公开(公告)号：US07607214B2

公开(公告)日：2009-10-27

申请号：US11064659

申请日：2005-02-22

申请人： Timothy Clark Reiley ,  Barry Cushing Stipe

发明人： Timothy Clark Reiley ,  Barry Cushing Stipe

IPC分类号： G11B5/127 ,  B44C1/22

CPC分类号： G11B5/10 ,  G11B5/3163 ,  G11B5/3173 ,  G11B5/6005 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A slider for use in a magnetic data recording system that is constructed from a Si wafer by a method that saves valuable wafer real estate by minimizing kerf related to the cutting of the wafer into slider rows. The sliders are produced from a (110) oriented Si wafer, and the sliders are parsed into rows by a process that involves forming a mask having a trench or opening between the rows of sliders at the location of the desired cut and parallel to a vertical (111) plane of the wafer. The wafer is then exposed to KOH which removes wafer material in the vertical direction through the wafer without removing wafer material in the horizontal direction. The vertical removal of wafer material is due to the extreme preferential removal of the (110) surface Si over that of the (111) surface Si. This results in a narrow straight trench being formed. The KOH etch removal can form a trench or cut having a width of only 30 to 50 um through a 1 mm thick wafer.

摘要翻译： 一种用于磁数据记录系统的滑动器，其由Si晶片构成，该方法通过将晶片切割成滑块行来减少切割，从而节省了有价值的晶片的可靠性。 滑块由（110）定向的Si晶片制成，并且滑块通过涉及在期望的切口的位置处形成具有在滑动排之间的沟槽或开口的掩模并且平行于垂直线的方法被解析成行 （111）面。 然后将晶片暴露于KOH，其通过晶片在垂直方向上去除晶片材料，而不在水平方向上移除晶片材料。 晶片材料的垂直去除是由于（110）表面Si超过（111）表面Si的极端优先移除。 这导致形成窄的直槽。 KOH蚀刻去除可以通过1mm厚的晶片形成宽度仅为30至50μm的沟槽或切口。

公开(公告)号：US08194512B2

公开(公告)日：2012-06-05

申请号：US12942010

申请日：2010-11-08

申请人： Barry Cushing Stipe

发明人： Barry Cushing Stipe

IPC分类号： G11B11/00

CPC分类号： G11B5/6088 ,  G11B5/314 ,  G11B2005/0021

摘要： A thermally-assisted recording (TAR) head structure has a semiconductor substrate as the head carrier with a vertical-cavity surface-emitting laser (VCSEL) on its front surface, a TAR head formed directly on the VCSEL, and a highly reflecting third mirror on its back surface. The semiconductor substrate serves as an extended cavity for the VCSEL. The TAR head is fabricated on the outer surface of the VCSEL in the same manner as proposed for fabrication of a TAR head on a conventional slider. The TAR head includes a conventional read head and write head, and an optical waveguide with a grating coupler and a near-field transducer (NFT). The laser radiation is output through a partially reflecting output mirror of the VCSEL through the front surface to the grating coupler, which turns the incoming laser radiation 90 degrees and directs it into the waveguide from where it is directed to the NFT.

摘要翻译： 热辅助记录（TAR）头结构具有半导体衬底作为其前表面具有垂直腔表面发射激光器（VCSEL）的头部载体，直接形成在VCSEL上的TAR头和高反射第三反射镜 在其背面。 半导体衬底用作VCSEL的扩展腔。 TAR头以与在常规滑块上制造TAR头所提出的相同的方式制造在VCSEL的外表面上。 TAR头包括常规读头和写头，以及具有光栅耦合器和近场换能器（NFT）的光波导。 激光辐射通过VCSEL的部分反射的输出反射镜通过前表面输出到光栅耦合器，光栅耦合器使入射的激光辐射90度转动并将其引导到从其被引导到NFT的波导中。

公开(公告)号：US20120070784A1

公开(公告)日：2012-03-22

申请号：US13306582

申请日：2011-11-29

申请人： Hamid Balamane ,  Thomas Dudley Boone, JR. ,  Jordan Asher Katine ,  Barry Cushing Stipe

发明人： Hamid Balamane ,  Thomas Dudley Boone, JR. ,  Jordan Asher Katine ,  Barry Cushing Stipe

IPC分类号： G03F7/20

CPC分类号： G11B5/314 ,  G11B5/3163 ,  G11B5/6088 ,  G11B2005/0021

摘要： A method of fabricating a c-aperture or E-antenna plasmonic near field source for thermal assisted recording applications in hard disk drives is disclosed. A c-aperture or E-antenna is built for recording head applications. The technique employs e-beam lithography, partial reactive ion etching and metal refill to build the c-apertures. This process strategy has the advantage over other techniques in the self-alignment of the c-aperture notch to the c-aperture internal diameter, the small number of process steps required, and the precise and consistent shape of the c-aperture notch itself.

摘要翻译： 公开了一种在硬盘驱动器中制造用于热辅助记录应用的c孔径或E-antenna等离激元近场源的方法。 C孔径或E天线用于记录头部应用。 该技术采用电子束光刻，部分反应离子蚀刻和金属填充来构建c-孔。 该过程策略相对于c孔径切口对c孔径内径的自对准，所需的少量工艺步骤以及c孔口凹口本身的精确且一致的形状具有优于其它技术的优点。

公开(公告)号：US08092704B2

公开(公告)日：2012-01-10

申请号：US12345715

申请日：2008-12-30

申请人： Hamid Balamane ,  Thomas Dudley Boone, Jr. ,  Jordan Asher Katine ,  Barry Cushing Stipe

发明人： Hamid Balamane ,  Thomas Dudley Boone, Jr. ,  Jordan Asher Katine ,  Barry Cushing Stipe

IPC分类号： B44C1/22 ,  B23P15/00

CPC分类号： G11B5/314 ,  G11B5/3163 ,  G11B5/6088 ,  G11B2005/0021

摘要： A method of fabricating a c-aperture or E-antenna plasmonic near field source for thermal assisted recording applications in hard disk drives is disclosed. A c-aperture or E-antenna is built for recording head applications. The technique employs e-beam lithography, partial reactive ion etching and metal refill to build the c-apertures. This process strategy has the advantage over other techniques in the self-alignment of the c-aperture notch to the c-aperture internal diameter, the small number of process steps required, and the precise and consistent shape of the c-aperture notch itself.

摘要翻译： 公开了一种在硬盘驱动器中制造用于热辅助记录应用的c孔径或E-antenna等离激元近场源的方法。 C孔径或E天线用于记录头部应用。 该技术采用电子束光刻，部分反应离子蚀刻和金属填充来构建c-孔。 该过程策略相对于c孔径切口对c孔径内径的自对准，所需的少量工艺步骤以及c孔口凹口本身的精确且一致的形状具有优于其它技术的优点。

公开(公告)号：US08081542B1

公开(公告)日：2011-12-20

申请号：US12942206

申请日：2010-11-09

申请人： Michael Konrad Grobis ,  Barry Cushing Stipe ,  Dieter K. Weller ,  Gabriel Zeltzer

发明人： Michael Konrad Grobis ,  Barry Cushing Stipe ,  Dieter K. Weller ,  Gabriel Zeltzer

IPC分类号： G11B7/085 ,  G11B5/02

CPC分类号： B82Y10/00 ,  G11B5/012 ,  G11B5/6088 ,  G11B5/653 ,  G11B5/746 ,  G11B5/82 ,  G11B5/855 ,  G11B2005/0021

摘要： A thermally-assisted recording (TAR) patterned-media magnetic recording disk drive has a perpendicular patterned-media disk with multilevel data islands and a laser capable of supplying multiple levels of output power to a near-field transducer (NFT). If there are only two cells in each island, each island is formed of an upper cell of magnetic material with a coercivity HC1 and a Curie temperature TC1, a lower cell of magnetic material with a coercivity HC2 and a Curie temperature TC2 greater than TC1, and a nonmagnetic spacer layer between the two cells. Each cell is formed of high-anisotropy material so as to have an anisotropy field greater than the magnetic write field. The TAR laser is capable of supplying at least two levels of output power to the NFT to allow the islands to be heated to two distinct temperatures so that the two cells in an island can be written so as to have either the same or opposite magnetizations.

摘要翻译： 热辅助记录（TAR）图案介质磁记录盘驱动器具有具有多级数据岛的垂直图案化媒体盘和能够向近场换能器（NFT）提供多级输出功率的激光器。 如果每个岛中只有两个电池，每个岛由具有矫顽力HC1和居里温度TC1的磁性材料的上电池形成，具有矫顽力HC2和居里温度TC2大于TC1的磁性材料的下电池， 和两个电池之间的非磁性间隔层。 每个单元由高各向异性材料形成，以具有大于磁写入场的各向异性场。 TAR激光器能够向NFT提供至少两个级别的输出功率，以允许岛被加热到两个不同的温度，使得岛中的两个单元可被写入以具有相同或相反的磁化。

公开(公告)号：US08003236B2

公开(公告)日：2011-08-23

申请号：US12141060

申请日：2008-06-17

申请人： Thomas R. Albrecht ,  Barry Cushing Stipe ,  Henry Hung Yang

发明人： Thomas R. Albrecht ,  Barry Cushing Stipe ,  Henry Hung Yang

IPC分类号： G11B5/64

CPC分类号： G11B5/855

摘要： A method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks results in a master mold having topographic pillars arranged in a pattern of annular bands of concentric rings. The ratio of circumferential density of the pillars to the radial density of the concentric rings in a band is greater than 1. The method uses sidewall lithography to first form a pattern of generally radially-directed pairs of parallel lines on the master mold substrate, with the lines being grouped into annular zones or bands. The sidewall lithography process can be repeated, resulting in a doubling of the number of lines each time the process is repeated. Conventional lithography is used to form concentric rings over the radially-directed pairs of parallel lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands. The master mold may be used to nanoimprint the disks, resulting in disks having a BAR greater than 1, wherein BAR is the ratio of data track spacing in the radial direction to the data island spacing in the circumferential direction.

摘要翻译： 用于制造用于纳米压印图案化介质磁记录盘的母模的方法导致具有布置成同心环的环形带图案的形状柱的母模。 柱的圆周密度与带中同心环的径向密度的比率大于1.该方法使用侧壁光刻法首先在母模基底上形成大致径向定向的平行线对图案，其中， 线路被分组成环形区域或带。 可以重复侧壁光刻处理，导致每次重复该过程的行数加倍。 常规光刻用于在径向对平行线上形成同心环。 在蚀刻和抗蚀剂去除之后，主模具有布置成圆形环的柱，其中环被分组成环形带。 主模可以用于纳米压印盘，导致具有大于1的BAR的盘，其中BAR是径向方向上的数据轨道间隔与圆周方向上的数据岛间隔的比率。

公开(公告)号：US07852587B2

公开(公告)日：2010-12-14

申请号：US12209089

申请日：2008-09-11

申请人： Thomas R Albrecht ,  Manfred Ernst Schabes ,  Barry Cushing Stipe ,  Gabriel Zeltzer

发明人： Thomas R Albrecht ,  Manfred Ernst Schabes ,  Barry Cushing Stipe ,  Gabriel Zeltzer

IPC分类号： G11B5/02

CPC分类号： G11B5/314 ,  B82Y10/00 ,  G11B5/4866 ,  G11B5/59616 ,  G11B5/59677 ,  G11B5/743 ,  G11B5/82

摘要： A patterned-media magnetic recording disk drive uses an optical system for accurately clocking the write data. The disk has concentric data tracks patterned into discrete magnetizable data islands with nonmagnetic spaces between the islands. As the disk rotates, a radiation source directs near-field radiation to the islands and spaces, and a radiation detector receives reflected radiation. The radiation is directed from the source through an optical channel or waveguide on the air-bearing slider that supports the read and write heads. The optical channel or waveguide has a near-field transducer at the disk-facing surface of the slider where the near-field radiation exits and reflected radiation returns. The reflected optical power varies depending on whether the near-field transducer couples to an island or a space, so the radiation detector output signal represents the frequency and phase of the islands as the disk rotates. The write clock that controls write pulses to the write head is responsive to the radiation detector output signal, so the frequency and phase of the write clock signal can be matched to the frequency and phase of the islands as the disk rotates.

摘要翻译： 图形媒体磁记录磁盘驱动器使用光学系统来准确地计时写入数据。 磁盘具有图案化成离散的可磁化数据岛之间的同心数据轨道，岛之间具有非磁性空间。 当盘旋转时，辐射源将近场辐射引导到岛和空间，并且辐射检测器接收反射的辐射。 辐射从源通过支撑读写头的含气滑块上的光通道或波导引导。 光通道或波导在滑块的面向盘的表面处具有近场换能器，其中近场辐射离开并且反射辐射返回。 反射的光功率取决于近场换能器耦合到岛还是空间，因此辐射检测器输出信号表示盘旋转时岛的频率和相位。 将写入脉冲控制到写入头的写入时钟响应于辐射检测器输出信号，因此当时间盘旋转时，写时钟信号的频率和相位可以与岛的频率和相位匹配。

公开(公告)号：US20100165802A1

公开(公告)日：2010-07-01

申请号：US12347194

申请日：2008-12-31

申请人： Barry Cushing Stipe

发明人： Barry Cushing Stipe

IPC分类号： G11B11/00

CPC分类号： G11B5/314 ,  G11B7/1387 ,  G11B2005/001 ,  G11B2005/0021

摘要： According to one embodiment, an apparatus includes a near field transducer comprising a conductive metal film having a main body with front and back edges and a ridge extending from the front edge of the main body. Also, the apparatus includes an optical waveguide for illumination of the near field transducer, wherein a distance between the ridge and the back edge of the main body is between about 60 and about 240 nanometers.

摘要翻译： 根据一个实施例，一种装置包括近场换能器，其包括导电金属膜，该导电金属膜具有主体，其具有前后边缘，以及从主体的前边缘延伸的脊。 此外，该装置还包括用于照射近场换能器的光波导，其中脊与主体的后边缘之间的距离在约60至约240纳米之间。

公开(公告)号：US20090310256A1

公开(公告)日：2009-12-17

申请号：US12141060

申请日：2008-06-17

申请人： Thomas R. Albrecht ,  Barry Cushing Stipe ,  Henry Hung Yang

发明人： Thomas R. Albrecht ,  Barry Cushing Stipe ,  Henry Hung Yang

IPC分类号： G11B5/82 ,  B44C1/22 ,  B28B1/00

CPC分类号： G11B5/855

摘要： A method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks results in a master mold having topographic pillars arranged in a pattern of annular bands of concentric rings. The ratio of circumferential density of the pillars to the radial density of the concentric rings in a band is greater than 1. The method uses sidewall lithography to first form a pattern of generally radially-directed pairs of parallel lines on the master mold substrate, with the lines being grouped into annular zones or bands. The sidewall lithography process can be repeated, resulting in a doubling of the number of lines each time the process is repeated. Conventional lithography is used to form concentric rings over the radially-directed pairs of parallel lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands. The master mold may be used to nanoimprint the disks, resulting in disks having a BAR greater than 1, wherein BAR is the ratio of data track spacing in the radial direction to the data island spacing in the circumferential direction.

摘要翻译： 用于制造用于纳米压印图案化介质磁记录盘的母模的方法导致具有布置成同心环的环形带图案的形状柱的母模。 柱的圆周密度与带中同心环的径向密度的比率大于1.该方法使用侧壁光刻法首先在母模基底上形成大致径向定向的平行线对的图案，其中， 线路被分组成环形区域或带。 可以重复侧壁光刻处理，导致每次重复该过程的行数加倍。 常规光刻用于在径向对平行线上形成同心环。 在蚀刻和抗蚀剂去除之后，主模具有布置成圆形环的柱，其中环被分组成环形带。 主模可以用于纳米压印盘，导致具有大于1的BAR的盘，其中BAR是径向方向上的数据轨道间隔与圆周方向上的数据岛间隔的比率。

公开(公告)号：US07362533B2

公开(公告)日：2008-04-22

申请号：US10909128

申请日：2004-07-30

申请人： Barry Cushing Stipe

发明人： Barry Cushing Stipe

IPC分类号： G11B21/02

CPC分类号： G11B5/3133 ,  G11B5/3136 ,  G11B5/6005 ,  G11B5/6064

摘要： A disk drive is described having a capability of burnishing the sliders on demand by using a heater in the slider to thermally protrude the slider. Each slider includes a heating element with a sufficient thermal expansion stroke to bring the area of the slider containing the transducer into contact with the disk surface to burnish the slider. Preferably the heater is used to bring the slider into contact with the disk to burnish the lowest flying part of the slider body after the drive has been assembled, and remove most or all of the overcoat and recession, and exposing the transducers at the ABS. The burnish process is performed in situ in the drive and the drive is preferably hermetically sealed to reduce the risk of corrosion. The slider can be flown and magnetically tested prior to burnishing off the overcoat to avoid corroding the head before the drive is assembled.

摘要翻译： 描述了一种磁盘驱动器，其具有通过使用滑块中的加热器按需来对滑块进行抛光的能力，以使滑块热突出。 每个滑块包括具有足够的热膨胀冲程的加热元件，以使包含换能器的滑块的区域与盘表面接触以抛光滑块。 优选地，加热器用于使滑块与盘接触以在组装驱动器之后抛光滑块体的最低飞行部分，并且去除大部分或全部外涂层和凹部，以及在ABS处露出换能器。 抛光过程在驱动器中原位进行，并且驱动器优选被气密密封以降低腐蚀的风险。 在抛光外涂层之前，可以对滑块进行飞行和磁性测试，以避免驱动器组装前腐蚀头部。