摘要:
A mold to mold an integral turbofan having a rotating plate joined to a drive motor, an outer ring concentrically disposed outside of the rotating plate with a spacing therebetween, a plurality of blades radially arranged on a front face of the rotating plate and integrally connected at rear ends thereof to the rotating plate and the outer ring, and a shroud integrally formed with front ends of the blades. The mold includes a first half having first, second and third front parts forming a front face of the rotating plate, the shroud and the outer ring, respectively, and a second half combining with the first half, and including a first rear part forming a rear face of the rotating plate, a plurality of second rear parts forming a rear face of the shroud and the blades, and a third rear part forming a rear face of the outer ring.
摘要:
N-vinyllactam derivatives protected at the 3-position are provided and represented by the following formula (I). These are polymerized into homo- and copolymers for use in microlithography of semiconductor manufacture. The polymers are used as a photoresist material suitable for a deep UV process so that pictures of high sensitivity and high resolution can be obtained. In addition, ultrafine circuits can be formed and an exceptional improvement in pattern formation can be accomplished through the use of the photoresist of the invention. ##STR1##
摘要:
An air purifier including: a filter which removes contaminants from air passing therethrough; a fan which generates a flow force to pass air through the filter; and a rotating body rotatably mounted in the air purifier and defining a flow path around the fan, a discharge direction of the flow path being varied by rotation of the rotating body.
摘要:
A turbofan to reduce noise through a suppression of turbulent air flow at an outlet thereof and also to guide the air discharged from the outlet in a specific discharging direction, and an air conditioner equipped with the turbofan to improve an efficiency of a heat exchange. The turbofan includes a rotating plate coupled to a shaft of a drive motor, a plurality of blades radially arranged on a peripheral area of a front face of the rotating plate, a ring-shaped shroud joining to ends of the plurality of blades, and a flow guide rib extending from a peripheral edge of the rotating plate in a rearward direction to guide the air discharged from the turbofan.
摘要:
The present invention relates to a polymer prepared by synthesizing monomer having a derivative of cholic acid, deoxycholic acid or lithocholic acid bonded to norbornene, and then homopolymerizing these monomer, copolymerizing these monomer with maleic anhydride, or copolymerizing these monomer, maleic anhydride and 2-hydroxyethyl 5-norbornene-2-carboxylate and/or 5-norbornene-2carboxylic acid, and its use as a photoresist. The polymer synthesized according to the present invention is dissolved in a solvent, together with a photo-acid generator, and filtered through a filter to make a photoresist solution which can be used to produce a lithographic image on a silicon wafer.
摘要:
Organometal-containing acrylate or methacrylate derivatives and photoresists comprising the polymers thereof. Unlike conventional matrix polymers of photoresist, the polymers induce a difference in silicon content between exposed regions and unexposed regions of photoresists by releasing their silicon-containing side chains with the aid of acid in a chemical amplification manner. The difference in silicon content causes the exposed regions to be etched at a different rate from that of the unexposed regions under oxygen plasma. Thus, the photoresist material makes it possible to use a microlithographic process comprising a dry development step which can advantageously prevent the deformation or collapse of patterns which is aggravated as their aspect ratio increases, as well as the photoresist is economically more favorable than a top surface imaging system to which silylation on its top surface or a multi-level resist system to which wet development on its top layer must be applied, because the microlithographic process is very simple and no solvent is released.