公开(公告)号：US06461789B1

公开(公告)日：2002-10-08

申请号：US09643969

申请日：2000-08-23

申请人： Jun Hatakeyama ,  Jun Watanabe ,  Yuji Harada

发明人： Jun Hatakeyama ,  Jun Watanabe ,  Yuji Harada

IPC分类号： G03F7038

CPC分类号： G03F7/0382 ,  G03F7/0046 ,  G03F7/0392 ,  G03F7/0397 ,  Y10S430/106 ,  Y10S430/108

摘要： Polymers comprising fluorinated vinyl alcohol units and having acid labile groups partially introduced are novel. Using such polymers, resist compositions featuring transparency to excimer laser light and alkali solubility are obtained.

摘要翻译： 包含氟化乙烯醇单元和部分引入酸不稳定基团的聚合物是新颖的。 使用这种聚合物，获得具有对准分子激光的透明度和碱溶性的抗蚀剂组合物。

公开(公告)号：US06790586B2

公开(公告)日：2004-09-14

申请号：US09947504

申请日：2001-09-07

申请人： Jun Hatakeyama ,  Yuji Harada ,  Jun Watanabe ,  Yoshio Kawai ,  Masaru Sasago ,  Masayuki Endo ,  Shinji Kishimura ,  Michitaka Ootani ,  Satoru Miyazawa ,  Kentaro Tsutsumi ,  Kazuhiko Maeda

发明人： Jun Hatakeyama ,  Yuji Harada ,  Jun Watanabe ,  Yoshio Kawai ,  Masaru Sasago ,  Masayuki Endo ,  Shinji Kishimura ,  Michitaka Ootani ,  Satoru Miyazawa ,  Kentaro Tsutsumi ,  Kazuhiko Maeda

IPC分类号： G03F7038

CPC分类号： G03F7/0395 ,  G03F7/0046 ,  G03F7/0397 ,  Y10S430/106 ,  Y10S430/108

摘要： A resist composition comprising (A) a polymer comprising recurring units having an alicyclic hydrocarbon backbone to which a carboxylate moiety capable of generating carboxylic acid when decomposed under acidic conditions is attached through a C1-C20 alkylene spacer, (B) a photoacid generator, and (C) an organic solvent is sensitive to high-energy radiation, and has excellent sensitivity and resolution at a wavelength below 180 nm, and good plasma etching resistance. Because these features of the inventive resist composition enable its use particularly as a resist at the exposure wavelength of a F2 excimer laser, a finely defined pattern can easily be formed, making the resist ideal as a micropatterning material in VLSI fabrication.

摘要翻译： 一种抗蚀剂组合物，其包含（A）包含具有脂环族烃主链的重复单元的聚合物，当在酸性条件下分解时，能够产生羧酸的羧酸酯部分通过C1-C20亚烷基间隔基，（B）光致酸产生剂和 （C）有机溶剂对高能辐射敏感，并且在低于180nm的波长下具有优异的灵敏度和分辨率，以及良好的等离子体耐蚀刻性。 由于本发明抗蚀剂组合物的这些特征使得其能够特别用作F2准分子激光器的曝光波长处的抗蚀剂，因此可以容易地形成精细限定的图案，使得抗蚀剂在VLSI制造中理想为微图案材料。

公开(公告)号：US06579658B2

公开(公告)日：2003-06-17

申请号：US09783446

申请日：2001-02-15

申请人： Jun Hatakeyama ,  Jun Watanabe ,  Yuji Harada

发明人： Jun Hatakeyama ,  Jun Watanabe ,  Yuji Harada

IPC分类号： G03C1492

CPC分类号： C08F222/04 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/039 ,  Y10S430/108

摘要： Polymers comprising recurring units of fluorinated maleic anhydride and/or fluorinated maleimide are novel. Using the polymers, resist compositions featuring low absorption of F2 excimer laser light are obtained.

摘要翻译： 包含氟化马来酸酐和/或氟化马来酰亚胺的重复单元的聚合物是新颖的。 使用聚合物，获得了具有低的F2准分子激光吸收的抗蚀剂组合物。

公开(公告)号：US06861197B2

公开(公告)日：2005-03-01

申请号：US10084828

申请日：2002-02-28

申请人： Yuji Harada ,  Jun Watanabe ,  Jun Hatakeyama ,  Yoshio Kawai ,  Masaru Sasago ,  Masayuki Endo ,  Shinji Kishimura ,  Michitaka Ootani ,  Satoru Miyazawa ,  Kentaro Tsutsumi ,  Kazuhiko Maeda

发明人： Yuji Harada ,  Jun Watanabe ,  Jun Hatakeyama ,  Yoshio Kawai ,  Masaru Sasago ,  Masayuki Endo ,  Shinji Kishimura ,  Michitaka Ootani ,  Satoru Miyazawa ,  Kentaro Tsutsumi ,  Kazuhiko Maeda

IPC分类号： C08F220/22 ,  G03F7/004 ,  G03F7/039

CPC分类号： C08F220/22 ,  G03F7/0046 ,  G03F7/0397 ,  Y10S430/108 ,  Y10S430/126 ,  Y10S430/168

摘要： A base polymer having incorporated an ester group having a fluorinated alicyclic unit is provided. A resist composition comprising the polymer is sensitive to high-energy radiation, and has excellent sensitivity at a wavelength of less than 200 nm, significantly improved transparency by virtue of the fluorinated alicyclic units incorporated as well as satisfactory plasma etching resistance. The resist composition has a low absorption at the exposure wavelength of a F2 laser and is ideal as a micropatterning material in VLSI fabrication.

摘要翻译： 提供了具有含有氟化脂环族单元的酯基的基础聚合物。 包含聚合物的抗蚀剂组合物对高能量辐射敏感，并且在小于200nm的波长下具有优异的灵敏度，由于所掺入的氟化脂环族单元以及令人满意的等离子体耐蚀刻性而显着提高了透明度。 抗蚀剂组合物在F2激光的曝光波长处具有低吸收，并且在VLSI制造中是理想的微图案材料。

公开(公告)号：US06582880B2

公开(公告)日：2003-06-24

申请号：US09947765

申请日：2001-09-07

申请人： Yuji Harada ,  Jun Watanabe ,  Jun Hatakeyama ,  Yoshio Kawai ,  Masaru Sasago ,  Masayuki Endo ,  Shinji Kishimura ,  Michitaka Ootani ,  Satoru Miyazawa ,  Kentaro Tsutsumi ,  Kazuhiko Maeda

发明人： Yuji Harada ,  Jun Watanabe ,  Jun Hatakeyama ,  Yoshio Kawai ,  Masaru Sasago ,  Masayuki Endo ,  Shinji Kishimura ,  Michitaka Ootani ,  Satoru Miyazawa ,  Kentaro Tsutsumi ,  Kazuhiko Maeda

IPC分类号： G03F7004

CPC分类号： G03F7/0392 ,  C08F220/22 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0397 ,  Y10S430/108 ,  Y10S430/111

摘要： An acrylate resin containing fluorinated alkyl groups in ester side chains has high transmittance to VUV radiation. A resist composition using the resin as a base polymer is sensitive to high-energy radiation, has excellent sensitivity and resolution, and is suited for lithographic microprocessing.

公开(公告)号：US06333436B1

公开(公告)日：2001-12-25

申请号：US09688365

申请日：2000-10-12

申请人： Matsuo Nakashima ,  Jun Hatakeyama ,  Jun Watanabe ,  Yuji Harada

发明人： Matsuo Nakashima ,  Jun Hatakeyama ,  Jun Watanabe ,  Yuji Harada

IPC分类号： C07C4122

CPC分类号： C07C43/313 ,  C07C43/225 ,  C07C69/017 ,  C07C69/712 ,  C07C69/96 ,  C07F7/1804 ,  Y02P20/55

摘要： Styrene derivatives of formula (1) are novel wherein R1 is H, F, C1-20 alkyl or fluorinated C1-20 alkyl, R2 in cis or trans conformation is F, C1-20 alkyl or fluorinated C1-20 alkyl, R3 is a phenol protecting group, p, q and r are integers in the range of 0≦p

摘要翻译： 式（1）的苯乙烯衍生物是新的，其中R 1是H，F，C 1-20烷基或氟化C 1-20烷基，R 2在顺式或反式构象中是F，C 1-20烷基或氟化C 1-20烷基，R 3是 苯酚保护基，p，q和r为0 <= p <5,0 <= q <5,0

公开(公告)号：US10534112B2

公开(公告)日：2020-01-14

申请号：US16230497

申请日：2018-12-21

申请人： Kohji Sakai ,  Miho Higuchi ,  Jun Watanabe

发明人： Kohji Sakai ,  Miho Higuchi ,  Jun Watanabe

IPC分类号： G02B3/00 ,  G02B27/48 ,  G02B27/01 ,  B60K35/00 ,  G03B29/00 ,  G03B21/625 ,  H04N9/31 ,  G03B21/20 ,  G03B21/00

摘要： A microlens array includes N lenses ranging from a 1st lens to an Nth lens and a lens arrangement area. N is a positive integer. The lens arrangement area has the N lenses arranged in array. The lens arrangement area receives light emitted from a light source. An ith (i being 1st to Nth) lens satisfies a conditional expression below: −20°≤θ≤20° where θ denotes an angle formed by a main-axis orientation of double refraction and a reference orientation.

公开(公告)号：US10203431B2

公开(公告)日：2019-02-12

申请号：US15719213

申请日：2017-09-28

申请人： Kohji Sakai ,  Miho Higuchi ,  Jun Watanabe

发明人： Kohji Sakai ,  Miho Higuchi ,  Jun Watanabe

IPC分类号： G02B3/00 ,  G03B29/00 ,  G02B27/01 ,  G02B27/48 ,  B60K35/00 ,  G03B21/20 ,  G03B21/00

摘要： A microlens array includes N lenses ranging from a 1st lens to an Nth lens and a lens arrangement area. N is a positive integer. The lens arrangement area has the N lenses arranged in array. The lens arrangement area receives light emitted from a light source. An ith (i being 1st to Nth) lens satisfies a conditional expression below: −20°≤θ≤20° where θ denotes an angle formed by a main-axis orientation of double refraction and a reference orientation.

公开(公告)号：US20180250948A1

公开(公告)日：2018-09-06

申请号：US15904480

申请日：2018-02-26

申请人： Yasunari Harada ,  Jun Watanabe ,  Tetsuyoshi Nakata ,  Hideaki Iijima ,  Toshiaki Hosokawa ,  Shunsuke Shitaoka

发明人： Yasunari Harada ,  Jun Watanabe ,  Tetsuyoshi Nakata ,  Hideaki Iijima ,  Toshiaki Hosokawa ,  Shunsuke Shitaoka

IPC分类号： B41J2/21 ,  B41J2/155 ,  B41J2/165

摘要： A liquid droplet discharging apparatus includes a plurality of nozzles to discharge a liquid droplet onto a medium and a liquid droplet discharging controller to receive image data. The liquid droplet discharging controller controls each of the nozzles to discharge the liquid droplet in an amount defined by the image data onto a target discharging position on the medium, which corresponds to a pixel position defined by the image data. The liquid droplet discharging controller controls at least one of the nozzles to discharge the liquid droplet for a controlled number of times smaller than a number of times N representing an integer not smaller than 2 in an amount greater than the amount defined by the image data onto the target discharging position on the medium. A frequency recorder records the controlled number of times of discharging for each of the at least one of the nozzles.

公开(公告)号：US20160107467A1

公开(公告)日：2016-04-21

申请号：US14847636

申请日：2015-09-08

申请人： Tetsuyoshi NAKATA ,  Yasunari Harada ,  Jun Watanabe ,  Tomoko Fukasawa ,  Ryuuichi Satoh ,  Hiroki Tanaka ,  Toshiaki Hosokawa

发明人： Tetsuyoshi NAKATA ,  Yasunari Harada ,  Jun Watanabe ,  Tomoko Fukasawa ,  Ryuuichi Satoh ,  Hiroki Tanaka ,  Toshiaki Hosokawa

IPC分类号： B41J29/38

CPC分类号： B41J29/38 ,  B41J2/2135 ,  B41J3/39

摘要： A printer including an optical moving amount calculator, an angle calculator, and a moving amount corrector is provided. The optical moving amount calculator calculates a moving amount of the printer or an object to be irradiated after a movement thereof, based on a difference in image data generated before and after the movement. The image data is generated by emitting light to the print medium or the object and receiving light reflected therefrom. The angle calculator calculates a deviation angle of an installation angle of the optical moving amount calculator installed in the printer, based on a calibration moving amount of the printer or the object after a calibration movement thereof that is a parallel translation. The moving amount corrector corrects the moving amount of the printer after the movement thereof, based on the calculated deviation angle of the optical moving amount calculator.

摘要翻译： 提供一种包括光学移动量计算器，角度计算器和移动量校正器的打印机。 光学移动量计算器基于移动之前和之后产生的图像数据的差异来计算打印机或其移动后的被照射物体的移动量。 通过向打印介质或物体发射光并接收从其反射的光来产生图像数据。 角度计算器基于打印机或对象在其平行翻译的校准移动之后的校准移动量来计算安装在打印机中的光学移动量计算器的安装角度的偏离角度。 移动量校正器基于所计算的光学移动量计算器的偏差角度来校正其移动之后的打印机的移动量。