公开(公告)号：US11092886B2

公开(公告)日：2021-08-17

申请号：US15979827

申请日：2018-05-15

申请人： IMEC VZW ,  Imec USA Nanoelectronics Design Center

发明人： Marina Timmermans ,  Emily Gallagher ,  Ivan Pollentier ,  Hanns Christoph Adelmann ,  Cedric Huyghebaert ,  Jae Uk Lee

IPC分类号： G03F1/62 ,  G03F1/64

摘要： The present disclosure relates to a method for forming a pellicle for extreme ultraviolet lithography, the method comprising: forming a coating of a first material on a peripheral region of a main surface of a carbon nanotube pellicle membrane, the membrane including a carbon nanotube film, arranging the carbon nanotube pellicle membrane on a pellicle frame with the peripheral region facing a support surface of the pellicle frame, wherein the support surface of the pellicle frame is formed by a second material, and bonding together the coating of the carbon nanotube pellicle membrane and the pellicle support surface by pressing the carbon nanotube pellicle membrane and the pellicle support surface against each other. The present disclosure relates also relates to a method for forming a reticle system for extreme ultraviolet lithography.

公开(公告)号：US20160032475A1

公开(公告)日：2016-02-04

申请号：US14814362

申请日：2015-07-30

申请人： IMEC VZW ,  King Abdulaziz City for Science and Technology

发明人： Cedric Huyghebaert ,  Alaa Abd-Elnaiem ,  Philippe Vereecken

IPC分类号： C25D1/00 ,  H01B5/00 ,  C25D11/04 ,  H01B1/02

CPC分类号： C25D1/006 ,  B82Y10/00 ,  B82Y40/00 ,  C25D1/20 ,  C25D3/12 ,  C25D11/005 ,  C25D11/045 ,  C25D11/24 ,  H01B1/023 ,  H01B5/002 ,  H01L29/0676 ,  H01L29/1029 ,  H01L29/413 ,  H01L29/66439 ,  H01L29/66469 ,  H01M4/131 ,  H01M4/661 ,  H01M4/70 ,  H01M10/052 ,  H01M2004/028

摘要： A cluster of non-collapsed nanowires, a template to produce the same, methods to obtain the template and to obtain the cluster by using the template, and devices comprising the cluster are described. The cluster and the template both have an interconnected region and an interconnection-free region.

摘要翻译： 描述了一组未折叠的纳米线，产生相同的模板，获取模板并通过使用模板获取集群的方法以及包含该集群的设备。 集群和模板都具有互连区域和互连区域。

公开(公告)号：US20150079399A1

公开(公告)日：2015-03-19

申请号：US14486678

申请日：2014-09-15

申请人： IMEC VZW

发明人： Cedric Huyghebaert ,  Philippe M. Vereecken ,  Geoffrey Pourtois

IPC分类号： C01B31/04 ,  B32B38/00 ,  B32B37/00

CPC分类号： C25F5/00 ,  B32B37/025 ,  B32B38/0008 ,  C01B32/19 ,  C01B32/194 ,  H01L21/187 ,  Y10T428/30

摘要： A method for transferring a graphene layer from a metal substrate to a second substrate is provided comprising: providing a graphene layer on the metal substrate, adsorbing hydrogen atoms on the metal substrate by passing protons through the graphene layer, treating the metal substrate having adsorbed hydrogen atoms thereon in such a way as to form hydrogen gas from the adsorbed hydrogen atoms, thereby detaching the graphene layer from the metal substrate, transferring the graphene layer to the second substrate, and optionally reusing the metal substrate by repeating the aforementioned steps.

摘要翻译： 提供一种将石墨烯层从金属基板转移到第二基板的方法，包括：在金属基板上提供石墨烯层，通过使质子通过石墨烯层吸附金属基板上的氢原子，处理具有吸附氢的金属基板 从而从吸附的氢原子形成氢气，从而从石墨烯衬底分离石墨烯层，将石墨烯层转移到第二衬底，以及通过重复上述步骤任选重新使用金属衬底。