公开(公告)号：US07187003B2

公开(公告)日：2007-03-06

申请号：US10986930

申请日：2004-11-15

申请人： Hyang-Shik Kong ,  Sung-Wook Huh ,  Young-Bae Park

发明人： Hyang-Shik Kong ,  Sung-Wook Huh ,  Young-Bae Park

IPC分类号： H01L31/036 ,  H01L21/00

CPC分类号： G02F1/1362 ,  G02F1/13458 ,  G02F2001/136254 ,  H01L21/32134 ,  H01L21/32136 ,  H01L27/124 ,  H01L27/1255 ,  H01L27/1288

摘要： Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 μm or less, or the rounded contact tip is coated with gold (Au).

摘要翻译： 公开了一种薄膜晶体管基板及其检查系统。 薄膜晶体管基板包括形成在绝缘基板上并包括栅极线的栅极布线，以及连接到栅极线的栅电极和栅极焊盘; 覆盖栅极布线的栅极绝缘层; 形成在所述栅绝缘层上的半导体层; 数据布线形成在栅极绝缘层上并包括数据焊盘; 覆盖数据线的保护层; 辅助焊盘通过形成在保护层中的接触孔连接到数据焊盘; 以及在数据焊盘下方突出预定高度形成的焊盘辅助层。 用于确定薄膜晶体管基板是否缺陷的检查系统，其中薄膜晶体管基板包括包括栅极线，栅电极和栅极焊盘的栅极布线，以及包括源电极和漏电极的数据布线，包括用于接触的探针 栅极焊盘或数据焊盘并传输相应的信号，其中用于接触栅极焊盘或数据焊盘的探针的远端处的接触尖端是圆形的，并且圆形接触尖端的半径为2μm或更小， 或圆形接触尖端涂有金（Au）。

公开(公告)号：US20050205866A1

公开(公告)日：2005-09-22

申请号：US11130234

申请日：2005-05-17

申请人： Dong-Gyu Kim ,  Jun-Ho Song ,  Jong-Woong Chang ,  Jae-Ho Choi ,  Byoung-Sun Na ,  Young-Bae Park ,  Sung-Wook Huh

发明人： Dong-Gyu Kim ,  Jun-Ho Song ,  Jong-Woong Chang ,  Jae-Ho Choi ,  Byoung-Sun Na ,  Young-Bae Park ,  Sung-Wook Huh

IPC分类号： G02F1/13 ,  G02F1/1343 ,  G02F1/1362 ,  H01L21/77 ,  H01L21/84 ,  H01L29/10 ,  H01L29/12

CPC分类号： G02F1/134336 ,  G02F1/1362 ,  G02F1/136286 ,  G02F2001/13606 ,  H01L27/124 ,  H01L27/1288 ,  H01L29/12

摘要： A method for manufacturing a thin film transistor array panel is disclosed. A gate wiring pattern is formed on an insulating substrate. A gate insulating layer is formed on the gate wiring pattern. A semiconductor pattern is formed on the gate insulating layer. A transparent conductive layer is formed on the gate insulating layer. The transparent conductive layer is patterned to form a pixel electrode. An opening is formed at a circumference of the pixel electrode. The opening minimizes misalignment during the manufacturing process and prevents shorts between a data line and the pixel electrode.

摘要翻译： 公开了一种制造薄膜晶体管阵列面板的方法。 在绝缘基板上形成栅极布线图案。 栅极绝缘层形成在栅极布线图案上。 在栅极绝缘层上形成半导体图形。 在栅极绝缘层上形成透明导电层。 图案化透明导电层以形成像素电极。 在像素电极的圆周上形成开口。 该开口使制造过程中的未对准最小化并防止数据线与像素电极之间的短路。

公开(公告)号：US06872976B2

公开(公告)日：2005-03-29

申请号：US10602052

申请日：2003-06-24

申请人： Hyang-Shik Kong ,  Sung-Wook Huh ,  Young-Bae Park

发明人： Hyang-Shik Kong ,  Sung-Wook Huh ,  Young-Bae Park

IPC分类号： G02F1/136 ,  H01L21/3213 ,  H01L21/77 ,  H01L21/84 ,  H01L27/12 ,  H01L27/13 ,  H01L29/04 ,  H01L31/036 ,  H01L31/20

CPC分类号： G02F1/1362 ,  G02F1/13458 ,  G02F2001/136254 ,  H01L21/32134 ,  H01L21/32136 ,  H01L27/124 ,  H01L27/1255 ,  H01L27/1288

摘要： Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 μm or less, or the rounded contact tip is coated with gold (Au).

摘要翻译： 公开了一种薄膜晶体管基板及其检查系统。 薄膜晶体管基板包括形成在绝缘基板上并包括栅极线的栅极布线，以及连接到栅极线的栅电极和栅极焊盘; 覆盖栅极布线的栅极绝缘层; 形成在所述栅绝缘层上的半导体层; 数据布线形成在栅极绝缘层上并包括数据焊盘; 覆盖数据线的保护层; 辅助焊盘通过形成在保护层中的接触孔连接到数据焊盘; 以及在数据焊盘下方突出预定高度形成的焊盘辅助层。 用于确定薄膜晶体管基板是否缺陷的检查系统，其中薄膜晶体管基板包括包括栅极线，栅电极和栅极焊盘的栅极布线，以及包括源电极和漏电极的数据布线，包括用于接触的探针 栅极焊盘或数据焊盘并传输相应的信号，其中用于接触栅极焊盘或数据焊盘的探针的远端处的接触尖端是圆形的，并且圆形接触尖端的半径为2μm或更小， 或圆形接触尖端涂有金（Au）。

公开(公告)号：US06590226B2

公开(公告)日：2003-07-08

申请号：US09970785

申请日：2001-10-05

申请人： Hyang-Shik Kong ,  Sung-Wook Huh ,  Young-Bae Park

发明人： Hyang-Shik Kong ,  Sung-Wook Huh ,  Young-Bae Park

IPC分类号： H01L2904

CPC分类号： G02F1/1362 ,  G02F1/13458 ,  G02F2001/136254 ,  H01L21/32134 ,  H01L21/32136 ,  H01L27/124 ,  H01L27/1255 ,  H01L27/1288

摘要： Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 &mgr;m or less, or the rounded contact tip is coated with gold (Au).