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161 条记录 (耗时 0.041 秒)

    Substrate treatment apparatus
    21.
    发明授权
    Substrate treatment apparatus 失效
    基板处理装置

    公开(公告)号：US06955178B1

    公开(公告)日：2005-10-18

    申请号：US10626517

    申请日：2003-07-25

    申请人： Masaki Kuzumoto ,  Seiji Noda ,  Izumi Oya ,  Makoto Miyamoto ,  Hideo Horibe ,  Tatsuo Kataoka ,  Tetsuji Oishi

    发明人： Masaki Kuzumoto ,  Seiji Noda ,  Izumi Oya ,  Makoto Miyamoto ,  Hideo Horibe ,  Tatsuo Kataoka ,  Tetsuji Oishi

    IPC分类号： B08B7/00 ,  C23G5/00 ,  G03F7/42 ,  H01L21/00 ,  H01L21/027 ,  H01L21/302 ,  H01L21/3065 ,  B08B5/00 ,  H01L21/461

    CPC分类号： H01L21/6708 ,  B08B7/00 ,  G03F7/422 ,  Y10S134/902

    摘要： A substrate treatment apparatus includes a substrate heating device for maintaining a substrate at a temperature higher than room temperature, a wetting device for producing a wet ozone-containing gas by wetting an ozone-containing gas with a treatment solution, and a supply device for supplying the wet ozone-containing gas from the wetting device to a work object on a surface of the substrate. The supply device includes a gas disperser including apertures aligned in rows in a width direction of the work object. The apertures in adjacent rows are not aligned with each other in a direction perpendicular to the rows. At least one of the gas disperser and the substrate is movable in a direction perpendicular to the rows. A gas conduit connects the wetting device to the supply device. A wet ozone-containing gas heating device heats the wet ozone-containing gas to a temperature at least equal to the temperature of the substrate.

    摘要翻译： 一种基板处理装置，具备：将基板保持在比室温以上的温度下的基板加热装置，通过用处理液润湿含臭氧的气体来生产含湿臭氧的气体的润湿装置，以及供给装置 来自润湿装置的湿臭氧的气体到基板表面上的工件。 供给装置包括气体分散器，其包括在工作对象的宽度方向上成行排列的孔。 相邻行中的孔在垂直于行的方向上彼此不对齐。 气体分散器和基板中的至少一个可以在垂直于行的方向上移动。 气体管道将润湿装置连接到供应装置。 含湿臭氧的气体加热装置将含湿臭氧的气体加热至至少等于基板温度的温度。

    Disk drive
    26.
    发明授权
    Disk drive 失效
    磁盘驱动器

    公开(公告)号：US06865061B2

    公开(公告)日：2005-03-08

    申请号：US10348573

    申请日：2003-01-21

    申请人： Makoto Miyamoto ,  Hideki Kuwajima ,  Kenichi Sakamoto

    发明人： Makoto Miyamoto ,  Hideki Kuwajima ,  Kenichi Sakamoto

    IPC分类号： G11B21/21 ,  G11B5/55 ,  G11B11/105 ,  G11B21/02 ,  G11B21/22

    CPC分类号： G11B5/5569

    摘要： A disk drive is rotatably disposed in a direction vertical to the recording surface of a recording medium. The disk drive comprises a support arm having a head at one side thereof, and a first member which abuts the other end of the support arm, generating a frictional force between the member and the support arm, when the support arm is moved in a direction along the recording surface of the recording medium.

    摘要翻译： 磁盘驱动器可旋转地设置在与记录介质的记录表面垂直的方向上。 磁盘驱动器包括一个支撑臂，该支撑臂在其一侧具有头部，以及第一构件，该第一构件抵靠支撑臂的另一端，当该支撑臂沿该方向移动时，在该构件和该支撑臂之间产生摩擦力 沿着记录介质的记录表面。

    Inertial latching mechanism and information recorder using the mechanism
    27.
    发明申请
    Inertial latching mechanism and information recorder using the mechanism 审中-公开
    惯性闭锁机构和信息记录仪采用机构

    公开(公告)号：US20050013054A1

    公开(公告)日：2005-01-20

    申请号：US10883674

    申请日：2004-07-06

    申请人： Makoto Miyamoto ,  Hideki Kumajima

    发明人： Makoto Miyamoto ,  Hideki Kumajima

    IPC分类号： G11B5/54 ,  G11B21/12 ,  G11B21/22

    CPC分类号： G11B21/22 ,  G11B5/54

    摘要： An inertial latching mechanism of high reliability, which can be incorporated in a slim profile disk drive or the like information recorders. Describing practically, the mechanism includes freely revolvable inertia arm 6 which couples with actuator 3when head arm is in a shunt position or the vicinity, whereas the coupling is released when the actuator is in proximity with disk 1 or the neighborhood; a drive means for holding inertia arm 6 to a right posture by taking advantage of magnetic pulling force at the place where the inertia arm is released from the coupling with actuator 3. Furthermore, coil arm 9's restriction section 9b and inertia arm 6's contact section 6b are disposed opposed to each other for forming a revolution restriction means which restricts an anti-clockwise revolution of inertia arm 6, as viewed from the above, when coil arm 9's coupling section 9a and inertia arm 6's coupling section 6a are in uncoupled state. The above-configured inertial latching mechanism can be used in a magnetic disk drive, an optical disk drive, a magneto-optical disk drive and other disk information recorders.

    摘要翻译： 一种高可靠性的惯性锁定机构，其可以结合在细长型盘驱动器等信息记录器中。 实际上，该机构包括可自由旋转的惯性臂6，当头臂处于分流位置或附近时，其与致动器3耦合，而当致动器靠近盘1或附近时，联接器被释放; 通过利用从致动器3的联轴器释放惯性臂的位置处的磁力拉力，将惯性臂6保持在正确的姿势的驱动装置。此外，线圈臂9的限制部分9b和惯性臂6的接触部分6b 当线圈臂9的联接部分9a和惯性臂6的联接部分6a处于非耦合状态时，形成一个限制惯性臂6的逆时针旋转的旋转限制装置，如上所述。 上述配置的惯性闭锁机构可用于磁盘驱动器，光盘驱动器，磁光盘驱动器和其他盘信息记录器中。

    Optical recording medium having a plurality of interference layers of different refractive index
    28.
    发明授权
    Optical recording medium having a plurality of interference layers of different refractive index 失效
    具有多个不同折射率的干涉层的光记录介质

    公开(公告)号：US06775226B1

    公开(公告)日：2004-08-10

    申请号：US09941758

    申请日：2001-08-30

    申请人： Makoto Miyamoto ,  Junko Ushiyama ,  Keikichi Andoo

    发明人： Makoto Miyamoto ,  Junko Ushiyama ,  Keikichi Andoo

    IPC分类号： G11B724

    CPC分类号： G11B7/266 ,  G11B7/2403 ,  G11B7/24067 ,  G11B7/243 ,  G11B7/2433 ,  G11B7/252 ,  G11B7/2534 ,  G11B7/256 ,  G11B7/257 ,  G11B11/10584 ,  G11B2007/24304 ,  G11B2007/24312 ,  G11B2007/24314 ,  G11B2007/24316 ,  G11B2007/25706 ,  G11B2007/25708 ,  G11B2007/2571 ,  G11B2007/25713 ,  G11B2007/25715

    摘要： An information recording medium, which comprises three thin films of different compositions, comprising first and second interference layers and a first interface layer, stacked in this order from the laser beam incident side of a recording layer, the refractive index of the second interference layer being lower than that of any one of the first interference layer and the recording layer, the first interface layer being provided in contact with the recording layer and between the second interference layer and the recording layer, the second interference layer containing oxygen, and an oxygen barrier layer having a smaller oxygen content than that of the second interference layer being provided in contact with the second interference layer and between the second and first interface layers, can control diffusion of oxygen from the second interference layer into the recording layer and prevents deterioration of overwriting at the time of many runs of overwriting and lowering of storage life.

    摘要翻译： 一种信息记录介质，包括三种不同组成的薄膜，包括从记录层的激光束入射侧依次堆叠的第一和第二干涉层和第一界面层，第二干涉层的折射率为 低于第一干涉层和记录层中的任一个的第一界面层，第一界面层设置成与记录层接触，并且在第二干涉层和记录层之间，第二干涉层含有氧和氧阻隔层 具有比与第二干涉层接触的第二干涉层的氧含量小的层与第二界面层和第一界面层之间的氧含量可以控制氧从第二干涉层向记录层的扩散，并防止覆盖的变坏 在许多运行中覆盖和降低存储空间的时候 fe。

    Apparatus for removing photoresist film
    30.
    发明授权
    Apparatus for removing photoresist film 失效
    去除光刻胶膜的设备

    公开(公告)号：US06715944B2

    公开(公告)日：2004-04-06

    申请号：US10134481

    申请日：2002-04-30

    申请人： Izumi Oya ,  Seiji Noda ,  Makoto Miyamoto ,  Masaki Kuzumoto ,  Masashi Ohmori ,  Tatsuo Kataoka

    发明人： Izumi Oya ,  Seiji Noda ,  Makoto Miyamoto ,  Masaki Kuzumoto ,  Masashi Ohmori ,  Tatsuo Kataoka

    IPC分类号： G03D302

    CPC分类号： H01L21/67075 ,  G03F7/42 ,  G03F7/422 ,  G03F7/423 ,  G03F7/428 ,  Y10S134/902

    摘要： An apparatus for removing a photoresist film includes a substrate cassette for fixing a substrate having a surface covered with a photoresist film, an ozone feed tube for supplying ozone, a liquid feed tube for supplying a liquid photoresist film removing solution, and a processing tank for recovering and processing at least one of ozone and the liquid photoresist film removing solution, wherein the liquid photoresist film removing solution is supplied through the liquid feed tube as a liquid or mist, at least one of ozone and the photoresist film removing solution being continuously supplied.

    摘要翻译： 一种用于去除光致抗蚀剂膜的设备包括用于固定具有被光致抗蚀剂膜覆盖的表面的基板的基板盒，用于供应臭氧的臭氧供给管，用于供给液态光致抗蚀剂膜去除溶液的液体供给管，以及用于 回收和处理臭氧和液体光致抗蚀剂去除溶液中的至少一种，其中液态光致抗蚀剂去除溶液作为液体或雾通过液体供给管提供，臭氧和光致抗蚀剂去膜溶液中的至少一种被连续供应 。