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公开(公告)号:US20230189497A1
公开(公告)日:2023-06-15
申请号:US18064133
申请日:2022-12-09
Applicant: IMEC VZW
Inventor: Cedric Huyghebaert , Tom Schram , Iuliana Radu
IPC: H10B10/00 , G11C11/419
CPC classification number: H10B10/125 , G11C11/419
Abstract: The present disclosure relates generally to static random-access memory (SRAM) devices. Specifically, the disclosure proposes a SRAM device with a three-layered SRAM cell design. The SRAM cell comprises a storage comprising four storage transistors, and comprises two access transistors to control access to the storage cell. The SRAM cell further comprises a stack of three layer structures. Two of the storage transistors are formed in a first layer structure of the stack, and two other of the storage transistors are formed in a second layer structure of the stack adjacent to the first layer structure. The two access transistors are formed in a third layer structure of the stack adjacent to the second layer structure. Each layer structure comprises a semiconductor material, the transistors in the layer structure are based on that semiconductor material, and at least two of the three layer structures comprise a different type of semiconductor material.
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公开(公告)号:US09834847B2
公开(公告)日:2017-12-05
申请号:US14814362
申请日:2015-07-30
Applicant: IMEC VZW , King Abdulaziz City for Science and Technology
Inventor: Cedric Huyghebaert , Alaa Abd-Elnaiem , Philippe Vereecken
IPC: C25D1/20 , C25D1/00 , B82Y10/00 , B82Y40/00 , H01L29/66 , H01L29/06 , H01L29/10 , H01L29/41 , C25D11/04 , H01B1/02 , H01B5/00 , H01M4/66 , H01M4/70 , H01M4/131 , H01M10/052 , H01M4/02 , C25D3/12 , C25D11/24 , C25D11/00
CPC classification number: C25D1/006 , B82Y10/00 , B82Y40/00 , C25D1/20 , C25D3/12 , C25D11/005 , C25D11/045 , C25D11/24 , H01B1/023 , H01B5/002 , H01L29/0676 , H01L29/1029 , H01L29/413 , H01L29/66439 , H01L29/66469 , H01M4/131 , H01M4/661 , H01M4/70 , H01M10/052 , H01M2004/028
Abstract: A cluster of non-collapsed nanowires, a template to produce the same, methods to obtain the template and to obtain the cluster by using the template, and devices having the cluster. The cluster and the template both have an interconnected region and an interconnection-free region.
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公开(公告)号:US11898958B2
公开(公告)日:2024-02-13
申请号:US17323115
申请日:2021-05-18
Applicant: IMEC VZW , Katholieke Universiteit Leuven, KU LEUVEN R&D
Inventor: Alessandra Leonhardt , Cesar Javier Lockhart De La Rosa , Stefan De Gendt , Cedric Huyghebaert , Steven Brems , Thomas Nuytten
CPC classification number: G01N21/6489 , G01N21/9501
Abstract: A spot on a layer of a 2D semiconductor material deposited on a substrate is irradiated so as to generate excitons, so that photons are emitted from the layer. The photoluminescence spectrum is recorded for different values of the charge carrier concentration in the layer. The modulation of the charge carrier concentration may be realized by modulating the output power of the light source used to irradiate the sample. The relation is recorded between the ratio of the photoluminescence intensity of a first peak in the spectrum related to radiative recombination from indirect bandgaps to the intensity of a second peak in the spectrum related to radiative recombination from direct bandgaps, and the carrier concentration. This relation is fitted to a model of the ratio that takes into account multiple recombination mechanisms, radiative and non-radiative. From this process, the trap density within the bandgap is derived.
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公开(公告)号:US10712659B2
公开(公告)日:2020-07-14
申请号:US15979800
申请日:2018-05-15
Applicant: IMEC VZW , Imec USA Nanoelectronics Design Center
Inventor: Emily Gallagher , Cedric Huyghebaert , Ivan Pollentier , Hanns Christoph Adelmann , Marina Timmermans , Jae Uk Lee
Abstract: The present disclosure relates to a method for forming a carbon nanotube pellicle membrane for an extreme ultraviolet lithography reticle, the method comprising: bonding together overlapping carbon nanotubes of at least one carbon nanotube film by pressing the at least one carbon nanotube film between a first pressing surface and a second pressing surface, thereby forming a free-standing carbon nanotube pellicle membrane. The present disclosure also relates to a method for forming a pellicle for extreme ultraviolet lithography and for forming a reticle system for extreme ultraviolet lithography respectively.
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公开(公告)号:US10369775B2
公开(公告)日:2019-08-06
申请号:US15836737
申请日:2017-12-08
Applicant: IMEC VZW , Katholieke Universiteit Leuven
Inventor: Steven Brems , Cedric Huyghebaert , Ken Verguts , Stefan De Gendt
IPC: B32B43/00 , C01B32/194 , C01B32/184 , B32B9/00 , B32B15/04 , B32B37/00 , C07F7/08 , C07F7/10 , C25F5/00 , B32B38/10 , B81C1/00 , B32B37/18
Abstract: The disclosed technology generally relates to preparing two-dimensional material layers, and more particularly to releasing a graphene layer from a template substrate. According to an aspect, a method of releasing a graphene layer includes providing a template substrate on which the graphene layer is provided, the method comprising: subjecting the graphene layer and the template substrate to a water treatment by soaking the graphene layer and the template substrate in water such that water is intercalated between the template substrate and the graphene layer; and subjecting the graphene layer and the template substrate to a delamination process, thereby releasing the graphene layer from the template substrate.
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公开(公告)号:US20180329290A1
公开(公告)日:2018-11-15
申请号:US15979813
申请日:2018-05-15
Applicant: IMEC VZW , Imec USA Nanoelectronics Design Center
Inventor: Rik Jonckheere , Cedric Huyghebaert , Emily Gallagher
CPC classification number: G03F1/64 , G03F1/62 , G03F7/70825 , G03F7/70975 , G03F7/70983
Abstract: The present disclosure provides a lithographic reticle system comprising a reticle, a first pellicle membrane mounted in front of the reticle, and a second pellicle membrane mounted in front of the first pellicle membrane, wherein the first pellicle membrane is arranged between the reticle and the second pellicle membrane, and wherein the second pellicle membrane is releasably mounted in relation to the first pellicle membrane and the reticle.
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公开(公告)号:US20160204427A1
公开(公告)日:2016-07-14
申请号:US14992873
申请日:2016-01-11
Applicant: IMEC VZW , Katholieke Universiteit Leuven, KU LEUVEN R&D
Inventor: Philippe Vereecken , Cedric Huyghebaert , Xubin Chen
IPC: H01M4/36 , H01M10/0585
CPC classification number: H01M4/366 , H01M4/0471 , H01M4/139 , H01M10/0562 , H01M10/0585 , H01M2004/021 , H01M2300/0068
Abstract: Composite electrodes are disclosed that comprise an active electrode material and a solid electrolyte, wherein the solid electrolyte is a composite electrolyte. The composite electrolyte comprises an electrically insulating material having a plurality of pores and a solid electrolyte material covering inner surfaces of the plurality of pores. The active electrode material may comprise a plurality of active electrode material particles in electrical contact with each other, and the composite electrolyte may be located in spaces between the plurality of active electrode material particles. The present disclosure is further related to solid-state batteries comprising a stack of an anode, a solid electrolyte layer, and a cathode, wherein at least one of the anode and the cathode is a composite electrode according to the present disclosure. The present disclosure further provides methods for fabricating such composite electrodes and solid-state batteries.
Abstract translation: 公开了包含活性电极材料和固体电解质的复合电极,其中固体电解质是复合电解质。 复合电解质包括具有多个孔的电绝缘材料和覆盖多个孔的内表面的固体电解质材料。 活性电极材料可以包括彼此电接触的多个活性电极材料颗粒,并且复合电解质可以位于多个有源电极材料颗粒之间的空间中。 本公开还涉及包括阳极,固体电解质层和阴极的堆叠的固态电池,其中阳极和阴极中的至少一个是根据本公开的复合电极。 本公开还提供了制造这种复合电极和固态电池的方法。
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公开(公告)号:US20140363744A1
公开(公告)日:2014-12-11
申请号:US14295726
申请日:2014-06-04
Applicant: IMEC VZW
Inventor: Philippe M. Vereecken , Cedric Huyghebaert
IPC: H01M4/13 , H01M10/0525 , H01M10/058 , H01M10/056
CPC classification number: H01M4/13 , H01M4/0416 , H01M10/0525 , H01M10/056 , H01M10/0562 , H01M10/0565 , H01M10/058 , H01M2300/0065 , H01M2300/0071 , H01M2300/0082 , Y10T29/49115
Abstract: A solid-state battery cell includes an anode, a cathode, and a solid electrolyte matrix. At least the anode or the cathode may include an active electrode material having pores. Further, an inner surface of the pores may be coated with a first surface-ion diffusion enhancement coating. The solid electrolyte matrix may further include an electrically insulating matrix for a solid electrolyte. The electrically insulating matrix may have pores or passages and an inner surface of the pores or the passages may be coated with a second surface-ion diffusion enhancement coating.
Abstract translation: 固体电池单元包括阳极,阴极和固体电解质基质。 至少阳极或阴极可以包括具有孔的活性电极材料。 此外,孔的内表面可以涂覆有第一表面离子扩散增强涂层。 固体电解质基质还可以包括用于固体电解质的电绝缘基质。 电绝缘基质可以具有孔或通道,并且孔或内部表面可以用第二表面离子扩散增强涂层涂覆。
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公开(公告)号:US11163229B2
公开(公告)日:2021-11-02
申请号:US16674582
申请日:2019-11-05
Applicant: IMEC VZW , Katholieke Universiteit Leuven, KU LEUVEN R&D
Inventor: Marina Mariano Juste , Marina Timmermans , Ivan Pollentier , Cedric Huyghebaert , Emily Gallagher
Abstract: A method for protecting a photomask comprises: (i) providing the photomask, (ii) providing a border, (iii) depositing at least two electrical contacts on the border, (iv) mounting a film comprising carbon nanotubes on the border such that the film comprises a free-standing part, wherein after the mounting and depositing steps, the electrical contacts are in contact with the film, (v) inducing a current through the free-standing part of the film by biasing at least one pair of the electrical contacts, and (vi) mounting the border on at least one side of the photomask with the free-standing part of the film above the photomask.
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公开(公告)号:US20210191255A1
公开(公告)日:2021-06-24
申请号:US17131297
申请日:2020-12-22
Applicant: IMEC VZW
Inventor: Marina Timmermans , Cedric Huyghebaert , Ivan Pollentier , Elie Schapmans , Emily Gallagher
IPC: G03F1/64
Abstract: According to an aspect of the present disclosure there is provided a method for forming an EUVL pellicle, the method comprising: coating a carbon nanotube, CNT, membrane, and mounting the CNT membrane to a pellicle frame, wherein coating the CNT membrane comprises: pre-coating CNTs of the membrane with a seed material, and forming an outer coating on the pre-coated CNTs, the outer coating covering the pre-coated CNTs, the forming of the outer coating comprising depositing a coating material on the pre-coated CNTs by atomic layer deposition.
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