公开(公告)号：US11946850B2

公开(公告)日：2024-04-02

申请号：US17127980

申请日：2020-12-18

Applicant: IMEC VZW

Inventor： Geert Vanmeerbeeck ,  Ziduo Lin ,  Abdulkadir Yurt ,  Richard Stahl ,  Andy Lambrechts

IPC: G01N15/14 ,  G01N15/1434 ,  G03H1/08 ,  G01N15/06

CPC classification number: G01N15/1434 ,  G03H1/0866 ,  G01N15/06 ,  G01N2015/1454 ,  G01N2015/1486 ,  G03H2001/0883

Abstract: A device for detecting particles in air; said device comprising:



a receiver for receiving a flow of air comprising particles;
a particle capturing arrangement configured to transfer the particles from the flow of air to a liquid for collection of a set of particles in the liquid;
a flow channel configured to pass a flow of the liquid comprising the set of particles through the flow channel;
a light source configured to illuminate the set of particles in the flow channel, such that an interference pattern is formed by interference between light being scattered by the set of particles and non-scattered light from the light source; and
an image sensor comprising a plurality of photo-sensitive elements configured to detect incident light, the image sensor being configured to detect the interference pattern.

公开(公告)号：US20200285194A1

公开(公告)日：2020-09-10

申请号：US16648987

申请日：2018-09-19

Applicant: IMEC VZW

Inventor： Abdulkadir Yurt ,  Richard Stahl ,  Murali Jayapala ,  Geert Vanmeerbeeck

IPC: G03H1/04

Abstract: Example embodiments relate to imaging devices for in-line holographic imaging of objects. One embodiment includes an imaging device for in-line holographic imaging of an object. The imaging device includes a set of light sources configured to output light in confined illumination cones. The imaging device also includes an image sensor that includes a set of light-detecting elements. The set of light sources are configured to output light such that the confined illumination cones are arranged side-by-side and illuminate a specific part of the object. The image sensor is arranged such that the light-detecting elements detect a plurality of interference patterns. Each interference pattern is formed by diffracted light from the object originating from a single light source and undiffracted light from the same single light source. At least a subset of the set of light-detecting elements is arranged to detect light relating to not more than one interference pattern.