Method of fabricating field emission array type light emitting unit
    22.
    发明授权
    Method of fabricating field emission array type light emitting unit 有权
    场致发射阵列型发光单元的制造方法

    公开(公告)号:US07851231B2

    公开(公告)日:2010-12-14

    申请号:US11907942

    申请日:2007-10-18

    IPC分类号: H01L21/00

    摘要: A method of fabricating a field emission array type light emitting unit that includes a rear substrate including a plurality of cathodes and a plurality of carbon nanotube emitters on a front side, a front substrate including a plurality of anodes and a phosphor layer on a rear side, wherein the rear substrate and the front substrate are arranged at a distance apart from each other and a plurality of spacers are arranged between the rear substrate and the front substrate, the plurality of spacers being adapted to maintain constant the distance, the method includes producing a diffusion pattern by wet etching a front side of the front substrate.

    摘要翻译: 一种制造场发射阵列型发光单元的方法,该发光阵列型发光单元包括:前表面上包括多个阴极和多个碳纳米管发射体的后基板,包括多个阳极的前基板和背面的荧光体层 其特征在于,所述后基板和所述前基板被配置成彼此间隔开,并且在所述后基板与所述前基板之间配置有多个间隔件,所述多个间隔件适于保持距离恒定,所述方法包括: 通过湿法蚀刻前基板的前侧的扩散图案。