公开(公告)号：US20210201585A1

公开(公告)日：2021-07-01

申请号：US17105883

申请日：2020-11-27

申请人： KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

发明人： Min Chul PARK ,  Ji Hoon KANG ,  Jun Yong CHOI ,  Kyul KO ,  Dae Hwan AHN ,  Dae Yeon KIM ,  Hyun Woo KO

IPC分类号： G06T19/00 ,  G06F3/01 ,  G06T1/20 ,  G06T15/20 ,  G06K9/00 ,  G01P13/00

摘要： A user wears a virtual reality mask (VR mask) (100) and then watches a virtual reality image. The VR mask (100) blocks light incident from the outside. When the user wears the VR mask (100), the user cannot discover an obstacle (500) positioned outside the VR mask (100). The user may collide with the obstacle (500) and may be injured by the obstacle (500). Accordingly, in order to prevent injury to the user who uses the VR mask (100), it is necessary to make the user recognize the obstacle (500) positioned outside the VR mask (100). In order to recognize an obstacle, a virtual reality image and the obstacle may be displayed together, or the amount of light incident from the outside may be adjusted.

公开(公告)号：US20160192467A1

公开(公告)日：2016-06-30

申请号：US14979729

申请日：2015-12-28

申请人： KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

发明人： Young Min JHON ,  Yong Soo KIM ,  Joon Mo AHN ,  Min Ah SEO ,  Jae Hun KIM ,  Min Chul PARK ,  Young Tae BYUN ,  Chul Ki KIM ,  Seok LEE ,  Deok Ha Woo

IPC分类号： H05G2/00

CPC分类号： H05G2/003 ,  H05G2/008

摘要： Provided is an extreme ultra-violet (EUV) beam generation apparatus using multi-gas cell modules in which a gas is prevented from directly flowing into a vacuum chamber by adding an auxiliary gas cell serving as a buffer chamber to a main gas cell, a diffusion rate of the gas is decreased, a high vacuum state is maintained, and a higher power EUV beam is continuously generated.

摘要翻译： 提供了一种使用多气体单元模块的极紫外（EUV）光束产生装置，其中通过将用作缓冲室的辅助气室添加到主气体池中，防止气体直接流入真空室， 气体的扩散速率降低，维持高真空状态，连续生成高功率EUV光束。

公开(公告)号：US20160352068A1

公开(公告)日：2016-12-01

申请号：US15165568

申请日：2016-05-26

申请人： Korea Institute of Science and Technology

发明人： Young Min JHON ,  Joon Mo AHN ,  Seok LEE ,  Jae Hun KIM ,  Min Ah SEO ,  Chul Ki KIM ,  Taik Jin LEE ,  Deok Ha WOO ,  Min Chul PARK

IPC分类号： H01S3/11 ,  H01S3/107 ,  H01S3/00 ,  H01S3/115 ,  H01S3/13

CPC分类号： H01S3/1109 ,  H01S3/115 ,  H01S3/127 ,  H01S3/1305

摘要： Provided is a single pulse laser apparatus. The apparatus including a resonator having a first mirror, a second mirror, a gain medium, and electro-optic modulators (EOMs) which perform each mode-locking and Q-switching, the apparatus includes a photodiode which measures laser light that oscillates from the resonator, a synchronizer which converts an electrical signal generated by measuring the laser light into a transistor-transistor logic (TTL) signal, a delay unit which sets a latency determined in order to synchronize a mode-locked pulse with a Q-switched pulse to the TTL signal, and outputs a trigger TTL signal according to the latency, and a Q-driver which inputs the trigger TTL signal to the EOM which performs Q-switching, and causes the EOM to operates.

摘要翻译： 提供单脉冲激光装置。 该装置包括具有执行每个模式锁定和Q开关的第一反射镜，第二镜，增益介质和电光调制器（EOM）的谐振器，该装置包括光电二极管，其测量从 谐振器，将通过测量激光产生的电信号转换为晶体管晶体管逻辑（TTL）信号的同步器;延迟单元，其设定为将锁定脉冲与Q切换脉冲同步的等待时间 TTL信号，并根据延迟输出触发TTL信号，以及将触发TTL信号输入到执行Q切换的EOM的Q驱动器，并使EOM工作。

公开(公告)号：US20150192463A1

公开(公告)日：2015-07-09

申请号：US14225698

申请日：2014-03-26

申请人： KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

发明人： Young Min JHON ,  Yong Soo KIM ,  Min Ah SEO ,  Jae Hun KIM ,  Min Chul PARK ,  Sun Ho KIM ,  Deok Ha WOO ,  Seok LEE ,  Taik Jin LEE ,  Myung Suk CHUN ,  Woon Jo CHO

IPC分类号： G01J3/02

CPC分类号： G01J3/0297 ,  G01J3/28 ,  G03F7/70516 ,  G03F7/70575 ,  G03F7/70616

摘要： Provided are an apparatus and method for calibrating an extreme ultraviolet (EUV) spectrometer in which a wavelength of a spectrum of EUV light used for EUV lithography and mask inspection technology can be measured accurately.

摘要翻译： 提供了一种用于校准极紫外（EUV）光谱仪的装置和方法，其中可以精确地测量用于EUV光刻和掩模检查技术的EUV光的光谱的波长。

公开(公告)号：US20150049775A1

公开(公告)日：2015-02-19

申请号：US14448227

申请日：2014-07-31

申请人： KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

发明人： Young Min JHON ,  Joon Mo AHN ,  Jae Hun KIM ,  Seok LEE ,  Min Chul PARK ,  Deok Ha WOO ,  Young Tae BYUN ,  Taik Jin LEE ,  Sun Ho KIM

IPC分类号： H01S3/117

CPC分类号： H01S3/117 ,  H01S3/08027 ,  H01S3/1062 ,  H01S3/1068 ,  H01S3/11 ,  H01S3/1103 ,  H01S3/1106 ,  H01S3/1109 ,  H01S3/1112 ,  H01S3/1623

摘要： Provided is a pulse laser apparatus for generating laser light. The apparatus includes a first mirror and a second mirror which are disposed at both ends of a resonator and configured to reflect the laser light, a gain medium disposed between the first and second mirrors and configured to amplify and output light incident from an outside, an etalon configured to adjust a pulse width of the laser light, and an acousto-optic modulator disposed between the first and second mirrors and configured to form a mode-locked and Q-switched signal from the laser light, in which some of the laser light is output through either the first or second mirror to outside the resonator.

摘要翻译： 提供了一种用于产生激光的脉冲激光装置。 该装置包括：第一反射镜和第二反射镜，其设置在谐振器的两端并被配置为反射激光;增益介质，设置在第一和第二反射镜之间并且被配置为放大并输出从外部入射的光， 标准准则被配置为调整激光的脉冲宽度，以及声光调制器，其布置在第一和第二反射镜之间并被配置为从激光形成锁模和Q开关信号，其中一些激光 通过第一或第二反射镜输出到谐振器外部。