公开(公告)号：USRE45855E1

公开(公告)日：2016-01-19

申请号：US14062671

申请日：2013-10-24

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Coronato ,  Alessandro Balzelli Ludovico ,  Sarah Zerbini

IPC: G01C19/56 ,  G01C19/5712

CPC classification number: G01C19/5712 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0828

Abstract: A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to a first anchorage arranged along the axis of rotation by first elastic anchorage elements. The driving mass is also coupled to a pair of further anchorages positioned externally thereof and coupled to opposite sides with respect to the first anchorage by further elastic anchorage elements; the elastic supporting elements and the first and further elastic anchorage elements render the driving mass fixed to the first sensing mass in the rotary motion, and substantially decoupled from the sensing mass in the detection movement, the detection movement being a rotation about an axis lying in a plane.

Abstract translation: 集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且感测质量块经由弹性支撑元件连接到驱动质量块，以便在存在外部应力的情况下执行检测运动。 驱动质量块被锚固到通过第一弹性锚固元件沿着旋转轴线布置的第一锚固件。 驱动质量体还连接到位于其外部的一对另外的锚固件，并且通过另外的弹性锚定元件相对于第一锚固件相对于相对侧联接; 弹性支撑元件和第一和另外的弹性锚固元件使得驱动质量在旋转运动中固定到第一感测块，并且在检测运动中基本上与感测质量分离，检测运动是围绕位于 一架飞机。

公开(公告)号：US08950257B2

公开(公告)日：2015-02-10

申请号：US13890984

申请日：2013-05-09

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato

IPC: G01C19/56

CPC classification number: G01C19/5747 ,  G01P9/02 ,  Y10T29/49826

Abstract: An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.

Abstract translation: 集成的MEMS陀螺仪具有：至少第一驱动质量块，当驱动电极的组件偏压时，沿着第一轴线沿着第一驱动运动驱动，第一驱动运动在存在旋转的情况下产生至少一个感测运动 的集成MEMS陀螺仪; 以及在集成的MEMS陀螺仪的转动存在的情况下，沿着第二轴线横向于第一轴线的第二驱动运动驱动的至少第二驱动质量块，第二驱动运动至少产生相应的感测运动。 集成的MEMS陀螺仪还设置有第一弹性耦合元件，该第一弹性耦合元件使得第一驱动质量块和第二驱动质量块以使得第一驱动运动以给定的运动比率耦合到第二驱动运动的方式弹性耦合。

公开(公告)号：US08820161B2

公开(公告)日：2014-09-02

申请号：US13888170

申请日：2013-05-06

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Cazzaniga ,  Luca Coronato ,  Barbara Simoni

IPC: G01P15/125 ,  G01P15/02 ,  G01C19/5755 ,  G01C19/5769 ,  G01C19/5712

CPC classification number: G01P15/125 ,  G01C19/5712 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/02 ,  G01P2015/0831

Abstract: A MEMS detection structure is provided with: a substrate having a top surface, on which a first fixed-electrode arrangement is set; a sensing mass, extending in a plane and suspended above the substrate and above the first fixed-electrode arrangement at a separation distance; and connection elastic elements that support the sensing mass so that it is free to rotate out of the plane about an axis of rotation, modifying the separation distance, as a function of a quantity to be detected along an axis orthogonal to the plane. The MEMS detection structure also includes: a coupling mass, suspended above the substrate and connected to the sensing mass via the connection elastic elements; and an anchoring arrangement, which anchors the coupling mass to the substrate with a first point of constraint, set at a distance from the axis of rotation and in a position corresponding to the first fixed-electrode arrangement.

Abstract translation: MEMS检测结构设置有：具有顶表面的基板，其上设置有第一固定电极布置; 感测质量块，在平面内延伸并悬挂在衬底上方，并以分隔距离悬挂在第一固定电极装置上方; 以及连接弹性元件，其支撑感测质量，使得其可以围绕旋转轴线自由地旋转离开平面，根据沿着与该平面垂直的轴线被检测的量来修改分离距离。 MEMS检测结构还包括：耦合质量块，悬挂在衬底上并通过连接弹性元件连接到感测质量块; 以及锚定装置，其将耦合质量块固定到具有第一限制点的衬底上，该第一约束点设置在距旋转轴线一定距离处，并且位于对应于第一固定电极装置的位置。

公开(公告)号：US20140038335A1

公开(公告)日：2014-02-06

申请号：US14035798

申请日：2013-09-24

Applicant: STMicroelectronics S.r.l.

Inventor： Angelo Antonio Merassi ,  Sarah Zerbini ,  Luca Coronato

IPC: B81C1/00 ,  B81B3/00

CPC classification number: B81C1/00182 ,  B81B3/0035 ,  B81B3/0072 ,  B81B2201/0257 ,  B81C1/00158 ,  H04R7/24 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  Y10T29/49005

Abstract: A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.

Abstract translation: MEMS声换能器，例如麦克风，包括设置有空腔的基板，固定到基板的支撑结构，具有周缘和质心的膜，悬挂在空腔上方并固定到基板上，膜构造 通过支撑结构振荡。 支撑结构包括固定在膜上的多个锚定元件，并且每个锚定元件在膜的质心和周边之间连接到膜的相应部分。