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公开(公告)号:US20240234559A1
公开(公告)日:2024-07-11
申请号:US18614735
申请日:2024-03-24
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Sheng-Yuan Hsueh , Chien-Liang Wu , Kuo-Yu Liao
IPC: H01L29/778 , H01L27/06 , H01L29/06 , H01L29/20 , H01L29/66
CPC classification number: H01L29/778 , H01L27/0629 , H01L29/0649 , H01L29/2003 , H01L29/66462
Abstract: A method for fabricating a semiconductor device includes the steps of first providing a substrate having a high electron mobility transistor (HEMT) region and a capacitor region, forming a buffer layer on the substrate, forming a mesa isolation on the HEMT region, forming a HEMT on the mesa isolation, and then forming a capacitor on the capacitor region. Preferably, a bottom electrode of the capacitor contacts the buffer layer directly.
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公开(公告)号:US11973133B2
公开(公告)日:2024-04-30
申请号:US18144822
申请日:2023-05-08
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Sheng-Yuan Hsueh , Chien-Liang Wu , Kuo-Yu Liao
IPC: H01L29/778 , H01L27/06 , H01L29/06 , H01L29/20 , H01L29/66
CPC classification number: H01L29/778 , H01L27/0629 , H01L29/0649 , H01L29/2003 , H01L29/66462
Abstract: A method for fabricating a semiconductor device includes the steps of providing a substrate having a high electron mobility transistor (HEMT) region and a capacitor region, forming a first mesa isolation on the HEMT region and a second mesa isolation on the capacitor region, forming a HEMT on the first mesa isolation, and then forming a capacitor on the second mesa isolation.
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公开(公告)号:US20240130140A1
公开(公告)日:2024-04-18
申请号:US18395762
申请日:2023-12-26
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Ting-Hsiang Huang , Yi-Chung Sheng , Sheng-Yuan Hsueh , Kuo-Hsing Lee , Chih-Kai Kang
Abstract: A semiconductor device includes a substrate having a magnetic tunneling junction (MTJ) region and a logic region, a magnetic tunneling junction (MTJ) on the MTJ region and a first metal interconnection on the MTJ. Preferably, a top view of the MTJ includes a circle and a top view of the first metal interconnection includes an ellipse overlapping the circle.
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公开(公告)号:US20240074329A1
公开(公告)日:2024-02-29
申请号:US18505074
申请日:2023-11-08
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Chun-Hsien Lin , Sheng-Yuan Hsueh
Abstract: The present invention provides a semiconductor device and a method of forming the same, and the semiconductor device includes a substrate, a first interconnect layer and a second interconnect layer. The first interconnect layer is disposed on the substrate, and the first interconnect layer includes a first dielectric layer around a plurality of first magnetic tunneling junction (MTJ) structures. The second interconnect layer is disposed on the first interconnect layer, and the second interconnect layer includes a second dielectric layer around a plurality of second MTJ structures, wherein, the second MTJ structures and the first MTJ structures are alternately arranged along a direction. The semiconductor device may obtain a reduced size of each bit cell under a permissible process window, so as to improve the integration of components.
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公开(公告)号:US20230378166A1
公开(公告)日:2023-11-23
申请号:US17844088
申请日:2022-06-20
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Chun-Hsien Lin , Yung-Chen Chiu , Sheng-Yuan Hsueh , Chi-Horn Pai
CPC classification number: H01L27/0629 , H01L28/20 , H01L29/7851 , H01L29/66795
Abstract: A method for fabricating a semiconductor device includes the steps of first providing a substrate having a resistor region, forming a first gate structure on the resistor region, forming a first interlayer dielectric (ILD) layer around the first gate structure, transforming the first gate structure into a first metal gate having a gate electrode on the substrate and a hard mask on the gate electrode, and then forming a resistor on the first metal gate.
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公开(公告)号:US20220336479A1
公开(公告)日:2022-10-20
申请号:US17323863
申请日:2021-05-18
Applicant: United Microelectronics Corp.
Inventor: Kuo-Hsing Lee , Chi-Horn Pai , Chang Chien Wong , Sheng-Yuan Hsueh , Ching Hsiang Tseng , Shih-Chieh Hsu
IPC: H01L27/112
Abstract: A one-time programmable memory structure including a substrate, a transistor, a capacitor, and an interconnect structure is provided. The transistor is located on the substrate. The capacitor includes a first electrode, a second electrode, and an insulating layer. The first electrode is disposed above the substrate. The second electrode is disposed on the first electrode. The first electrode is located between the second electrode and the substrate. The insulating layer is disposed between the first electrode and the second electrode. The interconnect structure is electrically connected between the transistor and the first electrode of the capacitor. The interconnect structure is electrically connected to the first electrode at a top surface of the first electrode.
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公开(公告)号:US11296214B2
公开(公告)日:2022-04-05
申请号:US16525513
申请日:2019-07-29
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Yi-Chung Sheng , Sheng-Yuan Hsueh , Chih-Kai Kang , Guan-Kai Huang , Chien-Liang Wu
IPC: H01L29/778 , H01L29/66
Abstract: A high electron mobility transistor (HEMT) includes a carrier transit layer, a carrier supply layer, a main gate, a control gate, a source electrode and a drain electrode. The carrier transit layer is on a substrate. The carrier supply layer is on the carrier transit layer. The main gate and the control gate are on the carrier supply layer. The source electrode and the drain electrode are at two opposite sides of the main gate and the control gate, wherein the source electrode is electrically connected to the control gate by a metal interconnect. The present invention also provides a method of forming a high electron mobility transistor (HEMT).
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公开(公告)号:US10985211B1
公开(公告)日:2021-04-20
申请号:US16699758
申请日:2019-12-02
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Sheng-Yuan Hsueh , Ting-Hsiang Huang
IPC: H01L27/22 , H01L43/12 , H01L23/538 , H01L29/417
Abstract: An embedded MRAM structure includes a substrate divided into a memory cell region and a logic device region. An active area is disposed in the memory cell region. A word line is disposed on the substrate and crosses the active area. A source plug is disposed in the active area and at one side of the word line. A drain plug is disposed in the in the active area and at another side of the word line. When viewing from a direction perpendicular to the top surface of the substrate and taking the word line as a symmetric axis, the source plug is a mirror image of the drain plug.
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公开(公告)号:US20210020769A1
公开(公告)日:2021-01-21
申请号:US16525513
申请日:2019-07-29
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Yi-Chung Sheng , Sheng-Yuan Hsueh , Chih-Kai Kang , Guan-Kai Huang , Chien-Liang Wu
IPC: H01L29/778 , H01L29/66
Abstract: A high electron mobility transistor (HEMT) includes a carrier transit layer, a carrier supply layer, a main gate, a control gate, a source electrode and a drain electrode. The carrier transit layer is on a substrate. The carrier supply layer is on the carrier transit layer. The main gate and the control gate are on the carrier supply layer. The source electrode and the drain electrode are at two opposite sides of the main gate and the control gate, wherein the source electrode is electrically connected to the control gate by a metal interconnect. The present invention also provides a method of forming a high electron mobility transistor (HEMT).
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公开(公告)号:US10777508B2
公开(公告)日:2020-09-15
申请号:US15347757
申请日:2016-11-09
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chih-Kai Kang , Sheng-Yuan Hsueh , Yi-Chung Sheng , Kuo-Yu Liao , Shu-Hung Yu , Hung-Hsu Lin , Hsiang-Hung Peng
IPC: H01L23/544 , H01L27/092 , H01L27/02 , G03F9/00 , H01L21/8238
Abstract: A semiconductor device includes a substrate including a plurality of chip areas and a scribe line defined thereon, and a mark pattern disposed in the scribe line. The mark pattern includes a plurality of unit cells immediately adjacent to each other, and each unit cell includes a first active region, a second active region isolated from the first active region, a plurality of first gate structures extending along a first direction and arranged along a second direction perpendicular to the first direction, and a plurality of first conductive structures. The first gate structures straddle the first active region and the second active region. The first conductive structures are disposed on the first active region, the second active region, and two opposite sides of the first gate structures.
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