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32 条记录 (耗时 0.028 秒)

    Method for detecting the position of a shutter disk in a physical vapor deposition chamber
    21.
    发明授权
    Method for detecting the position of a shutter disk in a physical vapor deposition chamber 有权

    公开(公告)号：US06827825B2

    公开(公告)日：2004-12-07

    申请号：US10702230

    申请日：2003-11-06

    申请人： Michael Feltsman ,  Allen Lau ,  Michael Rosenstein ,  Marc O. Schweitzer

    发明人： Michael Feltsman ,  Allen Lau ,  Michael Rosenstein ,  Marc O. Schweitzer

    IPC分类号： C23C1434

    CPC分类号： C23C14/566

    摘要： The present invention generally provides a physical vapor deposition chamber and a method for detecting a position of a shutter disk within a physical vapor deposition chamber. In one embodiment, a physical vapor deposition chamber includes a chamber body having a shutter disk mechanism disposed therein. A housing is sealingly coupled to a sidewall of the chamber body and communicates therewith through a slot formed through the sidewall. At least a first sensor is disposed adjacent to the housing and orientated to detect the presence of a shutter disk mechanism within the housing. In one embodiment, a method for detecting the position of a shutter disk within a physical vapor deposition chamber having a substrate support generally includes moving the shutter disk away from a substrate support, and changing a state of a first sensor in response to a position of an edge the shutter disk.

    Semiconductor wafer alignment member and clamp ring
    25.
    发明授权
    Semiconductor wafer alignment member and clamp ring 失效
    半导体晶圆对准件和夹环

    公开(公告)号：US5860640A

    公开(公告)日：1999-01-19

    申请号：US564398

    申请日：1995-11-29

    申请人： Dan A. Marohl ,  Michael Rosenstein

    发明人： Dan A. Marohl ,  Michael Rosenstein

    IPC分类号： B24B37/04 ,  H01L21/68 ,  H01L21/683 ,  H01L21/687 ,  B23Q3/00

    CPC分类号： H01L21/68721 ,  H01L21/68735 ,  H01L21/68742 ,  Y10S414/135

    摘要： A semiconductor processing chamber includes a substrate support member on which a substrate and a clamp ring are aligned during processing in the chamber. To align the substrate on the support member, a frustoconical substrate alignment member extends about the perimeter of the substrate receiving surface of the support member to capture a substrate received in the chamber and center the substrate on the upper surface of the support member. The alignment member includes an alignment face thereon, which urges a substrate into alignment with the substrate receiving face of the support member as the substrate is deposited on the support member. To clamp the substrate in proper alignment on the support member and flatten any warpage in the substrate, a clamp ring alignment member is provided which aligns and supports a clamp ring on a substrate without causing significant shadowing of the substrate. The clamp ring is vertically and laterally aligned relative to the support member and substrate centered thereon. The clamp ring alignment member is preferably a plurality of adjustable alignment pins positioned in the outer perimeter of the support member.

    摘要翻译： 半导体处理室包括衬底支撑构件，衬底和夹环在室中的处理期间对准衬底支撑构件。 为了将衬底对准支撑构件，截头圆锥形衬底对准构件围绕支撑构件的衬底接收表面的周边延伸以捕获容纳在腔室中的衬底并使衬底居中在支撑构件的上表面上。 对准构件包括其上的对准面，当衬底沉积在支撑构件上时，该对准面将衬底与支撑构件的衬底接收面对准。 为了将基板夹紧在支撑构件上的正确对准并使基板中的任何翘曲变平，提供了夹持环对准构件，其在衬底上对准和支撑夹紧环，而不引起衬底的显着的阴影。 夹环相对于支撑构件和以其为中心的基底垂直和横向对准。 夹紧环对准构件优选地是定位在支撑构件的外周边中的多个可调整的对准销。

    Build-in LOTO device on equipment breaker panel
    26.
    发明授权
    Build-in LOTO device on equipment breaker panel 有权
    在设备断路器面板上内置LOTO设备

    公开(公告)号：US07148435B2

    公开(公告)日：2006-12-12

    申请号：US11312235

    申请日：2005-12-20

    申请人： Allen K. Lau ,  Michael Rosenstein ,  Carl Johnson ,  Sharon Niehoff

    发明人： Allen K. Lau ,  Michael Rosenstein ,  Carl Johnson ,  Sharon Niehoff

    IPC分类号： H01H9/00

    CPC分类号： H01H9/282

    摘要： An apparatus for a lock out/tag out device that is a permanent attachment to a standard breaker box is disclosed. The device is designed to prevent movement of an electrical breaker handle to a closed position when the device is in use. The device also prevents locking a breaker in an on position, thereby lowering safety concerns. When the device is not in use, the device will not interfere with the operation of the breakers and stays conveniently attached to the breaker box. The device also allows storage of locking devices when not in use, thereby enabling personnel to perform a service procedure more efficiently.

    摘要翻译： 公开了一种用于锁定/标签输出装置的装置，其是与标准断路器盒的永久附件。 该设备被设计成当设备使用时防止电气断路器手柄移动到关闭位置。 该装置还防止将断路器锁定在接通位置，从而降低安全性。 当设备不使用时，设备不会干扰断路器的操作并且保持方便地连接到断路器盒。 该装置还允许在不使用时存储锁定装置，从而使人员能够更有效地执行服务程序。

    Unitary removable shield assembly
    28.
    发明授权
    Unitary removable shield assembly 有权
    单一可拆卸屏蔽组件

    公开(公告)号：US06730174B2

    公开(公告)日：2004-05-04

    申请号：US10093252

    申请日：2002-03-06

    申请人： Alan B. Liu ,  Ilya Lavitsky ,  Michael Rosenstein

    发明人： Alan B. Liu ,  Ilya Lavitsky ,  Michael Rosenstein

    IPC分类号： C23C1600

    CPC分类号： H01J37/32477 ,  C23C14/564

    摘要： An apparatus for replacing consumables of a vacuum chamber. A unitary removable shield assembly is provided to quickly replace consumables such as a shield. The shield assembly can include an upper adapter assembly, at least one shield member, a cover ring and an insulator member. The shield assembly is designed so that the consumables can be replaced in one step and allows the chamber to continue with its maintenance cycle.

    摘要翻译： 一种用于更换真空室的耗材的设备。 提供了一体的可拆卸的屏蔽组件，用于快速更换诸如屏蔽的消耗品。 屏蔽组件可以包括上适配器组件，至少一个屏蔽部件，盖环和绝缘体部件。 屏蔽组件设计成可以在一个步骤中更换耗材，并允许室继续其维护周期。

    Cleanroom lift having an articulated arm
    29.
    发明授权
    Cleanroom lift having an articulated arm 失效
    洁净室电梯具有铰接臂

    公开(公告)号：US06688838B2

    公开(公告)日：2004-02-10

    申请号：US10091686

    申请日：2002-03-04

    申请人： Ilya Lavitsky ,  Michael Rosenstein

    发明人： Ilya Lavitsky ,  Michael Rosenstein

    IPC分类号： B66C2300

    CPC分类号： B25J5/007 ,  B25J9/042 ,  B25J18/04

    摘要： A cleanroom lift for maneuvering large objects such as turbomolecular pumps utilized in semiconductor processing applications is provided. In one embodiment, the lift includes a vertically movable carriage coupled to a linkage assembly. The linkage assembly has a first link and a second link. Each link has one piece construction to minimize deflection under load. The first link is coupled to the carriage by a carriage shaft assembly and to the second link by a linkage shaft assembly. The second link is coupled to the linkage shaft assembly and a gripper assembly. Optionally, a third link and second shaft assembly may be disposed between the gripper assembly and the second link to minimize the weight of the links to facilitate assembly in cleanroom environments.

    摘要翻译： 提供了用于操纵诸如用于半导体加工应用中的涡轮分子泵的大型物体的洁净室升降机。 在一个实施例中，升降机包括联接到连杆组件的可垂直移动的滑架。 连杆组件具有第一连杆和第二连杆。 每个连杆都有一件结构，以减少负载下的挠度。 第一连杆通过滑架轴组件联接到滑架，并通过连杆轴组件连接到第二连杆。 第二连杆联接到连杆轴组件和夹具组件。 可选地，第三连杆和第二轴组件可以设置在夹具组件和第二连杆之间，以最小化连杆的重量，以便于在洁净室环境中组装。

    Shutter disk and blade alignment sensor
    30.
    发明授权
    Shutter disk and blade alignment sensor 有权
    快门盘和刀片对准传感器

    公开(公告)号：US06669829B2

    公开(公告)日：2003-12-30

    申请号：US10082480

    申请日：2002-02-20

    申请人： Michael Feltsman ,  Allen Lau ,  Michael Rosenstein ,  Marc O. Schweitzer

    发明人： Michael Feltsman ,  Allen Lau ,  Michael Rosenstein ,  Marc O. Schweitzer

    IPC分类号： C23C1400

    CPC分类号： C23C14/566

    摘要： The present invention generally provides a physical vapor deposition chamber and a method for detecting a position of a shutter disk within a physical vapor deposition chamber. In one embodiment, a physical vapor deposition chamber includes a chamber body having a shutter disk mechanism disposed therein. A housing is sealingly coupled to a sidewall of the chamber body and communicates therewith through a slot formed through the sidewall. At least a first sensor is disposed adjacent to the housing and orientated to detect the presence of a shutter disk mechanism within the housing. In one embodiment, a method for detecting the position of a shutter disk within a physical vapor deposition chamber having a substrate support generally includes moving the shutter disk away from a substrate support, and changing a state of a first sensor in response to a position of an edge the shutter disk.

    摘要翻译： 本发明通常提供物理气相沉积室和用于检测物理气相沉积室内的快门盘的位置的方法。 在一个实施例中，物理气相沉积室包括其中设置有快门盘机构的室主体。 壳体密封地联接到室主体的侧壁并且通过穿过侧壁形成的槽与其连通。 至少第一传感器被布置成与壳体相邻并且被定向以检测壳体内的快门盘机构的存在。 在一个实施例中，用于检测具有基板支撑件的物理气相沉积室内的快门盘的位置的方法通常包括将快门盘移离基板支撑件，并且响应于第一传感器的位置改变第一传感器的状态 边缘快门盘。