公开(公告)号：US20050145171A1

公开(公告)日：2005-07-07

申请号：US11054061

申请日：2005-02-10

申请人： Nobuharu Noji ,  Hiroshi Sobukawa ,  Masami Nagayama ,  Koji Ono ,  Mutsumi Saito

发明人： Nobuharu Noji ,  Hiroshi Sobukawa ,  Masami Nagayama ,  Koji Ono ,  Mutsumi Saito

IPC分类号： B08B3/04 ,  C23C16/04 ,  C23C16/44 ,  H01L21/00 ,  H01L21/205 ,  H01L21/304 ,  B24B49/00 ,  B24B51/00 ,  C23C16/00

CPC分类号： C23C16/4409 ,  B08B3/04 ,  B08B3/041 ,  C23C16/04 ,  H01L21/67126

摘要： A processing method is performed for processing a workpiece such as a semiconductor wafer. The processing method utilizes an apparatus comprising a cover for covering a portion of a surface, to be processed, of a workpiece, a process chamber formed by the cover and the surface, to be processed, of the workpiece, and a sealing portion provided between the cover and the surface of the workpiece for sealing the process chamber.

摘要翻译： 执行用于处理诸如半导体晶片的工件的处理方法。 该处理方法利用一种装置，该装置包括用于覆盖被加工的工件的表面的一部分，被加工的被加工的表面和被处理的表面的处理室， 盖子和工件的表面用于密封处理室。

公开(公告)号：US06585480B2

公开(公告)日：2003-07-01

申请号：US10035145

申请日：2002-01-04

申请人： Hiroyuki Kawasaki ,  Hiroshi Sobukawa

发明人： Hiroyuki Kawasaki ,  Hiroshi Sobukawa

IPC分类号： F01D136

CPC分类号： F04D19/046 ,  F04D19/044 ,  F04D27/0292 ,  F04D29/321

摘要： A turbo-molecular pump has a casing, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. A turbine blade pumping assembly and a thread groove pumping assembly for discharging gas molecules are disposed between the stator and the rotor. The rotor comprises at least two components constituting the turbine blade pumping assembly and the thread groove pumping assembly. The components are separable from each other at a predetermined position, and joined to each other to form the rotor.

公开(公告)号：US06220831B1

公开(公告)日：2001-04-24

申请号：US09133331

申请日：1998-08-13

申请人： Atsushi Shiokawa ,  Matsutaro Miyamoto ,  Hiroshi Sobukawa ,  Toshiharu Nakazawa

发明人： Atsushi Shiokawa ,  Matsutaro Miyamoto ,  Hiroshi Sobukawa ,  Toshiharu Nakazawa

IPC分类号： F04B1704

CPC分类号： F04D17/168 ,  F04D19/04

摘要： A turbomolecular pump comprising a rotor and a stator housed in a casing and forming an exhaust channel therebetween, and a suction port and a discharge port formed in the casing; wherein the turbomolecular pump has a valve body for opening and closing the suction port, the valve body is movable in an axial direction of the turbomolecular pump, a valve driving mechanism for driving the valve body via a valve body supporting member which extends through a throughhole formed in the rotor and/or the stator and magnetic bearing units for non-contactingly supporting the valve body supporting member within the throughhole, whereby a turbomolecular pump having a compact overall construction including valve units can be provided.

摘要翻译： 一种涡轮分子泵，包括转子和定子，其容纳在壳体中并在其间形成排气通道，以及形成在所述壳体中的吸入口和排出口。 其中所述涡轮分子泵具有用于打开和关闭所述吸入口的阀体，所述阀体可在所述涡轮分子泵的轴向方向上移动;阀驱动机构，其经由阀体支撑构件驱动所述阀体，所述阀体支撑构件延伸穿过通孔 形成在转子和/或定子和磁轴承单元中，用于在通孔内非接触地支撑阀体支撑构件，由此可以提供具有包括阀单元的紧凑整体结构的涡轮分子泵。

公开(公告)号：US6062810A

公开(公告)日：2000-05-16

申请号：US133332

申请日：1998-08-13

申请人： Matsutaro Miyamoto ,  Hiroshi Sobukawa ,  Toshiharu Nakazawa ,  Atsushi Shiokawa ,  Junichi Arami

发明人： Matsutaro Miyamoto ,  Hiroshi Sobukawa ,  Toshiharu Nakazawa ,  Atsushi Shiokawa ,  Junichi Arami

IPC分类号： F04D29/10 ,  F04D17/16 ,  F04D19/04 ,  F04D15/00 ,  F04B17/00 ,  F04B49/22

CPC分类号： F04D19/04 ,  F04D17/168

摘要： A turbomolecular pump evacuates gas in an apparatus (or a chamber) by means of a rotor having blades and/or spiral grooves which rotates at a high speed. The turbomolecular pump includes a casing housing a rotor and a stator therein, a pumping section comprising the rotor and the stator, a valve element capable of opening or closing an intake port of the casing, and a supporting member for supporting the valve element. The supporting member extends through at least one of the rotor and the stator. The turbomolecular pump further includes an actuating mechanism for actuating the valve element, and the actuating mechanism is provided at a side opposite to the intake port with respect to the rotor.

摘要翻译： 涡轮分子泵通过具有高速旋转的叶片和/或螺旋槽的转子在装置（或室）中排出气体。 涡轮分子泵包括壳体，壳体中包括转子和定子，泵体部分包括转子和定子，能够打开或关闭壳体的进气口的阀元件和用于支撑阀元件的支撑构件。 支撑构件延伸穿过转子和定子中的至少一个。 涡轮分子泵还包括用于致动阀元件的致动机构，并且致动机构设置在相对于转子的与进气口相对的一侧。

公开(公告)号：US4926648A

公开(公告)日：1990-05-22

申请号：US318206

申请日：1989-03-03

申请人： Katsuya Okumura ,  Fumio Kuriyama ,  Yukio Murai ,  Manabu Tsujimura ,  Hiroshi Sobukawa

发明人： Katsuya Okumura ,  Fumio Kuriyama ,  Yukio Murai ,  Manabu Tsujimura ,  Hiroshi Sobukawa

IPC分类号： F04B37/06 ,  F04D19/04

CPC分类号： F04B37/06 ,  F04D19/046 ,  Y10S417/901

摘要： A turbomolecular pump having a rotor provided with a plurality of rotor blades and a spacer provided with a plurality of stator blades so that gas molecules are sucked in from a suction port, compressed and discharged from an exhaust port. The pump further has a heat exchanger provided inside the suction port, the heat exchanger being connected to a refrigerator through a refrigerant pipe and a gate valve provided on the upstream side of the suction port. Gases having low molecular weights, particularly water vapor, are freeze-trapped on the heat exchanger. Thus, it is possible to efficiently exhaust gases having low molecular weights, particularly water vapor, and hence to obtain a high vacuum of good quality. In addition, it is easy to start and suspend operation of the system and possible to run it on a continuous basis.