公开(公告)号：US20080110270A1

公开(公告)日：2008-05-15

申请号：US12015390

申请日：2008-01-16

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L9/12

CPC分类号： B60C23/0408 ,  G01L9/0047 ,  G01L9/0073 ,  G01L9/125 ,  G01L15/00 ,  G01L19/0636

摘要： The invention provides for a capacitance sensing circuit for a pressure sensor. The pressure sensor includes a sensor membrane and a compensation membrane. The circuit includes a controller arranged in signal communication with a charge amplifier, a charge injector and two switches. The charge amplifier is connected to the switches via a sensor capacitor in parallel with a reference capacitor in parallel with a parasitic capacitance to ground. The charge injector and charge amplifier are arranged in parallel connection between the capacitors and the controller. The controller operates the circuit to determine a charge imbalance indicative of a pressure difference between the sensor and compensation membranes.

摘要翻译： 本发明提供一种用于压力传感器的电容感测电路。 压力传感器包括传感器膜和补偿膜。 电路包括与电荷放大器，电荷注入器和两个开关信号通信的控制器。 电荷放大器通过与参考电容并联的传感器电容器连接到开关，并与寄生电容接地。 电荷注入器和电荷放大器并联在电容器和控制器之间。 控制器操作电路以确定指示传感器和补偿膜之间的压力差的电荷不平衡。

公开(公告)号：US20070206059A1

公开(公告)日：2007-09-06

申请号：US11741766

申请日：2007-04-29

申请人： Nagesh Ramachandra ,  Brian Brown ,  Norman Berry ,  Garry Jackson ,  Paul Sharp ,  John Morgan ,  Kia Silverbrook ,  Akira Nakazawa ,  Michael Hudson ,  Christopher Hibbard ,  Samuel Mallinson ,  Paul Reichl

发明人： Nagesh Ramachandra ,  Brian Brown ,  Norman Berry ,  Garry Jackson ,  Paul Sharp ,  John Morgan ,  Kia Silverbrook ,  Akira Nakazawa ,  Michael Hudson ,  Christopher Hibbard ,  Samuel Mallinson ,  Paul Reichl

IPC分类号： B41J2/04

CPC分类号： B41J2/14008 ,  B41J2/14 ,  B41J2/155 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1707 ,  B41J2/175 ,  B41J2/17596 ,  B41J2002/14419 ,  B41J2002/14491 ,  B41J2202/19 ,  B41J2202/20 ,  Y10T29/49002 ,  Y10T29/49401

摘要： A method of fabricating a film for attachment of one or more printhead integrated circuits to an ink supply manifold is provided. The method comprises the steps of: (a) providing an adhesive polymeric film having a protective liner; (b) depositing photoresist onto the protective liner; (c) photopatterning the photoresist to define a plurality of openings positioned for etching supply holes through the film; (d) etching the plurality of ink supply holes through the film, the photoresist acting as a mask for the etch; and (e) removing the protective liner having the photoresist deposited thereon.

摘要翻译： 提供了一种制造用于将一个或多个打印头集成电路附接到墨水供应歧管的膜的方法。 该方法包括以下步骤：（a）提供具有保护性衬垫的粘合剂聚合物膜; （b）在保护衬垫上沉积光致抗蚀剂; （c）对光致抗蚀剂进行光图案化以限定多个开口，用于蚀刻通过该膜的供应孔; （d）通过膜蚀刻多个供墨孔，光致抗蚀剂用作蚀刻掩模; 和（e）去除其上沉积有光致抗蚀剂的保护衬垫。

公开(公告)号：US20070157465A1

公开(公告)日：2007-07-12

申请号：US11707056

申请日：2007-02-16

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： H05K3/02 ,  H01B13/00 ,  E01C23/00

CPC分类号： H01L29/66007 ,  B60C23/0408 ,  G01L9/0072 ,  G01L9/0075 ,  G01L19/0636 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A method of fabricating a pressure sensor (30) for harsh environments such as vehicle tires, formed from a wafer substrate (32) with a recess, a flexible membrane (50) covering the recess to define a chamber (58) containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry (34) converts the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. An apertured guard (54) over the membrane formed using lithographically masked etching and deposition techniques protects the delicate MEMS structures. Forming the guard in situ by depositing material offers greater time efficiency and accuracy than producing a guard separately and securing it over the membrane. Semiconductor etching and deposition techniques allow highly intricate surface details. The apertures in the guard can be made smaller to exclude more particles from contacting the membrane. The fine tolerances of lithographic deposition permit the guard to be positioned close to the membrane for a more compact overall design.

摘要翻译： 一种用于由具有凹槽的晶片衬底（32）形成的用于诸如车辆轮胎的恶劣环境的压力传感器（30）的方法，覆盖所述凹部的柔性膜（50）以限定包含流体的腔室（58） 参考压力。 在使用中，柔性膜（50）由于参考压力和流体压力之间的压力差而偏转。 相关联的电路（34）将柔性膜（50）的偏转转换成指示流体压力的输出信号。 在使用光刻掩模的蚀刻和沉积技术形成的膜上的多孔保护件（54）保护精密的MEMS结构。 通过沉积材料原位形成防护罩比分别制造防护罩并将其固定在膜上提供更高的时间效率和准确性。 半导体蚀刻和沉积技术允许高度复杂的表面细节。 防护件中的孔可以制得较小，以排除更多的颗粒与膜接触。 光刻沉积的良好公差允许防护件靠近膜定位，以实现更紧凑的整体设计。

公开(公告)号：US20070062295A1

公开(公告)日：2007-03-22

申请号：US11601802

申请日：2006-11-20

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L7/10

CPC分类号： G01L9/0075 ,  G01L9/0042

摘要： A pressure sensor for sensing a fluid pressure in harsh environments such as the air pressure in a tire formed on a wafer substrate. Associated circuitry deposited in CMOS layers on the wafer substrate has a conductive layer at least partially overlying the associated circuitry, the conductive layer forming a first electrode of the capacitative sensor. A conductive membrane at least partially overlies the conductive layer, and is spaced from it to form a second electrode of the capacitative sensor. The conductive membrane has one side exposed to the fluid pressure and the conductive layer is sealed from the fluid pressure by the conductive membrane such that, the associated circuitry converts the deflection of the conductive membrane into an output signal indicative of the fluid pressure. The conductive membrane is at least partially formed from a ceramic material to provide corrosion and wear resistance. Metal ceramics can be deposited as a thin membrane with sufficient flexibility for sensing pressure and are generally well suited to semiconductor fabrication processes and electrically conductive so they can be used in capacitative type pressure sensors.

公开(公告)号：US20070039392A1

公开(公告)日：2007-02-22

申请号：US11543047

申请日：2006-10-05

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L9/12

CPC分类号： B81B7/0029 ,  B60C23/0408 ,  B81B2201/0264 ,  G01L9/0047 ,  G01L9/0073 ,  G01L9/125 ,  G01L15/00 ,  G01L19/0636

摘要： A capacitative pressure sensor (30) for harsh environments such as vehicle tires. The sensor has two opposing electrodes (36 and 50). One electrode is a membrane (50) that extends between fluid at a reference pressure and fluid at the pressure to be sensed. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry converts the deflection into a signal indicative of the pressure to be sensed. The membrane is a laminate at least partially formed from a transition metal nitride because transition metal nitrides are a metal ceramics with high yield strength and metallic bonding that makes it suitable for use in extreme environments. They can also readily include an oxidizing component such as aluminium so that the membrane form a passivating surface oxide layer to protect it from oxidative failure.

摘要翻译： 用于诸如车辆轮胎的恶劣环境的电容式压力传感器（30）。 传感器具有两个相对的电极（36和50）。 一个电极是在参考压力的流体和在要感测的压力下的流体之间延伸的膜（50）。 在使用中，柔性膜（50）由于参考压力和流体压力之间的压力差而偏转。 相关电路将偏转转换成指示要感测的压力的信号。 膜是由过渡金属氮化物至少部分形成的层压体，因为过渡金属氮化物是具有高屈服强度的金属陶瓷，并且金属粘合使其适用于极端环境。 它们还可以容易地包括氧化组分如铝，使得膜形成钝化表面氧化物层以保护其免于氧化失效。

公开(公告)号：US20060081055A1

公开(公告)日：2006-04-20

申请号：US10965902

申请日：2004-10-18

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L7/10

CPC分类号： B60C23/0408 ,  G01L9/0047 ,  G01L9/0073 ,  G01L9/125 ,  G01L15/00 ,  G01L19/0636

摘要： A pressure sensor that compensates for variations in temperature by having first (53) and second (51) chambers with first and second respective flexible membranes. The first and second flexible membranes deflect in response to pressure differences within the first and second chambers respectively. The first membrane is exposed to the fluid pressure (66) to be measured, such as the air pressure in a tire. The second membrane sealed from the fluid pressure, and, associated circuitry converts the deflection of the first flexible membrane into an output signal related to the fluid pressure, and converts the deflection of the second membrane into an adjustment of the output signal to compensate for the temperature of the sensor. By sealing the second chamber from the tire pressure, the deflection of the second membrane can be determined as a function of temperature. This can be used to calibrate the output signal from the first chamber to remove the effects of temperature variation.

摘要翻译： 一种压力传感器，其通过具有第一和第二相应柔性膜的第一（53）和第二（51）腔来补偿温度变化。 第一和第二柔性膜分别响应于第一和第二腔室内的压力差而偏转。 第一膜暴露于要测量的流体压力（66），例如轮胎中的空气压力。 从流体压力密封的第二膜，并且相关联的电路将第一柔性膜的偏转转换成与流体压力相关的输出信号，并将第二膜的偏转转换成输出信号的调整，以补偿 传感器的温度。 通过将第二腔室与轮胎压力密封，可以将第二膜片的挠曲确定为温度的函数。 这可以用于校准来自第一室的输出信号，以消除温度变化的影响。

公开(公告)号：US20060081054A1

公开(公告)日：2006-04-20

申请号：US10965901

申请日：2004-10-18

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L7/10

CPC分类号： B60C23/0408 ,  G01L9/0073 ,  G01L9/0075

摘要： A pressure sensor (30) for harsh environments such as vehicle tires, the sensor having a chamber (58) partially defined by a flexible membrane (50), the chamber containing a fluid at a reference pressure. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure, so that, associated circuitry (34) can convert the deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure. The sensor is a MEMS device whereby the recess, the flexible membrane and the associated circuitry are formed using lithographically masked etching and deposition techniques. MEMS fabrication techniques can produce the sensor in such high volumes that the unit cost of each sensor is very low. The MEMS sensor is so small that it can be installed in very restricted areas such as the stem of the tire valve.

摘要翻译： 一种用于诸如车辆轮胎的恶劣环境的压力传感器（30），所述传感器具有由柔性膜（50）部分限定的室（58），所述室包含参考压力下的流体。 在使用中，柔性膜（50）由于参考压力和流体压力之间的压差而偏转，使得相关联的电路（34）可以将柔性膜（50）的偏转转换成指示流体的输出信号 压力。 该传感器是MEMS器件，借此使用光刻掩模的蚀刻和沉积技术形成凹槽，柔性膜和相关电路。 MEMS制造技术可以以如此高的体积产生传感器，使得每个传感器的单位成本非常低。 MEMS传感器非常小，可以安装在非常有限的区域，如轮胎阀杆。

公开(公告)号：US20060081052A1

公开(公告)日：2006-04-20

申请号：US10965718

申请日：2004-10-18

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L9/12

CPC分类号： G01L9/0073

摘要： A pressure sensor (30) for sensing fluid pressure in harsh environments such as the air pressure in a tire by providing a chamber (58) partially defined by a flexible membrane (50). The flexible membrane (50) is at least partially formed from conductive material, and the chamber (58) contains a fluid at a reference pressure. The flexible membrane (50) deflects from any pressure difference between the reference pressure and the fluid pressure. A conductive layer (36) within the chamber spaced from the flexible membrane (50) and, associated circuitry (34) incorporating the flexible membrane (50) and the conductive layer (36). The conductive layer (36) and the flexible membrane (50) form capacitor electrodes and the deflection of the flexible membrane (50) changes the capacitance which the associated circuitry (34) converts into an output signal indicative of the fluid pressure. The conductive layer (36) is arranged so that fluid can be displaced from between the plates of the capacitor by the deflection of the flexible membrane (50). Venting the fluid between the electrodes to the other side of the fixed electrode, while keeping the chamber sealed, avoids the extreme fluid pressure that cause the squeeze film damping.

公开(公告)号：US20080011088A1

公开(公告)日：2008-01-17

申请号：US11779846

申请日：2007-07-18

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L9/12

CPC分类号： G01L9/0075 ,  G01L9/0042

摘要： A pressure sensor for sensing a fluid pressure in harsh environments such as the air pressure in a tire formed on a wafer substrate. Associated circuitry deposited in CMOS layers on the wafer substrate has a conductive layer at least partially overlying the associated circuitry, the conductive layer forming a first electrode of the capacitative sensor. A conductive membrane at least partially overlies the conductive layer, and is spaced from it to form a second electrode of the capacitative sensor. The conductive membrane separates fluid at a reference pressure and fluid at the pressure to be sensed such that the associated circuitry is configured to convert the deflection of the conductive membrane into an output signal indicative of the fluid pressure. The conductive membrane is at least partially formed from a ceramic material to provide corrosion and wear resistance. Metal ceramics can be deposited as a thin membrane with sufficient flexibility for sensing pressure and are generally well suited to semiconductor fabrication processes and electrically conductive so they can be used in capacitative type pressure sensors.

摘要翻译： 一种压力传感器，用于感测恶劣环境中的流体压力，例如形成在晶片衬底上的轮胎中的空气压力。 沉积在晶片衬底上的CMOS层中的相关电路具有至少部分地覆盖相关电路的导电层，导电层形成电容传感器的第一电极。 导电膜至少部分地覆盖在导电层上，并且与导电膜间隔开以形成电容传感器的第二电极。 导电膜以参考压力分离流体和以待感测压力的流体，使得相关联的电路被配置为将导电膜的偏转转换成指示流体压力的输出信号。 导电膜至少部分地由陶瓷材料形成，以提供耐腐蚀性和耐磨性。 金属陶瓷可以作为薄膜沉积，具有足够的灵敏性用于感测压力，并且通常非常适合于半导体制造工艺和导电，因此它们可以用于电容型压力传感器。

公开(公告)号：US20070283763A1

公开(公告)日：2007-12-13

申请号：US11744211

申请日：2007-05-03

申请人： Kia Silverbrook ,  Samuel Mallinson

发明人： Kia Silverbrook ,  Samuel Mallinson

IPC分类号： G01L9/12

CPC分类号： G01L9/0073

摘要： A capacitive pressure sensor includes a substrate assembly. The substrate assembly includes a conductive layer and defines a plurality of channels terminating in closed ends. A conductive membrane is mounted to the substrate assembly so that a sealed reference chamber including the channels is defined by the conductive membrane and the substrate assembly. A cap is mounted relative to the substrate assembly and defines one or more apertures so that an antechamber is defined by the cap and the conductive membrane. Differential pressure between the reference chamber and antechamber can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive membrane and conductive layer.

摘要翻译： 电容式压力传感器包括基板组件。 衬底组件包括导电层并限定终止于闭合端的多个通道。 导电膜安装到基板组件，使得包括通道的密封参考室由导电膜和基板组件限定。 帽相对于基底组件安装并且限定一个或多个孔，使得前室由帽和导电膜限定。 参考室和前厅之间的差压可导致导电膜的偏转，导电膜又导致导电膜和导电层之间的电容变化。