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公开(公告)号：US20220066071A1
公开(公告)日：2022-03-03
申请号：US17393968
申请日：2021-08-04
Applicant: KLA CORPORATION
Inventor： Evgeniia Butaeva , Gildardo Delgado , Grace Chen , John Savee , Matthew Derstine , Vera (Guorong) Zhuang , Gary V. Lopez Lopez
Abstract: An optical system includes a bulk material including a fluorine (F)-containing optical material. The bulk material is exposed to an environment at a pressure ranging from atmospheric to vacuum when the bulk material is under extreme ultra-violet (EUV), vacuum ultra-violet (VUV), deep ultra-violet (DUV) and/or UV radiation. The environment includes at least one type of gas or vapor. The at least one type of gas or vapor includes polar molecules.
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2.发明授权公开(公告)号：US11121521B2
公开(公告)日：2021-09-14
申请号：US16791488
申请日：2020-02-14
Applicant: KLA Corporation
Inventor： Ilya Bezel , Matthew Derstine , William Schumaker , Michael Friedmann
Abstract: A system for pumping laser sustained plasma is disclosed. The system includes a plurality of pump modules configured to generate respective pulses of pump illumination for the laser sustained plasma, wherein at least one pump module is configured to generate a train of pump pulses that is interlaced in time with another train of pump pulses generated by at least one other pump module of the plurality of pump modules. The system further includes a plurality of non-collinear illumination paths configured to direct the respective pulses of pump illumination from the plurality of pump modules into a collection volume of the laser sustained plasma.
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公开(公告)号：US20210149315A1
公开(公告)日：2021-05-20
申请号：US17099632
申请日：2020-11-16
Applicant: KLA Corporation
Inventor： Matthew Derstine , John Savee , Evgeniia Butaeva , Serguei Likhanski , Gildardo Delgado
IPC: G03F7/20
Abstract: A system for mitigating damage to optical elements caused by vacuum ultraviolet (VUV) light exposure is disclosed. The system includes a light source configured to generate VUV and a chamber containing one or more gaseous fluorine-based compounds of a selected partial pressure. The system includes one or more optical elements. The one or more optical elements are located within the chamber and are exposed to the one or more gaseous fluorine-based compounds. The VUV light generated by the light source is of sufficient energy to dissociate the fluorine-based compound within the chamber into a primary product.
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公开(公告)号：US11921297B2
公开(公告)日：2024-03-05
申请号：US17682919
申请日：2022-02-28
Applicant: KLA Corporation
Inventor： Ilya Bezel , Matthew Derstine , Andrey Stepanov , Nikolay Sherbak
CPC classification number: G02B27/0927 , G02B5/001 , G02B27/0944 , G02B27/0955 , H01S3/0071 , H05G2/008 , H05H1/02 , H01S3/1611 , H01S3/1643
Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.
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5.发明授权公开(公告)号：US11778720B2
公开(公告)日：2023-10-03
申请号：US17028902
申请日：2020-09-22
Applicant: KLA Corporation
Inventor： Matthew Derstine , Ilya Bezel , Anatoly Shchemelinin , Eugene Shifrin
CPC classification number: H05G2/008 , H01S3/1312 , H05H1/46
Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.
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Patent Agency Ranking
公开(公告)号：US20220187610A1
公开(公告)日：2022-06-16
申请号：US17682919
申请日：2022-02-28
Applicant: KLA Corporation
Inventor： Ilya Bezel , Matthew Derstine , Andrey Stepanov , Nikolay Sherbak
Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.
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公开(公告)号：US11262664B2
公开(公告)日：2022-03-01
申请号：US17099632
申请日：2020-11-16
Applicant: KLA Corporation
Inventor： Matthew Derstine , John Savee , Evgeniia Butaeva , Serguei Likhanski , Gildardo Delgado
Abstract: A system for mitigating damage to optical elements caused by vacuum ultraviolet (VUV) light exposure is disclosed. The system includes a light source configured to generate VUV and a chamber containing one or more gaseous fluorine-based compounds of a selected partial pressure. The system includes one or more optical elements. The one or more optical elements are located within the chamber and are exposed to the one or more gaseous fluorine-based compounds. The VUV light generated by the light source is of sufficient energy to dissociate the fluorine-based compound within the chamber into a primary product.
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公开(公告)号：US20210231292A1
公开(公告)日：2021-07-29
申请号：US17228543
申请日：2021-04-12
Applicant: KLA Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Eugene Shifrin , Matthew Panzer , Matthew Derstine , Jincheng Wang , Anant Chimmalgi , Rajeev Patil , Rudolf Brunner
IPC: F21V9/06 , H01J61/52 , H01J61/12 , H01J61/14 , H01J61/16 , H01J61/20 , H01J61/34 , H01J61/35 , H01J61/40 , H01J65/04
Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.
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公开(公告)号：US20210022233A1
公开(公告)日：2021-01-21
申请号：US17028902
申请日：2020-09-22
Applicant: KLA Corporation
Inventor： Matthew Derstine , Ilya Bezel , Anatoly Shchemelinin , Eugene Shifrin
Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.
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10.发明申请公开(公告)号：US20200274314A1
公开(公告)日：2020-08-27
申请号：US16791488
申请日：2020-02-14
Applicant: KLA Corporation
Inventor： Ilya Bezel , Matthew Derstine , William Schumaker , Michael Friedmann
IPC: H01S3/0943 , F21V9/06
Abstract: A system for pumping laser sustained plasma is disclosed. The system includes a plurality of pump modules configured to generate respective pulses of pump illumination for the laser sustained plasma, wherein at least one pump module is configured to generate a train of pump pulses that is interlaced in time with another train of pump pulses generated by at least one other pump module of the plurality of pump modules. The system further includes a plurality of non-collinear illumination paths configured to direct the respective pulses of pump illumination from the plurality of pump modules into a collection volume of the laser sustained plasma.
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