公开(公告)号：US11978620B2

公开(公告)日：2024-05-07

申请号：US17880455

申请日：2022-08-03

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Leonid Borisovich Zvedenuk ,  Andrey Evgenievich Stepanov ,  Amir Torkaman

IPC: H01J61/28 ,  H01J61/02 ,  H01J61/52 ,  H01J65/04

CPC classification number: H01J65/042 ,  H01J61/025 ,  H01J61/28 ,  H01J61/52

Abstract: A plasma lamp for use in a laser-sustained plasma (LSP) light source is disclosed. The plasma lamp includes a gas containment structure for containing a gas, a gas seal positioned at a base of the gas containment structure, a gas inlet, and a gas outlet. The plasma lamp includes a gas swirler including a set of nozzles configured to generate a vortex gas flow and a swirler shaft including an inlet channel for delivering the gas from the gas inlet to the nozzles and an outlet channel for delivering the gas from the gas containment structure to the gas outlet. The plasma lamp includes a distributor including one or more plenums to distribute the gas from the gas inlet into the swirler. The plasma lamp may also include a deflector fluidically coupled to the swirler shaft and extending above the set of nozzles and configured to direct gas flow around the swirler.

公开(公告)号：US11887835B2

公开(公告)日：2024-01-30

申请号：US17880472

申请日：2022-08-03

Applicant: KLA Corporation

Inventor： Oleg Khodykin ,  Ilya Bezel

IPC: H01J61/30 ,  H01J61/02

CPC classification number: H01J61/302 ,  H01J61/025

Abstract: A plasma lamp is disclosed. The plasma lamp includes a gas containment structure configured to contain a gas and generate a plasma within the gas containment structure. The gas containment structure is formed from a glass material transparent to illumination from a pump laser and the broadband radiation emitted by the plasma. The gas containment structure includes a glass wall and the glass within the glass wall includes an OH concentration distribution that varies across a thickness of the glass wall.

公开(公告)号：US20230335389A1

公开(公告)日：2023-10-19

申请号：US18132162

申请日：2023-04-07

Applicant: KLA Corporation

Inventor： John Szilagyi ,  Ilya Bezel

IPC: H01J65/04 ,  H01J61/02 ,  H01J61/28 ,  H01J61/52 ,  H01J61/16

CPC classification number: H01J65/042 ,  H01J61/025 ,  H01J61/28 ,  H01J61/52 ,  H01J61/16

Abstract: A laser-sustained broadband light source includes a gas containment structure and multiple jet nozzles. The jet nozzles are configured to direct multiple liquid jets of plasma-forming material in directions to collide with one another within the gas containment structure. The laser-sustained broadband light source further includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure at a collision point of the plurality of liquid jets and a light collector element configured to collect broadband light emitted from the plasma.

公开(公告)号：US11690162B2

公开(公告)日：2023-06-27

申请号：US17223942

申请日：2021-04-06

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Andrey Evgenievich Stepanov ,  Leonid Borisovich Zvedenuk ,  Yuriy Gennadievich Kutsenko ,  Boris Vasilyevich Potapkin ,  Sumeet Kumar

IPC: H05H1/46

CPC classification number: H05H1/46

Abstract: A laser-sustained plasma (LSP) light source with vortex gas flow is disclosed. The LSP source includes a gas containment structure for containing a gas, one or more gas inlets configured to flow gas into the gas containment structure, and one or more gas outlets configured to flow gas out of the gas containment structure. The one or more gas inlets and the one or more gas outlets are arranged to generate a vortex gas flow within the gas containment structure. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure within an inner gas flow within the vortex gas flow. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.

公开(公告)号：US20210321508A1

公开(公告)日：2021-10-14

申请号：US17223942

申请日：2021-04-06

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Andrey Evgenievich Stepanov ,  Leonid Borisovich Zvedenuk ,  Yuriy Gennadievich Kutsenko ,  Boris Vasilyevich Potapkin ,  Sumeet Kumar

IPC: H05H1/46

Abstract: A laser-sustained plasma (LSP) light source with vortex gas flow is disclosed. The LSP source includes a gas containment structure for containing a gas, one or more gas inlets configured to flow gas into the gas containment structure, and one or more gas outlets configured to flow gas out of the gas containment structure. The one or more gas inlets and the one or more gas outlets are arranged to generate a vortex gas flow within the gas containment structure. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure within an inner gas flow within the vortex gas flow. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.

公开(公告)号：US20210231292A1

公开(公告)日：2021-07-29

申请号：US17228543

申请日：2021-04-12

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Panzer ,  Matthew Derstine ,  Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Rudolf Brunner

IPC: F21V9/06 ,  H01J61/52 ,  H01J61/12 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/34 ,  H01J61/35 ,  H01J61/40 ,  H01J65/04

Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

公开(公告)号：US20210022233A1

公开(公告)日：2021-01-21

申请号：US17028902

申请日：2020-09-22

Applicant: KLA Corporation

Inventor： Matthew Derstine ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin

IPC: H05G2/00 ,  H05H1/24

Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

公开(公告)号：US20200274314A1

公开(公告)日：2020-08-27

申请号：US16791488

申请日：2020-02-14

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Matthew Derstine ,  William Schumaker ,  Michael Friedmann

IPC: H01S3/0943 ,  F21V9/06

Abstract: A system for pumping laser sustained plasma is disclosed. The system includes a plurality of pump modules configured to generate respective pulses of pump illumination for the laser sustained plasma, wherein at least one pump module is configured to generate a train of pump pulses that is interlaced in time with another train of pump pulses generated by at least one other pump module of the plurality of pump modules. The system further includes a plurality of non-collinear illumination paths configured to direct the respective pulses of pump illumination from the plurality of pump modules into a collection volume of the laser sustained plasma.