公开(公告)号：US09397112B1

公开(公告)日：2016-07-19

申请号：US14645993

申请日：2015-03-12

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Harry-Hak-Lay Chuang ,  Wei Cheng Wu ,  Chien-Hung Chang

IPC: H01L27/108 ,  H01L27/115 ,  H01L49/02 ,  H01L29/51 ,  H01L21/28

CPC classification number: H01L21/28273 ,  H01L27/11524 ,  H01L27/11536 ,  H01L27/11539 ,  H01L27/11541 ,  H01L27/11543 ,  H01L29/42328 ,  H01L29/42332

Abstract: The present disclosure relates to a non-planar FEOL (front-end-of-the-line) capacitor comprising a charge trapping dielectric layer disposed between electrodes, and an associated method of fabrication. In some embodiments, the non-planar FEOL capacitor has a first electrode disposed over a substrate. A charge trapping dielectric layer is disposed onto the substrate at a position adjacent to the first electrode. The charge trapping dielectric layer has an “L” shape, with a lateral component extending in a first direction and a vertical component extending in a second direction. A second electrode is arranged onto the lateral component and is separated from the first electrode by the first component.

Abstract translation: 本公开涉及一种包括设置在电极之间的电荷捕获介电层的非平面FEOL（前端线）电容器和相关的制造方法。 在一些实施例中，非平面FEOL电容器具有设置在衬底上的第一电极。 电荷捕获电介质层在与第一电极相邻的位置处设置在基板上。 电荷俘获介电层具有“L”形状，其中侧向分量沿第一方向延伸，垂直分量沿第二方向延伸。 第二电极布置在侧向部件上并且通过第一部件与第一电极分离。