公开(公告)号：US07900512B2

公开(公告)日：2011-03-08

申请号：US11878441

申请日：2007-07-24

申请人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

发明人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

IPC分类号： G01P9/04

CPC分类号： G01C19/5698

摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

摘要翻译： 角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。 第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。 角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

公开(公告)号：US20110041605A1

公开(公告)日：2011-02-24

申请号：US12923971

申请日：2010-10-19

申请人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

发明人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

IPC分类号： G01C19/56

CPC分类号： G01C19/5698

摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

公开(公告)号：US20110041604A1

公开(公告)日：2011-02-24

申请号：US12923970

申请日：2010-10-19

申请人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

发明人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

IPC分类号： G01C19/56

CPC分类号： G01C19/5698

摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

公开(公告)号：US07418864B2

公开(公告)日：2008-09-02

申请号：US11384330

申请日：2006-03-21

申请人： Kazushi Asami ,  Yukihiro Takeuchi ,  Kenichi Yokoyama

发明人： Kazushi Asami ,  Yukihiro Takeuchi ,  Kenichi Yokoyama

IPC分类号： G01P15/125 ,  G01P15/00

CPC分类号： B81B3/0086 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0831

摘要： An acceleration sensor includes: a semiconductor substrate including a support layer and a semiconductor layer, which are stacked in a first direction; a movable electrode and a fixed electrode; and a trench. The movable electrode separately faces the fixed electrode by sandwiching the trench along with a second direction. The trench has a detection distance in the second direction. The movable electrode is movable along with the first direction when acceleration is applied. The movable electrode has a bottom apart from the support layer. The width of the movable electrode along with the second direction is smaller than the width of the fixed electrode. The thickness of the movable electrode along with the first direction is smaller than the thickness of the fixed electrode.

摘要翻译： 加速度传感器包括：包括沿第一方向堆叠的支撑层和半导体层的半导体衬底; 可动电极和固定电极; 和沟槽。 可移动电极通过与第二方向一起夹住沟槽而分开面对固定电极。 沟槽在第二方向上具有检测距离。 当施加加速度时，可移动电极与第一方向一起可移动。 可动电极具有与支撑层分离的底部。 可动电极与第二方向的宽度小于固定电极的宽度。 可移动电极与第一方向的厚度小于固定电极的厚度。

公开(公告)号：US6119518A

公开(公告)日：2000-09-19

申请号：US906044

申请日：1997-08-05

申请人： Takeshi Itou ,  Yasushi Matsuhiro ,  Muneo Yorinaga ,  Kazushi Asami ,  Yoshimi Yoshino ,  Kazuhiko Miura

发明人： Takeshi Itou ,  Yasushi Matsuhiro ,  Muneo Yorinaga ,  Kazushi Asami ,  Yoshimi Yoshino ,  Kazuhiko Miura

IPC分类号： G01C19/56 ,  G01C19/5621 ,  G01C19/5628 ,  G01P9/00

CPC分类号： G01C19/5607

摘要： An angular velocity sensor includes a tuning-fork oscillator having a pair of arms jointed by a trunk, the pair of arms extending in parallel to each other, first and second driving piezoelectric elements arranged only on one surface of the trunk with a gap therebetween in an extending direction of the arms, and angular velocity detecting piezoelectric elements arranged on surfaces of the arms in parallel with the one surface of the trunk on which the first and second piezoelectric elements are arranged.

摘要翻译： 角速度传感器包括音叉振荡器，该音叉具有一对臂，所述一对臂由主体连接，所述一对臂彼此平行地延伸，第一和第二驱动压电元件仅布置在躯干的一个表面上，其间具有间隙 臂的延伸方向以及布置在臂的表面上并与第一和第二压电元件布置在其上的主体的一个表面平行的角速度检测压电元件。