Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object
    21.
    发明申请
    Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object 审中-公开
    电子束照射装置,电子束照射方法及其制造方法及其制造方法

    公开(公告)号:US20050161599A1

    公开(公告)日:2005-07-28

    申请号:US11045748

    申请日:2005-01-28

    摘要: Disclosed are an electron beam irradiation apparatus and an electron beam irradiation method that are capable of easily curing a material that is hard to be cured by irradiation of ultraviolet rays and of reducing the number of electron beam irradiation tubes. The electron beam irradiation apparatus has a motor for rotationally driving an irradiation target object, a shield container for rotatably accommodating the irradiation target object, and an electron beam irradiation unit provided in the shield container so that the surface of the irradiation target object is irradiated with electron beams, wherein the electron beam irradiation unit and the irradiation target object are relatively moved when the electron beam irradiation unit irradiates the surface of the irradiation target object with the electron beams during a rotation of the irradiation target object.

    摘要翻译: 公开了一种电子束照射装置和电子束照射方法,其能够容易地固化通过紫外线的照射难以固化的材料并减少电子束照射管的数量。 电子束照射装置具有旋转驱动被照射物体的电动机,用于可旋转地容纳被照射物的保护容器和设置在该屏蔽容器内的电子射线照射部,照射被照射物体的表面被照射 电子束,其中当电子束照射单元在照射目标物体旋转期间用电子束照射被照射物体的表面时,电子束照射单元和照射目标物体相对移动。

    Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium
    22.
    发明申请
    Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium 失效
    光致抗蚀剂母版的处理方法,记录介质的制造方法,记录介质的制造方法,光致抗蚀剂母版,记录媒体使用主和记录介质

    公开(公告)号:US20050142320A1

    公开(公告)日:2005-06-30

    申请号:US10507429

    申请日:2003-03-10

    摘要: The present invention relates to a method for processing a photoresist-coated board, a method for manufacturing a stamper for a recording medium and a method for manufacturing a recording medium which can form a fine raised and depressed pattern having a uniform width after development even in the case where a laser beam having a relatively long wavelength is used for forming pre-pits on a recording medium with high accuracy. A photoresist-coated board 108 is constituted by laminating a light absorption layer 108b and a photosensitive material layer 108c on a glass substrate 108a in this order and is exposed to a laser beam 102 by condensing the laser beam 102 onto the photosensitive material layer 108c, thereby forming a raised and depressed pattern corresponding to pre-pits on the the photosensitive material layer 108. When the length of a pre-pit to be formed is shorter than 4 T, for example, the duty ratio of the pulse signal train input to the light modulator 109 is varied within a range from about 50% to 65% so that a pulse signal train having a higher duty ratio is generated as the length of a pre-pit to be formed becomes longer and the power of a laser beam is modulated by the thus generated pulse signal train. On the other hand, when the length of a pre-pit to be formed is equal to or longer than 4 T, for example, a pulse signal train having a constant duty ratio is generated independently of the length of the pre-pit to be formed and the power of a laser beam is modulated by the thus generated pulse signal train.

    摘要翻译: 本发明涉及一种用于处理光刻胶涂覆板的方法,一种用于制造用于记录介质的压模的方法和一种用于制造记录介质的方法,该记录介质可以在显影后形成具有均匀宽度的细微凸起和凹陷图案, 使用具有较长波长的激光束以高精度在记录介质上形成预凹坑的情况。 通过将光吸收层108b和感光材料层108c依次层叠在玻璃基板108a上并通过将激光束102聚光到感光材料上而暴露于激光束102而构成光刻胶层108 层108c,从而形成对应于感光材料层108上的预凹坑的凸起和凹陷图案。 当要形成的预制凹坑的长度短于4T时,例如,输入到光调制器109的脉冲信号序列的占空比在约50%至65%的范围内变化,使得脉冲 随着要形成的预制凹坑的长度变长,激光束的功率由如此产生的脉冲信号列调制,产生具有较高占空比的信号序列。 另一方面,当要形成的预制凹坑的长度等于或大于4T时,例如,产生具有恒定占空比的脉冲信号序列,独立于预制凹坑的长度 形成的激光束的功率由如此产生的脉冲信号串调制。

    Method of manufacturing stamper for manufacturing information medium, stamper, and photoresist master
    23.
    发明申请
    Method of manufacturing stamper for manufacturing information medium, stamper, and photoresist master 失效
    用于制造信息介质,压模和光致抗蚀剂母版的压模的方法

    公开(公告)号:US20050039621A1

    公开(公告)日:2005-02-24

    申请号:US10500816

    申请日:2003-01-06

    IPC分类号: G11B7/26 B41C1/00

    CPC分类号: G11B7/263 G11B7/261

    摘要: A stamper with a sharp uneven pattern is obtained, and high precision information media can be manufactured using this stamper. A method of manufacturing a stamper comprises the steps of manufacturing a photoresist master 100 by forming a light absorption layer 103 and a photoresist layer 104 on top of a substrate 102, forming a latent image on the photoresist layer 104, and then forming an uneven pattern 106 in the photoresist layer 104 by developing the latent image, forming a Ni thin film 108 on the uneven pattern 106 of the photoresist master 100 by electroless plating, forming a Ni film 110 on top of the Ni thin film 108, and then removing the Ni thin film 108 and the Ni film 110 from the photoresist master 100 to form the stamper 120, wherein as preliminary treatments prior to the step of forming the Ni thin film 108 on the photoresist layer 104, a metal catalyst is provided on the surface of the uneven pattern 106, the metal catalyst is activated, and the surface of the uneven pattern 106 on which the metal catalyst has been provided is washed with ultra pure water.

    摘要翻译: 获得具有尖锐不均匀图案的压模,并且可以使用该压模来制造高精度的信息介质。 制造压模的方法包括以下步骤:通过在衬底102的顶部上形成光吸收层103和光致抗蚀剂层104,在光致抗蚀剂层104上形成潜像,然后形成不均匀图案来制造光致抗蚀剂母版100 通过显影潜像在光致抗蚀剂层104中,通过无电镀在光致抗蚀剂母版100的不平坦图案106上形成Ni薄膜108,在Ni薄膜108的顶部形成Ni膜110,然后除去 Ni薄膜108和来自光致抗蚀剂母版100的Ni膜110以形成压模120,其中作为在光致抗蚀剂层104上形成Ni薄膜108的步骤之前的预处理,在 不均匀图案106,金属催化剂被活化,并且用超纯水洗涤其上提供金属催化剂的不平坦图案106的表面。

    Method of manufacturing optical recording medium and optical recording medium
    24.
    发明授权
    Method of manufacturing optical recording medium and optical recording medium 失效
    制造光记录介质和光记录介质的方法

    公开(公告)号:US07193960B2

    公开(公告)日:2007-03-20

    申请号:US10488103

    申请日:2002-08-26

    IPC分类号: G11B7/24

    摘要: The present invention provides a method of manufacturing an optical recording medium having two recording layers on a supporting substrate and an optical recording medium obtained according to the method. A method of manufacturing an optical recording medium including the steps of: (A) providing a radiation-curable resin layer backed with a lining sheet 12 on a stamper 11 for the formation of information pits and/or grooves for the first recording layer, irradiating the resin layer with radiation to cure the resin layer, and removing the stamper 11, thereby to form the light transmitting layer 6 supported by the lining sheet 12; (B) forming the first recording layer 5 on the light transmitting layer 6; (C) forming the second recording layer 3 on the supporting substrate 2 with information pits and/or grooves for the second recording layer formed; (D) laminating the lining sheet 12 and the supporting substrate 2 via the space layer 4 so that the first recording layer 5 and the second recording layer 3 are located inside; and (E) removing the lining sheet 12.

    摘要翻译: 本发明提供一种在支撑基板上制造具有两个记录层的光记录介质的方法和根据该方法获得的光记录介质。 一种制造光记录介质的方法,包括以下步骤:(A)在压模11上设置背衬衬板12的辐射固化树脂层,以形成用于第一记录层的信息凹坑和/或凹槽,照射 树脂层具有固化树脂层的辐射,并去除压模11,从而形成由衬板12支撑的透光层6; (B)在透光层6上形成第一记录层5; (C)在支撑基板2上形成具有用于形成第二记录层的信息凹坑和/或凹槽的第二记录层3; (D)经由空间层4层叠衬片12和支撑衬底2,使得第一记录层5和第二记录层3位于内部; 和(E)去除衬片12。

    Information recording medium
    25.
    发明授权
    Information recording medium 有权
    信息记录介质

    公开(公告)号:US07366081B2

    公开(公告)日:2008-04-29

    申请号:US10984964

    申请日:2004-11-10

    IPC分类号: G11B7/24

    摘要: An information recording medium according to the present invention includes a recording layer that is formed of a single layer of a single type of recording material and is directly sandwiched by a pair of resin layers, the information recording medium being constructed so that at least one resin layer out of the pair of resin layers deforms due to deformation of the recording layer that is caused by irradiation with laser light for recording data and a track pitch is in a range of 0.1 μm to 0.5 μm, inclusive, wherein the pair of resin layers are formed with respective Young's moduli in a range of 415 MPa to 7100 MPa, inclusive.

    摘要翻译: 根据本发明的信息记录介质包括由单层记录材料的单层形成并直接夹在一对树脂层之间的记录层,所述信息记录介质构造成使得至少一种树脂 由于由用于记录数据的激光照射引起的记录层的变形,一对树脂层中的层变形,并且轨道间距在0.1μm至0.5μm的范围内,其中一对树脂层 在415MPa〜7100MPa的范围内形成各自的杨氏模量。

    Method for producing multilayer optical recording medium and system for production multilayer optical recording medium
    26.
    发明申请
    Method for producing multilayer optical recording medium and system for production multilayer optical recording medium 审中-公开
    多层光学记录介质的制造方法和多层光学记录介质的制造方法

    公开(公告)号:US20050001343A1

    公开(公告)日:2005-01-06

    申请号:US10489605

    申请日:2002-09-19

    IPC分类号: G11B7/26 B29D17/00 G11B7/24

    摘要: A method of manufacturing a multiplayer optical recording medium by depositing two recording layers, with a spacer layer sandwiched therebetween, on a substrate. The method includes using a rubber chuck which can undergo elastic deformation at least in radial directions to close a central mounting hole of the substrate to thereby fix the substrate having the recording layer formed thereon on a turntable. After a coating liquid for forming the spacer layer is dropped in the vicinity of a boundary portion between a peripheral surface of the rubber chuck and the substrate, the rubber chuck is caused to chuck a stamper for forming the first recording layer thereon while allowing the stamper to be placed over the substrate. Thereafter, the turntable is rotated to spin-coat the coating liquid. This makes it possible to form a spacer layer having a uniform layer thickness while preventing intrusion of air bubbles, without leading to high manufacturing costs.

    摘要翻译: 一种制造多人光学记录介质的方法,该方法通过在衬底上沉积两层记录层,间隔层夹在其间。 该方法包括使用能够至少在径向上进行弹性变形的橡胶卡盘,以封闭基板的​​中心安装孔,从而将其上形成有记录层的基板固定在转台上。 在用于形成间隔层的涂布液落在橡胶卡盘的外周表面和基底之间的边界部分附近时,使橡胶卡盘夹持用于在其上形成第一记录层的压模,同时允许压模 放置在基板上。 此后,旋转转台以旋涂涂布液。 这使得可以形成具有均匀层厚度的间隔层,同时防止气泡的侵入,而不会导致高的制造成本。

    Information medium evaluating method
    27.
    发明授权
    Information medium evaluating method 有权
    信息媒介评估方法

    公开(公告)号:US08295137B2

    公开(公告)日:2012-10-23

    申请号:US11751193

    申请日:2007-05-21

    申请人: Kenji Yoneyama

    发明人: Kenji Yoneyama

    IPC分类号: G11B7/00

    CPC分类号: G11B7/00375

    摘要: An information medium evaluating method includes, in the following order: a recording process that records data onto a recordable information medium to be evaluated; a rubbing process that rubs a processing member against a data recording surface of the information medium; a reading process that reads the data from the information medium; and an evaluating process that evaluates the information medium based on a result of the reading process and evaluation standard data. During the rubbing process, the processing member is rubbed onto only part of a region in a circumferential direction of the information medium.

    摘要翻译: 信息介质评估方法按照以下顺序包括:将数据记录到待评估的可记录信息介质上的记录处理; 摩擦处理,其将处理构件摩擦信息介质的数据记录表面; 从信息介质读取数据的读取过程; 以及基于读取处理和评估标准数据的结果来评估信息介质的评估过程。 在摩擦处理中,处理部件只摩擦信息介质的圆周方向的一部分区域。

    Method of manufacturing stamper for manufacturing information medium, stamper, and photoresist master
    28.
    发明授权
    Method of manufacturing stamper for manufacturing information medium, stamper, and photoresist master 失效
    用于制造信息介质,压模和光致抗蚀剂母版的压模的方法

    公开(公告)号:US07204188B2

    公开(公告)日:2007-04-17

    申请号:US10500816

    申请日:2003-01-06

    IPC分类号: B41F33/00

    CPC分类号: G11B7/263 G11B7/261

    摘要: A stamper with a sharp uneven pattern for manufacturing high precision information media and a method of manufacturing a stamper. The method includes (1) manufacturing a photoresist master by forming a light absorption layer and a photoresist layer on substrate, (2) forming a latent image on the photoresist layer, and an uneven pattern in the photoresist layer by developing the latent image, (3) forming a Ni thin film on the uneven pattern by electroless plating, (4) forming a Ni film on the Ni thin film, and (5) removing the Ni thin film and the Ni film from the photoresist master. The method also includes, prior to the step of forming the Ni thin film on the photoresist layer, a metal catalyst being provided on the surface of the uneven pattern, the metal catalyst being activated, and the surface of the uneven pattern being washed with ultra pure water.

    摘要翻译: 具有用于制造高精度信息介质的尖锐不均匀图案的压模以及制造压模的方法。 该方法包括:(1)通过在基板上形成光吸收层和光致抗蚀剂层来制造光致抗蚀剂母版,(2)通过显影潜像在光致抗蚀剂层上形成潜像和不透明图案( 3)通过化学镀在不平坦图案上形成Ni薄膜,(4)在Ni薄膜上形成Ni膜,(5)从光致抗蚀剂母版中去除Ni薄膜和Ni薄膜。 该方法还包括在光致抗蚀剂层上形成Ni薄膜的步骤之前,在不均匀图案的表面上设置金属催化剂,使金属催化剂活化,不均匀图案的表面用超级清洗 纯净水。

    Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium
    29.
    发明授权
    Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium 失效
    用于处理光致抗蚀剂涂覆的玻璃板的方法,用于制造用于记录介质的压模的方法,记录介质的制造方法,光致抗蚀剂涂覆的玻璃板,用于记录介质的压模和记录介质

    公开(公告)号:US07297472B2

    公开(公告)日:2007-11-20

    申请号:US10507429

    申请日:2003-03-10

    IPC分类号: G11B7/45 G11B7/26

    摘要: The present invention relates to a method for processing a photoresist-coated board, a method for manufacturing a stamper for a recording medium and a method for manufacturing a recording medium which can form a fine raised and depressed pattern having a uniform width after development even in the case where a laser beam having a relatively long wavelength is used for forming pre-pits on a recording medium with high accuracy. A photoresist-coated board 108 is constituted by laminating a light absorption layer 108b and a photosensitive material layer 108c on a glass substrate 108a in this order and is exposed to a laser beam 102 by condensing the laser beam 102 onto the photosensitive material layer 108c, thereby forming a raised and depressed pattern corresponding to pre-pits on the the photosensitive material layer 108. When the length of a pre-pit to be formed is shorter than 4 T, for example, the duty ratio of the pulse signal train input to the light modulator 109 is varied within a range from about 50% to 65% so that a pulse signal train having a higher duty ratio is generated as the length of a pre-pit to be formed becomes longer and the power of a laser beam is modulated by the thus generated pulse signal train. On the other hand, when the length of a pre-pit to be formed is equal to or longer than 4 T, for example, a pulse signal train having a constant duty ratio is generated independently of the length of the pre-pit to be formed and the power of a laser beam is modulated by the thus generated pulse signal train.

    摘要翻译: 本发明涉及一种用于处理光刻胶涂覆板的方法,一种用于制造用于记录介质的压模的方法和一种用于制造记录介质的方法,该记录介质可以在显影后形成具有均匀宽度的细微凸起和凹陷图案, 使用具有较长波长的激光束以高精度在记录介质上形成预凹坑的情况。 通过将光吸收层108b和感光材料层108c依次层叠在玻璃基板108a上并通过将激光束102聚光到感光材料上而暴露于激光束102而构成光刻胶层108 层108c,从而形成对应于感光材料层108上的预凹坑的凸起和凹陷图案。 当要形成的预制凹坑的长度短于4T时,例如,输入到光调制器109的脉冲信号序列的占空比在约50%至65%的范围内变化,使得脉冲 随着要形成的预制凹坑的长度变长,激光束的功率由如此产生的脉冲信号列调制,产生具有较高占空比的信号序列。 另一方面,当要形成的预制凹坑的长度等于或大于4T时,例如,产生具有恒定占空比的脉冲信号序列,独立于预制凹坑的长度 形成的激光束的功率由如此产生的脉冲信号串调制。

    Information recording medium
    30.
    发明申请
    Information recording medium 有权
    信息记录介质

    公开(公告)号:US20060098563A1

    公开(公告)日:2006-05-11

    申请号:US10984964

    申请日:2004-11-10

    IPC分类号: G11B7/24

    摘要: An information recording medium according to the present invention includes a recording layer that is formed of a single layer of a single type of recording material and is directly sandwiched by a pair of resin layers, the information recording medium being constructed so that at least one resin layer out of the pair of resin layers deforms due to deformation of the recording layer that is caused by irradiation with laser light for recording data and a track pitch is in a range of 0.1 μm to 0.5 μm, inclusive, wherein the pair of resin layers are formed with respective Young's moduli in a range of 415 MPa to 7100 MPa, inclusive.

    摘要翻译: 根据本发明的信息记录介质包括由单层记录材料的单层形成并直接夹在一对树脂层之间的记录层,所述信息记录介质构造成使得至少一种树脂 由于由用于记录数据的激光照射引起的记录层的变形,一对树脂层中的层变形,并且轨道间距在0.1μm至0.5μm的范围内,其中一对树脂层 在415MPa〜7100MPa的范围内形成各自的杨氏模量。