公开(公告)号：US08490483B2

公开(公告)日：2013-07-23

申请号：US12834953

申请日：2010-07-13

Applicant: Martin Wrede ,  Johannes Classen ,  Torsten Ohms ,  Carsten Geckeler ,  Burkhard Kuhlmann ,  Jens Frey ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Thorsten Balslink

Inventor： Martin Wrede ,  Johannes Classen ,  Torsten Ohms ,  Carsten Geckeler ,  Burkhard Kuhlmann ,  Jens Frey ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Thorsten Balslink

IPC: G01C19/56

CPC classification number: G01C19/5712 ,  G01C19/5747

Abstract: A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.

Abstract translation: 一种微机械摆动速率传感器，包括第一偏转速率传感器元件，该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号，输出第二传感器信号的第二偏转速度传感器元件， 包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息，驱动第一偏转速率传感器元件的驱动器和耦合连杆，其将第一横摆速率传感器元件和 第二偏转速率传感器元件彼此之间，使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。

公开(公告)号：US20110079079A1

公开(公告)日：2011-04-07

申请号：US12897367

申请日：2010-10-04

Applicant: Johannes CLASSEN ,  Torsten Ohms ,  Daniel Cgristoph Meisel ,  Joerg Hauer

Inventor： Johannes CLASSEN ,  Torsten Ohms ,  Daniel Cgristoph Meisel ,  Joerg Hauer

IPC: G01P3/44

CPC classification number: G01C19/5755 ,  G01C19/574

Abstract: A yaw rate sensor having a substrate which has a main plane of extension, and a Coriolis element is proposed. The Coriolis element is excitable to a vibration along a third direction which is perpendicular to the main plane of extension. A Coriolis deflection of the Coriolis element along a first direction which is parallel to the main plane of extension may be detected using a detection arrangement. The detection arrangement includes a Coriolis electrode which is connected to the Coriolis element, and a corresponding counterelectrode. Both the Coriolis electrode and the counterelectrode may be excited to a vibration along the third direction.

Abstract translation: 提出了具有具有主平面延伸的基板和科里奥利元件的偏航率传感器。 科里奥利元件可以沿垂直于主延伸平面的第三方向振动。 可以使用检测装置检测Coriolis元件沿着与主延伸平面平行的第一方向的科里奥利偏转。 检测装置包括连接到科里奥利元件的科里奥利电极和相应的反电极。 科里奥利电极和对电极都可以沿着第三个方向激发振动。

公开(公告)号：US07667282B2

公开(公告)日：2010-02-23

申请号：US11187346

申请日：2005-07-21

Applicant: Joerg Muchow ,  Torsten Ohms ,  Volkmar Senz ,  Guenther-Nino-Carlo Ullrich ,  Ronald Gampp

Inventor： Joerg Muchow ,  Torsten Ohms ,  Volkmar Senz ,  Guenther-Nino-Carlo Ullrich ,  Ronald Gampp

IPC: H01L29/78

CPC classification number: B81B3/0072 ,  B81B2203/0127

Abstract: A method and a micromechanical component which counteract manufacturing-process-related mechanical stresses in the membrane are provided. The membrane is formed on a substrate in a layer system and spans a cavity in the substrate. The layer system includes at least one base layer formed on the substrate for circuit elements. At least one structured masking layer is also formed on the base layer for defining the circuit elements. The masking layer is structured in the area of the membrane in such a way that mechanical stresses acting in the area of the membrane under vacuum are at least partially compensated, the intrinsic stress of the masking layer being taken into account in the layout of the structuring.

Abstract translation: 提供了一种抵抗膜中与制造过程相关的机械应力的方法和微机械部件。 膜在层系统中的基底上形成并跨越衬底中的空腔。 层系统包括在用于电路元件的基板上形成的至少一个基底层。 至少一个结构化掩模层也形成在基底层上以限定电路元件。 屏蔽层被构造在膜的区域中，使得在真空下作用在膜的区域中的机械应力被至少部分地补偿，掩蔽层的固有应力在结构化的布局中被考虑 。

公开(公告)号：US09164123B2

公开(公告)日：2015-10-20

申请号：US13453425

申请日：2012-04-23

Applicant: Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

Inventor： Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC: G01P15/00 ,  G01P15/097

CPC classification number: G01P15/097

Abstract: The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.

Abstract translation: 本公开涉及一种微机械式旋转加速度传感器，其包括具有至少一个锚定装置和至少两个飞轮块的基板。 至少一个飞轮质量通过联接元件连接到至少一个锚定装置。 所述至少一个锚定装置被设计成使得所述至少两个飞轮块可以围绕至少一个旋转轴线从相应的静止位置弹性偏转。 至少两个飞轮质量被设计成使得它们具有不同的固有频率。

公开(公告)号：US08915137B2

公开(公告)日：2014-12-23

申请号：US12897367

申请日：2010-10-04

Applicant: Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01P3/44 ,  G01C19/574 ,  G01C19/5755

CPC classification number: G01C19/5755 ,  G01C19/574

Abstract: A yaw rate sensor having a substrate which has a main plane of extension, and a Coriolis element is proposed. The Coriolis element is excitable to a vibration along a third direction which is perpendicular to the main plane of extension. A Coriolis deflection of the Coriolis element along a first direction which is parallel to the main plane of extension may be detected using a detection arrangement. The detection arrangement includes a Coriolis electrode which is connected to the Coriolis element, and a corresponding counterelectrode. Both the Coriolis electrode and the counterelectrode may be excited to a vibration along the third direction.

Abstract translation: 提出了具有具有主平面延伸的基板和科里奥利元件的偏航率传感器。 科里奥利元件可以沿垂直于主延伸平面的第三方向振动。 可以使用检测装置检测Coriolis元件沿着与主延伸平面平行的第一方向的科里奥利偏转。 检测装置包括连接到科里奥利元件的科里奥利电极和相应的反电极。 科里奥利电极和对电极都可以沿着第三个方向激发振动。

公开(公告)号：US20120247206A1

公开(公告)日：2012-10-04

申请号：US13365740

申请日：2012-02-03

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Robert Sattler

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Robert Sattler

IPC: G01C19/00

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.

Abstract translation: 提出了一种摆动速率传感器和用于操作具有第一科里奥利元件和第二科里奥利元件的偏航率传感器的方法，所述偏航速率传感器具有具有主平面延伸的基板，偏航速率传感器具有 用于与第二轴平行地驱动第一科里奥利元件的第一驱动元件，所述偏航速率传感器具有用于平行于所述第二轴驱动所述第二科里奥利元件的第二驱动元件，所述偏航率传感器具有用于检测偏转的检测装置 的第一科里奥利元件和由于科里奥利力而与第一轴平行的第二科里奥利元件，第二轴线垂直于第一轴线定位，第一和第二轴线平行于主平面延伸， 所述第一和第二驱动元件经由驱动联接元件彼此机械耦合。

公开(公告)号：US20110296913A1

公开(公告)日：2011-12-08

申请号：US13134024

申请日：2011-05-25

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

IPC: G01C19/56

CPC classification number: G01C19/5755

Abstract: A yaw rate sensor includes: at least one Coriolis element; a drive device connected to the Coriolis element and configured to drive a vibration of the Coriolis element; a detection device having at least one rotor; and a coupling device connected to the detection device and to the Coriolis element. The coupling device is configured to couple a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration, so that when the Coriolis element is deflected a torque for driving the at least one rotor is transmitted from the Coriolis element to the at least one rotor.

Abstract translation: 横摆率传感器包括：至少一个科里奥利元件; 连接到科里奥利元件并被配置为驱动科里奥利元件的振动的驱动装置; 具有至少一个转子的检测装置; 以及连接到检测装置和科里奥利元件的耦合装置。 联接装置被配置成将Coriolis元件的振动平面中的偏转与垂直于振动的方向耦合到检测装置，使得当科里奥利元件偏转时，用于驱动至少一个转子的转矩从 科里奥利元件至少一个转子。