相关联的接入点发送和接收数据分组。 同时,另一个收发器将扫描另一个合适的接入点,并准备与其重新关联。 当通信质量下降到预定级别,其指示客户端设备和当前相关联的接入点之间的联系可能被破坏时,扫描模式中的收发器将开始与新接入点重新关联以减少等待时间 。 之后,最初处于链接模式的收发器将切换到扫描另一个合适的接入点,而另一个收发器与新关联的接入点相关联。

    Storage capacitor with hole and liquid crystal display using the same
    25.
    发明申请
    Storage capacitor with hole and liquid crystal display using the same 审中-公开
    储存电容器带孔和液晶显示器使用相同

    公开(公告)号:US20060103770A1

    公开(公告)日:2006-05-18

    申请号:US11273322

    申请日:2005-11-14

    申请人: Chao Hung Hung Chen

    发明人: Chao Hung Hung Chen

    IPC分类号: G02F1/1343

    CPC分类号: G02F1/136213

    摘要: A liquid crystal display includes a plurality of pixel regions (3), each of which includes a substrate portion (39) and a storage capacitor (37) arranged on the substrate portion. The storage capacitor includes a first capacitor electrode (38), an insulating layer (36) formed on the first capacitor electrode, and a second capacitor electrode (34) positioned on the insulating layer. At least one through hole (380) is arranged in at least one of the first and second capacitor electrodes. With the edge effect of the through hole(s) of the capacitor electrode(s), the capacitance of the storage capacitors can be increased significantly. Therefore, each of the storage capacitors can have a high capacitance without reducing the aperture ratio of the liquid crystal display.

    摘要翻译: 液晶显示器包括多个像素区域(3),每个像素区域包括设置在基板部分上的基板部分(39)和存储电容器(37)。 存储电容器包括第一电容器电极(38),形成在第一电容器电极上的绝缘层(36)和位于绝缘层上的第二电容器电极(34)。 至少一个通孔(380)布置在第一和第二电容器电极中的至少一个中。 随着电容器电极的通孔的边缘效应,存储电容器的电容可以显着增加。 因此,每个存储电容器可以具有高电容,而不会降低液晶显示器的开口率。

    Multiple zone carrier head with flexible membrane
    26.
    发明申请
    Multiple zone carrier head with flexible membrane 有权
    带有柔性膜的多区域载体头

    公开(公告)号:US20050211377A1

    公开(公告)日:2005-09-29

    申请号:US10810784

    申请日:2004-03-26

    CPC分类号: B24B37/30

    摘要: A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.

    摘要翻译: 用于基板的化学机械抛光的承载头包括基部和在基部下方延伸的柔性膜。 柔性膜包括具有提供基板接收表面的外表面的中心部分,将中心部分连接到基部的周边部分和从中心部分的内表面延伸的至少一个折片。 翼片将柔性膜和基部之间的体积分成多个室,并且该翼片包括横向延伸的第一部分和在第一部分下方延伸并且将横向延伸的第一部分连接到中心部分的成角度的第二部分。

    Carrier head for chemical mechanical polishing
    28.
    发明授权
    Carrier head for chemical mechanical polishing 有权
    化学机械抛光用载体头

    公开(公告)号:US06406361B1

    公开(公告)日:2002-06-18

    申请号:US09693041

    申请日:2000-10-20

    IPC分类号: B24B4702

    CPC分类号: B24B37/30 B24B37/32

    摘要: A carrier head for a chemical mechanical polishing apparatus includes a base, a flexible membrane extending beneath the base to provide a mounting surface for a substrate, and a retaining ring surrounding the mounting surface. An edge portion of the flexible membrane extends around an outer surface of a support structure. An outer surface of the support structure is tapered to reduce binding between the flexible membrane and the retaining ring. Alternately, there may be a relatively wide gap between the support structure and the retaining ring, or a sidewall portion of the flexible membrane may be reinforced.

    摘要翻译: 用于化学机械抛光装置的载体头包括基底,在基底下方延伸的柔性膜以提供用于基底的安装表面,以及围绕安装表面的保持环。 柔性膜的边缘部分围绕支撑结构的外表面延伸。 支撑结构的外表面是锥形的,以减少柔性膜和保持环之间的结合。 或者,支撑结构和保持环之间可能存在相对宽的间隙,或者可以增强柔性膜的侧壁部分。

    Method of chemical mechanical polishing with edge control
    29.
    发明授权
    Method of chemical mechanical polishing with edge control 有权
    边缘控制化学机械抛光方法

    公开(公告)号:US06361420B1

    公开(公告)日:2002-03-26

    申请号:US09500137

    申请日:2000-02-08

    IPC分类号: B24B722

    CPC分类号: B24B37/32 B24B37/30

    摘要: A carrier head, particularly suited for chemical mechanical polishing of a flatted substrate, includes a flexible membrane and an edge load ring. A lower surface of the flexible membrane provides a receiving surface for a center portion of the substrate, whereas a lower surface of the edge load ring provides a receiving surface for a perimeter portion of the substrate. A slurry suitable for chemical mechanical polishing a flatted substrate includes water, a colloidal silica that tends to agglomerate, and a fumed silica that tends not to agglomerate.

    摘要翻译: 特别适用于平坦化基材的化学机械抛光的载体头包括柔性膜和边缘负载环。 柔性膜的下表面提供了用于衬底的中心部分的接收表面,而边缘负载环的下表面为衬底的周边部分提供了接收表面。 适用于化学机械抛光平底基材的浆料包括水,倾向于附聚的胶体二氧化硅,以及趋于不凝聚的热解法二氧化硅。

    Carrier head for chemical mechanical polishing

    公开(公告)号:US6165058A

    公开(公告)日:2000-12-26

    申请号:US207700

    申请日:1998-12-09

    IPC分类号: B24B37/30 B24B37/32 B24B37/04

    CPC分类号: B24B37/30 B24B37/32

    摘要: A carrier head for a chemical mechanical polishing apparatus includes a base, a flexible membrane extending beneath the base to provide a mounting surface for a substrate, and a retaining ring surrounding the mounting surface. An edge portion of the flexible membrane extends around an outer surface of a support structure. An outer surface of the support structure is tapered to reduce binding between the flexible membrane and the retaining ring. Alternately, there may be a relatively wide gap between the support structure and the retaining ring, or a sidewall portion of the flexible membrane may be reinforced.