X-ray inspection and detection system and method
    25.
    发明授权
    X-ray inspection and detection system and method 失效
    X射线检查和检测系统及方法

    公开(公告)号:US07590220B1

    公开(公告)日:2009-09-15

    申请号:US12045110

    申请日:2008-03-10

    IPC分类号: G01N23/207

    CPC分类号: G01N23/2076

    摘要: An X-ray detection and inspection system is disclosed. The system includes an X-ray source configured to generate an interrogating X-ray beam, wherein the X-ray beam is directed towards a probe volume in a sample, one or more two-dimensional area detectors, wherein the one or more detectors are positioned at angles other than 90 degrees with respect to the direction of the interrogating beam and are configured to receive and detect non-circular conic sections of diffracted X rays from the probe volume, and an acquisition and analysis system configured to generate position and intensity data of the non-circular conic sections such that the corresponding mathematical equations of the conic sections could be generated, to identify one of a quasi-monochromatic or monochromatic XRD pattern from the non-circular conic sections, and to determine a position of the probe volume and at least two Bragg diffraction angles from said XRD pattern.

    摘要翻译: 公开了一种X射线检测和检查系统。 该系统包括被配置为产生询问X射线束的X射线源,其中X射线束被引导到样本中的探针体积,一个或多个二维区域检测器,其中一个或多个检测器是 被定位成相对于询问光束的方向为90度以外的角度,并被配置为接收和检测来自探针体积的衍射X射线的非圆锥形部分,以及被配置为产生位置和强度数据的采集和分析系统 的非圆形圆锥截面,使得可以生成圆锥截面的相应数学方程,以从非圆形圆锥截面中识别准单色或单色XRD图案之一,并且确定探针体积的位置 和来自所述XRD图案的至少两个布拉格衍射角。