公开(公告)号：US20170200265A1

公开(公告)日：2017-07-13

申请号：US15402094

申请日：2017-01-09

Applicant: KLA-Tencor Corporation

Inventor： Kris Bhaskar ,  Jing Zhang ,  Grace Hsiu-Ling Chen ,  Ashok Kulkarni ,  Laurent Karsenti

IPC: G06T7/00

CPC classification number: G06T7/0006 ,  G03F1/84 ,  G03F1/86 ,  G03F7/7065 ,  G06T7/0004 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/20081 ,  G06T2207/30148

Abstract: Methods and systems for generating simulated output for a specimen are provided. One method includes acquiring information for a specimen with one or more computer systems. The information includes at least one of an actual optical image of the specimen, an actual electron beam image of the specimen, and design data for the specimen. The method also includes inputting the information for the specimen into a learning based model. The learning based model is included in one or more components executed by the one or more computer systems. The learning based model is configured for mapping a triangular relationship between optical images, electron beam images, and design data, and the learning based model applies the triangular relationship to the input to thereby generate simulated images for the specimen.

公开(公告)号：US20170193680A1

公开(公告)日：2017-07-06

申请号：US15396800

申请日：2017-01-02

Applicant: KLA-Tencor Corporation

Inventor： Jing Zhang ,  Grace Hsiu-Ling Chen ,  Kris Bhaskar ,  Keith Wells ,  Nan Bai ,  Ping Gu ,  Lisheng Gao

IPC: G06T11/60 ,  H01L21/67 ,  G01N21/95 ,  G06K9/62 ,  G06T7/00

CPC classification number: G01N21/9501 ,  G01N2201/12 ,  G06K9/4628 ,  G06K9/6273 ,  G06K9/6857 ,  G06K2209/19 ,  G06T3/4053

Abstract: Methods and systems for generating a high resolution image for a specimen from one or more low resolution images of the specimen are provided. One system includes one or more computer subsystems configured for acquiring one or more low resolution images of a specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a model that includes one or more first layers configured for generating a representation of the one or more low resolution images. The model also includes one or more second layers configured for generating a high resolution image of the specimen from the representation of the one or more low resolution images.