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21.发明授权Thermal type flow measurement apparatus having asymmetrical passage for flow rate measurement 有权具有用于流量测量的不对称通道的热式流量测量装置公开(公告)号：US07287424B2
公开(公告)日：2007-10-30
申请号：US11210869
申请日：2005-08-25
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/6845
摘要： IN a thermal type flow measurement apparatus, a heating element is disposed in a fluid passage and generates heat by a passage of a current through itself. A first thermal sensitive element is disposed adjacent upstream of the heating element in a direction of fluid flow to be measured. A second thermal sensitive element is disposed adjacent downstream of the heating element in the direction of fluid flow to be measured. The fluid passage is provided with the heating element, the first thermal sensitive element, and the second thermal sensitive element. The fluid passage has an asymmetric structure with respect to the direction of fluid flow.Means for measuring a difference of temperatures is sensed by the first and the second thermal sensitive elements to produce a voltage according to a fluid flow rate. Heat control means for controlling the passage of the current through the heating element so that a sum with weights of respective temperatures sensed by the first and the second thermal sensitive elements reaches a preset value.
摘要翻译： 在热式流量测量装置中，加热元件设置在流体通道中，并且通过自身通过电流而产生热量。 第一热敏元件沿着待测量的流体流动的方向设置在加热元件的上游附近。 第二热敏元件沿着待测量的流体流动的方向设置在加热元件的下游附近。 流体通道设置有加热元件，第一热敏元件和第二热敏元件。 流体通道相对于流体流动的方向具有不对称结构。 通过第一和第二热敏元件检测用于测量温度差的装置，以根据流体流速产生电压。 用于控制通过加热元件的电流的热控制装置，使得由第一和第二热敏元件感测的相应温度的重量达到预设值。
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公开(公告)号：US20070089503A1
公开(公告)日：2007-04-26
申请号：US10560896
申请日：2004-03-05
IPC分类号： G01F1/68
CPC分类号： G01F1/6965 , G01F1/6842 , G01F1/696
摘要： A thermal airflow meter excellent in flow-rate measurement accuracy is provided. The airflow meter has a flow-rate measuring element comprising a heat resistor and a temperature-compensating resistor which are formed on the a first base member. A second base member of the airflow meter, provided with a drive circuit and a signal processor, is housed in a casing holding the flow-rate measuring element. The flow-rate measuring element is disposed in an air passage. Of two temperature sensors for measuring temperature at each of two points in the thermal airflow meter, respectively, a first temperature sensor is provided on the fist substrate of the flow-rate measuring element, and a second temperature sensor is provided inside the casing. The signal processor has a function of computing an airflow rate, an air temperature, and an air passage wall face temperature on the basis of an output signal of the flow-rate measuring element and respective output signals of the first and second sensors.
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公开(公告)号：US07137298B2
公开(公告)日：2006-11-21
申请号：US10860326
申请日：2004-06-04
IPC分类号： G01F1/68
CPC分类号： G01F7/00 , G01F1/684 , G01F1/692 , G01F1/6986
摘要： A thermal air flowmeter which improves air flow rate measurement sensitivity, reduces power consumption of a heating element and broadens the measuring range. A heating resistor is provided on insulating film in a thermal insulating area as a rectangular space on a flat substrate; and two resistance temperature detectors are provided upstream and downstream of the heating resistor. The sides of the rectangular thermal insulating area which are parallel to the axis of air flow are longer than its sides which are perpendicular to the axis of air flow.
摘要翻译： 一种改善空气流量测量灵敏度的热空气流量计，降低了加热元件的功耗并扩大了测量范围。 在隔热区域的绝缘膜上设置加热电阻器作为平坦基板上的矩形空间; 并且在加热电阻器的上游和下游设置两个电阻温度检测器。 平行于空气流动轴线的矩形绝热区域的侧面比垂直于气流轴线的侧面长。
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公开(公告)号：US20060162442A1
公开(公告)日：2006-07-27
申请号：US11210869
申请日：2005-08-25
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/6845
摘要： IN a thermal type flow measurement apparatus, a heating element is disposed in a fluid passage and generates heat by a passage of a current through itself. A first thermal sensitive element is disposed adjacent upstream of the heating element in a direction of fluid flow to be measured. A second thermal sensitive element is disposed adjacent downstream of the heating element in the direction of fluid flow to be measured. The fluid passage is provided with the heating element, the first thermal sensitive element, and the second thermal sensitive element. The fluid passage has an asymmetric structure with respect to the direction of fluid flow. Means for measuring a difference of temperatures is sensed by the first and the second thermal sensitive elements to produce a voltage according to a fluid flow rate. Heat control means for controlling the passage of the current through the heating element so that a sum with weights of respective temperatures sensed by the first and the second thermal sensitive elements reaches a preset value.
摘要翻译： 在热式流量测量装置中，加热元件设置在流体通道中，并且通过自身通过电流而产生热量。 第一热敏元件沿着待测量的流体流动的方向设置在加热元件的上游附近。 第二热敏元件沿着待测量的流体流动的方向设置在加热元件的下游附近。 流体通道设置有加热元件，第一热敏元件和第二热敏元件。 流体通道相对于流体流动的方向具有不对称结构。 通过第一和第二热敏元件检测用于测量温度差的装置，以根据流体流速产生电压。 用于控制通过加热元件的电流的热控制装置，使得由第一和第二热敏元件感测的相应温度的重量达到预设值。
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公开(公告)号：US06968283B2
公开(公告)日：2005-11-22
申请号：US10848166
申请日：2004-05-19
CPC分类号： G01F1/6965 , G01F1/696 , G01F1/699
摘要： A gas flow meter having a gas flow detection circuit for detecting a current flowing through a resistor installed in a gas passage and a voltage generated across the resistor and outputting a voltage signal representing a gas flow passing through the gas passage; a noise reduction circuit for reducing external noise; and a digital adjusting circuit for digitally adjusting a signal representing the detected gas flow and outputting the adjusted signal; wherein a voltage signal based on the signal adjusted by the digital adjusting circuit is output.
摘要翻译： 一种气体流量计，其具有用于检测流过安装在气体通道中的电阻器的电流的气体流量检测电路和跨过电阻器产生的电压，并输出表示通过气体通道的气流的电压信号; 用于减少外部噪声的降噪电路; 以及数字调节电路，用于数字调节表示检测到的气流的信号并输出调整后的信号; 其中输出基于由数字调节电路调节的信号的电压信号。
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公开(公告)号：US20050229694A1
公开(公告)日：2005-10-20
申请号：US11052754
申请日：2005-02-09
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
CPC分类号： G01F1/6845 , F02D41/187 , G01F1/692 , G01F1/696 , G01F1/699
摘要： A heating resistance flow rate measuring apparatus which can use a power source of an ECU in an automobile without requiring an expensive protective circuit and regulator. Heating of temperature detecting resistors themselves causes temperature changes on the windward and leeward sides, and these temperature changes depend on the amounts of heat generated by the temperature detecting resistors. The amounts of heat generated by the temperature detecting resistors depend on a voltage value of the ECU power source applied to the temperature detecting resistors, and an error is caused in a sensor output depending on a variation in the voltage of the ECU power source. Based on the finding that suppressing the amount of heat generated by the temperature detecting resistors is effective in avoiding the sensor output error caused depending on a variation in the output voltage of the ECU power source, means for suppressing the amount of heat generated by the temperature detecting resistors is disposed.
摘要翻译： 一种能够在汽车中使用ECU的电源而不需要昂贵的保护电路和调节器的加热电阻流量测量装置。 温度检测电阻本身的加热引起迎风侧风和背风侧的温度变化，这些温度变化取决于温度检测电阻产生的热量。 由温度检测电阻器产生的热量取决于施加到温度检测电阻器的ECU电源的电压值，并且根据ECU电源的电压变化在传感器输出中引起误差。 基于这样的发现，抑制由温度检测电阻产生的热量对于避免根据ECU电源的输出电压的变化而导致的传感器输出误差是有效的，用于抑制由温度产生的热量的装置 设置检测电阻器。
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27.发明授权Gas flow rate measuring device having an integrated chip temperature sensor and adjustment processing circuit on common chip 有权气体流量测量装置具有集成芯片温度传感器和共同芯片上的调整处理电路公开(公告)号：US06769298B2
公开(公告)日：2004-08-03
申请号：US10124370
申请日：2002-04-18
IPC分类号： G01F168
CPC分类号： G01F1/696 , F02D41/187 , F02D2041/2072
摘要： A flow rate signal analog-digital conversion circuit 30, an adjustment processing circuit 40 and a chip temperature sensor circuit 60 are disposed a single semiconductor chip 100 to form an integrated circuit, and a chip temperature signal in a form of digital signal outputted from the chip temperature sensor circuit 60 is inputted into the adjustment processing circuit 40 in which correction reducing temperature dependent error in a series of signal processing circuits is performed. Thereby, a board temperature dependent error in a gas flow rate measuring device can be reduced in which adjustment is performed for digital signals.
摘要翻译： 流量信号模拟数字转换电路30，调整处理电路40和芯片温度传感器电路60设置在单个半导体芯片100上以形成集成电路，并且以从数字信号的形式输出的芯片温度信号 芯片温度传感器电路60被输入到执行一系列信号处理电路中的校正降低温度相关误差的调整处理电路40中。 因此，可以减少对数字信号进行调整的气体流量测量装置中的板温度相关误差。
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公开(公告)号：US09772208B2
公开(公告)日：2017-09-26
申请号：US14359161
申请日：2012-01-18
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/696 , G01F5/00 , G01F15/00
摘要： Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.
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公开(公告)号：US20140167781A1
公开(公告)日：2014-06-19
申请号：US14235933
申请日：2011-08-03
CPC分类号： G01R1/18 , B81B3/0086 , G01D7/00
摘要： An objective of the present invention is to provide a sensor device with an increased accuracy. In order to achieve the objective, provided is a sensor device includes: an external terminal 2 to which an external device is connected; a ground terminal 3 connected to the ground; an internal circuit 4 that generates a sensor output signal; and a protection circuit 5 having a resistive element 6 and a capacitative element 7 between the external terminal and the internal circuit, in which the capacitative element is formed of a pair of electrodes having different conductivities from each other and a lower-conductive electrode 7a of the electrodes which has a smaller conductivity is connected to the external terminal and the internal circuit.
摘要翻译： 本发明的目的是提供一种具有更高精度的传感器装置。 为了实现该目的，提供了一种传感器装置，包括：连接有外部装置的外部端子2; 连接到地面的接地端子3; 产生传感器输出信号的内部电路4; 以及保护电路5，其在外部端子和内部电路之间具有电阻元件6和电容元件7，其中电容元件由彼此具有不同电导率的一对电极形成，并且电容元件7的下导电电极7a 具有较小导电性的电极连接到外部端子和内部电路。
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公开(公告)号：US20130199280A1
公开(公告)日：2013-08-08
申请号：US13813094
申请日：2011-07-28
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译： 本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。 根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及 使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。 加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧 要测量的流体相对于加热电阻器的流动。
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