公开(公告)号：US20130306866A1

公开(公告)日：2013-11-21

申请号：US13981175

申请日：2012-01-25

申请人： Shahedul Hoque ,  Hajime Kawano

发明人： Shahedul Hoque ,  Hajime Kawano

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  H01J37/1474 ,  H01J2237/004 ,  H01J2237/0048 ,  H01J2237/281

摘要： The present invention has an object to provide a scanning electron microscope which suppresses a potential gradient produced by preliminary charge without changing lens conditions of an electron microscope. As an aspect to achieve the above object, there is proposed a scanning electron microscope in which a scanning deflector is controlled so that a second beam is scanned to detect electrons released from a sample after scanning a first beam on the sample to charge the surface of the sample and the first beam is scanned so that charge density in a surrounding part within a scanned area by the first beam is increased relatively as compared with a center part within the scanned area by the first beam.

摘要翻译： 本发明的目的是提供一种扫描电子显微镜，其在不改变电子显微镜的透镜条件的情况下抑制由预充电产生的电位梯度。 作为实现上述目的的一个方面，提出了一种扫描电子显微镜，其中扫描偏转器被控制，使得扫描第二光束以在扫描样品上的第一光束之后检测从样品释放的电子，从而对 对样品和第一光束进行扫描，使得与第一光束的扫描区域内的中心部分相比，第一光束在扫描区域内的周围部分的电荷密度相对增加。

公开(公告)号：US20080040040A1

公开(公告)日：2008-02-14

申请号：US11882943

申请日：2007-08-07

申请人： Takanori Goto ,  Hajime Kawano

发明人： Takanori Goto ,  Hajime Kawano

IPC分类号： G08G1/16

CPC分类号： G05D1/024 ,  B60G2800/242 ,  B60W30/08 ,  G05D1/0255 ,  G05D1/0272

摘要： An obstacle avoidance method for mobile apparatus includes the steps of acquiring, by a mobile apparatus, information as to relative movement of an obstacle with respect to the mobile apparatus, calculating a travel path and a travel direction of the obstacle based on the information during its relative movement, setting a non-intrusion area having a configuration which is longer in the travel direction of the obstacle than in a direction perpendicular to the travel direction, and performing such travel control on the mobile apparatus as to avoid the non-intrusion area, by which obstacle avoidance operation is fulfilled. Thus, an obstacle avoidance method as well as an obstacle-avoidable mobile apparatus are provided which are capable of not only reducing collisions against obstacles and repetitions of avoidance operation, but also preventing impartment of uneasiness and oppression to persons in the obstacle avoidance operation for mobile apparatuses such as robots.

摘要翻译： 移动装置的障碍物回避方法包括以下步骤：通过移动装置获取关于障碍物相对于移动装置的相对移动的信息，根据其中的信息计算障碍物的行进路径和行进方向 相对移动，设置具有比行进方向垂直的方向在障碍物的行进方向上更长的构造的非入侵区域，并且对移动装置进行这样的行驶控制以避免非入侵区域， 通过这种方式实现了避障操作。 因此，提供了一种障碍物回避方法以及可避免障碍的移动装置，其不仅能够减少对障碍的碰撞和重复的回避操作，而且还可以防止对移动的避障操作中的人的不安和压迫 装置如机器人。

公开(公告)号：US06828573B1

公开(公告)日：2004-12-07

申请号：US09315988

申请日：1999-05-21

申请人： Hajime Kawano ,  Minoru Wakita ,  Masato Kamada ,  Haruo Yoda

发明人： Hajime Kawano ,  Minoru Wakita ,  Masato Kamada ,  Haruo Yoda

IPC分类号： G21G500

CPC分类号： H01J37/3023 ,  H01J2237/31761 ,  H01J2237/31769

摘要： An object of this invention is to provide an electron beam lithography system capable of rapidly creating an accurate exposure map for proximity effect correction. The inventive system creates the map by dividing shot figures by mesh and adding up the divided area values for each mesh. The system comprises: (1) a function for judging and dividing boundaries of shots to be rendered based on mesh positions as well as shot positions and figures in the map, and (2) a function for calculating divided shot area values and adding the values simultaneously to adjacent addresses in cumulative fashion in a plurality of memories furnished downstream of the system.

摘要翻译： 本发明的目的是提供一种电子束光刻系统，其能够快速创建用于邻近效应校正的精确曝光图。 本发明的系统通过用网格划分射击图并且将每个网格的分割区域值相加来创建地图。 该系统包括：（1）用于根据网格位置以及拍摄位置和图形来判断和分割要渲染的边界的功能，以及（2）用于计算分割的拍摄区域值并将值相加的功能 在系统下游的多个存储器中以累积的方式同时到达相邻地址。

公开(公告)号：US5113161A

公开(公告)日：1992-05-12

申请号：US661527

申请日：1991-02-25

申请人： Kazuyoshi Inami ,  Hajime Kawano

发明人： Kazuyoshi Inami ,  Hajime Kawano

IPC分类号： H05K9/00 ,  H01L23/552 ,  H01L23/66 ,  H05K7/14

CPC分类号： H01L23/66 ,  H01L23/552 ,  H01L2223/6622 ,  H01L2224/05553 ,  H01L2224/48137 ,  H01L2224/4823 ,  H01L2224/49175 ,  H01L24/48 ,  H01L24/49 ,  H01L2924/00014 ,  H01L2924/0102 ,  H01L2924/14 ,  H01L2924/1616 ,  H01L2924/3025

摘要： A case for housing integrated microwave circuits comprises a metal conductor body for carrying the integrated circuits on the upper surface thereof, the first and second dielectric substrates stacked on each other and also stacked on the upper surface of the body and having square holes for receiving the integrated circuits. The first substrate has strip line patterns for connecting signal input/output pads of the integrated circuits to each other and external signal terminals, and openings each filled with a conductive metal connected to the body. The second substrate has openings each filled with the conductive metal and electromagnetic shielding partitions between the adjacent square holes to provide isolation of a wave guide mode between the integrated circuits. The openings of both substrates are correspondingly arranged to connect the conductive metals thereof so that electromagnetic shielding is effected.

摘要翻译： 用于容纳集成微波电路的壳体包括用于在其上表面上承载集成电路的金属导体体，彼此堆叠的第一和第二电介质基板，并且还层叠在主体的上表面上，并且具有用于接收 集成电路。 第一衬底具有带状线图案，用于将集成电路的信号输入/输出焊盘彼此连接和外部信号端子，以及各自填充有连接到主体的导电金属的开口。 第二基板具有各自填充有导电金属和相邻方孔之间的电磁屏蔽隔板的开口，以提供集成电路之间的波导模式的隔离。 相应地布置两个基板的开口以连接其导电金属，从而实现电磁屏蔽。

公开(公告)号：US08577498B2

公开(公告)日：2013-11-05

申请号：US12123752

申请日：2008-05-20

申请人： Hajime Kawano ,  Takanori Goto ,  Toru Nakagawa ,  Tamao Okamoto

发明人： Hajime Kawano ,  Takanori Goto ,  Toru Nakagawa ,  Tamao Okamoto

IPC分类号： G06F19/00

CPC分类号： G05B19/4189 ,  B25J9/1664 ,  G05B2219/40425 ,  G05B2219/40472 ,  G05B2219/40506 ,  Y02P90/28

摘要： A transfer robot for accommodating and transferring a transferred object has a transfer route storage section, a movement mechanism section, and a security level setting section. The transfer route storage section stores a transfer route having been set up at least on the basis of transfer destination information for the transferred object. The movement mechanism section causes the transfer robot to move toward a transfer destination on the basis of the transfer route. The security level setting section switches a security level of the transfer robot under movement on the basis of a zone level defined beforehand by each region in the transfer route, present position information of the transfer robot, and type information of the transferred object.

摘要翻译： 用于容纳和传送转移对象的传送机器人具有传送路径存储部分，移动机构部分和安全级别设置部分。 传送路径存储部存储至少基于被传送对象的传送目的地信息而设定的传送路径。 运动机构部分使得传送机器人基于传送路线朝向传送目的地移动。 安全级别设定部基于传送路径中的各区域预先定义的区域级别，传送机器人的当前位置信息和被传送对象的类型信息，来移动传送机器人的安全级别。

公开(公告)号：US08334520B2

公开(公告)日：2012-12-18

申请号：US13124599

申请日：2009-10-22

申请人： Tadashi Otaka ,  Hiroyuki Ito ,  Ryoichi Ishii ,  Manabu Yano ,  Hajime Kawano

发明人： Tadashi Otaka ,  Hiroyuki Ito ,  Ryoichi Ishii ,  Manabu Yano ,  Hajime Kawano

IPC分类号： H01J37/26

CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/20214 ,  H01J2237/2811 ,  H01J2237/2817

摘要： An exemplary a charged particle beam apparatus converts an inspection position on a test sample (wafer coordinate system) to a setting position of an inspection mechanism (stage coordinate system (polar coordinate system)), a rotating arm and a rotating stage being rotated to be moved for the inspection position on the test sample. In this case, inspection devices are arranged over a locus that is drawn by the center of the rotating stage according to the rotation of the rotating arm. A function for calculating errors (e.g., center shift of the rotating stage) and compensating for the errors is provided, by which the precision of inspection is improved in a charged particle beam apparatus equipped with a biaxial rotating stage mechanism.

摘要翻译： 一种带电粒子束装置的示例将测试样品（晶片坐标系）上的检查位置转换成检查机构（载台坐标系（极坐标系））的设置位置，旋转臂和旋转台旋转为 移动到测试样品上的检查位置。 在这种情况下，检查装置设置在由旋转台的旋转中心旋转的轨迹上。 提供了一种用于计算误差（例如，旋转台的中心偏移）和补偿误差的功能，通过该功能，在装备有双轴旋转平台机构的带电粒子束装置中提高了检查精度。