公开(公告)号：US20150192463A1

公开(公告)日：2015-07-09

申请号：US14225698

申请日：2014-03-26

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Young Min JHON ,  Yong Soo KIM ,  Min Ah SEO ,  Jae Hun KIM ,  Min Chul PARK ,  Sun Ho KIM ,  Deok Ha WOO ,  Seok LEE ,  Taik Jin LEE ,  Myung Suk CHUN ,  Woon Jo CHO

IPC: G01J3/02

CPC classification number: G01J3/0297 ,  G01J3/28 ,  G03F7/70516 ,  G03F7/70575 ,  G03F7/70616

Abstract: Provided are an apparatus and method for calibrating an extreme ultraviolet (EUV) spectrometer in which a wavelength of a spectrum of EUV light used for EUV lithography and mask inspection technology can be measured accurately.

Abstract translation: 提供了一种用于校准极紫外（EUV）光谱仪的装置和方法，其中可以精确地测量用于EUV光刻和掩模检查技术的EUV光的光谱的波长。

公开(公告)号：US20150131134A1

公开(公告)日：2015-05-14

申请号：US14185419

申请日：2014-02-20

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Chulki KIM ,  Jae Hun KIM ,  Byeong Ho PARK ,  Seok LEE ,  Seong Chan JUN ,  Taikjin LEE

IPC: G02F3/00

CPC classification number: G02F3/00 ,  B82Y10/00 ,  B82Y20/00 ,  G02B27/286 ,  G02F2202/36 ,  G02F2203/07 ,  Y10S977/941

Abstract: An optical logic gate includes: a DNA based nanostructure including DNA and metal nanoparticles coupled to the DNA, the DNA based nanostructure being configured to rotate a polarization plane of an incident light; a polarizer to which light passing through the DNA based nanostructure is incident, the polarizer being configured to extract a component in a direction of a predetermined reference axis from light whose polarization plane is rotated by the DNA based nanostructure; and a detection unit to which light passing through the polarizer is incident, the detection unit being configured to generate a logic signal based on a result obtained by comparing the intensity of the component in the reference axis direction extracted by the polarizer with a predetermined threshold value.

Abstract translation: 光学逻辑门包括：DNA基纳米结构，包括与DNA连接的DNA和金属纳米颗粒，所述基于DNA的纳米结构被配置为旋转入射光的偏振面; 入射穿过基于DNA的纳米结构的光的偏振器，所述偏振器被配置为从偏振面被基于DNA的纳米结构旋转的光沿预定参考轴的方向提取成分; 以及检测单元，通过所述偏振器的光入射到所述检测单元，所述检测单元被配置为基于通过将由所述偏振器提取的参考轴方向上的分量的强度与预定阈值进行比较而获得的结果来生成逻辑信号 。

公开(公告)号：US20150049775A1

公开(公告)日：2015-02-19

申请号：US14448227

申请日：2014-07-31

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Young Min JHON ,  Joon Mo AHN ,  Jae Hun KIM ,  Seok LEE ,  Min Chul PARK ,  Deok Ha WOO ,  Young Tae BYUN ,  Taik Jin LEE ,  Sun Ho KIM

IPC: H01S3/117

CPC classification number: H01S3/117 ,  H01S3/08027 ,  H01S3/1062 ,  H01S3/1068 ,  H01S3/11 ,  H01S3/1103 ,  H01S3/1106 ,  H01S3/1109 ,  H01S3/1112 ,  H01S3/1623

Abstract: Provided is a pulse laser apparatus for generating laser light. The apparatus includes a first mirror and a second mirror which are disposed at both ends of a resonator and configured to reflect the laser light, a gain medium disposed between the first and second mirrors and configured to amplify and output light incident from an outside, an etalon configured to adjust a pulse width of the laser light, and an acousto-optic modulator disposed between the first and second mirrors and configured to form a mode-locked and Q-switched signal from the laser light, in which some of the laser light is output through either the first or second mirror to outside the resonator.

Abstract translation: 提供了一种用于产生激光的脉冲激光装置。 该装置包括：第一反射镜和第二反射镜，其设置在谐振器的两端并被配置为反射激光;增益介质，设置在第一和第二反射镜之间并且被配置为放大并输出从外部入射的光， 标准准则被配置为调整激光的脉冲宽度，以及声光调制器，其布置在第一和第二反射镜之间并被配置为从激光形成锁模和Q开关信号，其中一些激光 通过第一或第二反射镜输出到谐振器外部。