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公开(公告)号:US20230413698A1
公开(公告)日:2023-12-21
申请号:US17876560
申请日:2022-07-29
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Jen Wang , Chun-Hung Cheng , Chuan-Fu Wang
CPC classification number: H01L45/146 , H01L45/1253 , H01L45/1675 , H01L45/1683 , H01L45/1608 , H01L27/2463
Abstract: A resistive random access memory structure includes a first inter-layer dielectric layer; a bottom electrode disposed in the first inter-layer dielectric layer; a capping layer disposed on the bottom electrode and on the first inter-layer dielectric layer; and a through hole disposed in the capping layer. The through hole partially exposes a top surface of the bottom electrode. A variable resistance layer is disposed within the through hole. A top electrode is disposed within the through hole and on the variable resistance layer. A second inter-layer dielectric layer covers the top electrode and the capping layer.
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公开(公告)号:US20220399495A1
公开(公告)日:2022-12-15
申请号:US17378795
申请日:2021-07-19
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Jen Wang , Chun-Hung Cheng , Chuan-Fu Wang
IPC: H01L45/00
Abstract: A RRAM device includes a bottom electrode, a resistive material layer, a high work function layer, a top electrode, a hard mask and high work function sidewall parts. The bottom electrode, the resistive material layer, the high work function layer, the top electrode and the hard mask are sequentially stacked on a substrate. The high work function sidewall parts cover sidewalls of the top electrode and sidewalls of the hard mask, thereby constituting a RRAM cell. A method of forming said RRAM device is also provided.
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公开(公告)号:US11233196B2
公开(公告)日:2022-01-25
申请号:US16687297
申请日:2019-11-18
Applicant: United Microelectronics Corp.
Inventor: Wen-Jen Wang , Chun-Hung Cheng , Chuan-Fu Wang
IPC: H01L45/00
Abstract: A memory device structure includes a substrate, a memory stacked structure, and a spacer. The memory stacked structure is formed on the substrate by stacking a first electrode layer, a memory material layer, and a second electrode layer. The memory material layer has a tilted sidewall, or the memory material layer and the first electrode layer have a tilted sidewall. The tilted sidewall is indented with respect to a sidewall of the second electrode layer. The spacer is disposed on the tilted sidewall.
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公开(公告)号:US20210217813A1
公开(公告)日:2021-07-15
申请号:US16794194
申请日:2020-02-18
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Jen Wang , Chun-Hung Cheng , Chuan-Fu Wang
Abstract: An RRAM structure includes a substrate. The substrate is divided into a memory cell region and a logic device region. A metal plug is disposed within the memory cell region. An RRAM is disposed on and contacts the metal plug. The RRAM includes a top electrode, a variable resistive layer, and a bottom electrode. The variable resistive layer is disposed between the top electrode and the bottom electrode. The variable resistive layer includes a first bottom surface. The bottom electrode includes a first top surface. The first bottom surface and the first top surface are coplanar. The first bottom surface only overlaps and contacts part of the first top surface.
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公开(公告)号:US20200185399A1
公开(公告)日:2020-06-11
申请号:US16792847
申请日:2020-02-17
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Jen Wang , Chun-Hung Cheng , Chuan-Fu Wang
IPC: H01L27/11568 , H01L21/28 , H01L29/792
Abstract: A method for fabricating a semiconductor memory device is disclosed. A substrate having a main surface is provided. A memory gate is formed on the main surface of the substrate. The memory has a first sidewall and a second sidewall opposite to the first sidewall. A control gate is formed in proximity to the memory gate. The control gate has a third sidewall directly facing the second sidewall, and a fourth sidewall opposite to the third sidewall. A gap is formed between the second sidewall of the memory gate and the third sidewall of the control gate. A first single spacer structure is formed on the first sidewall of the memory gate and a second single spacer structure on the fourth sidewall of the control gate. A gap-filling layer is formed to fill up the gap.
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公开(公告)号:US20250017121A1
公开(公告)日:2025-01-09
申请号:US18449716
申请日:2023-08-15
Applicant: United Microelectronics Corp.
Inventor: Wen-Jen Wang , Yu-Huan Yeh , Chuan-Fu Wang
Abstract: A resistive memory structure including a substrate, a dielectric layer, a conductive plug, a resistive memory device, a spacer, and a protective layer is provided. The dielectric layer is located on the substrate. The conductive plug is located in the dielectric layer. The conductive plug has a protrusion portion located outside the dielectric layer. The resistive memory device is located on the conductive plug. The resistive memory device includes a first electrode, a variable resistance layer, and a second electrode. The first electrode is located on the conductive plug. The variable resistance layer is located on the first electrode. The second electrode is located on the variable resistance layer. The spacer is located on a sidewall of the resistive memory device. The protective layer is located on a sidewall of the protrusion portion and between the first electrode and the dielectric layer.
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公开(公告)号:US20240407274A1
公开(公告)日:2024-12-05
申请号:US18219717
申请日:2023-07-10
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Jen Wang , Yu-Huan Yeh , Chuan-Fu Wang
Abstract: A resistive switching device includes a substrate; a first dielectric layer on the substrate; a conductive via in the first dielectric layer; a bottom electrode on the conductive via and the first dielectric layer, a resistive switching layer on the bottom electrode; and a cone-shaped top electrode on the resistive switching layer. The cone-shaped top electrode can produce increased and concentrated electric field during operation, which facilitates the filament forming process.
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公开(公告)号:US20240407273A1
公开(公告)日:2024-12-05
申请号:US18218602
申请日:2023-07-06
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Jen Wang , Hsiang-Hung Peng , Yu-Huan Yeh , Chuan-Fu Wang
Abstract: A resistive memory device includes a first dielectric layer, a via connection structure, and a resistive switching element. The via connection structure is disposed in the first dielectric layer, and the resistive switching element is disposed on the via connection structure and the first dielectric layer. The resistive switching element includes a titanium bottom electrode, a titanium top electrode, and a variable resistance material. The titanium top electrode is disposed above the titanium bottom electrode, and the variable resistance material is sandwiched between the titanium bottom electrode and the titanium top electrode in a vertical direction. The variable resistance material is directly connected with the titanium bottom electrode and the titanium top electrode, and the titanium bottom electrode is directly connected with the via connection structure.
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公开(公告)号:US20240334850A1
公开(公告)日:2024-10-03
申请号:US18741808
申请日:2024-06-13
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Jen Wang , Chun-Hung Cheng , Chuan-Fu Wang
CPC classification number: H10N70/8833 , H10B63/00 , H10N70/023 , H10N70/063 , H10N70/841
Abstract: A resistive random access memory (RRAM) structure includes a RRAM cell, spacers and a dielectric layer. The RRAM cell is disposed on a substrate. The spacers are disposed beside the RRAM cell, wherein widths of top surfaces of the spacers are larger than or equal to widths of bottom surfaces of the spacers. The dielectric layer blanketly covers the substrate and sandwiches the RRAM cell, wherein the spacers are located in the dielectric layer. A method for forming the resistive random access memory (RRAM) structure is also provided.
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公开(公告)号:US20240107902A1
公开(公告)日:2024-03-28
申请号:US17970560
申请日:2022-10-20
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wen-Jen Wang , Yu-Huan Yeh , Chuan-Fu Wang
CPC classification number: H01L45/1253 , H01L23/481 , H01L27/24 , H01L45/1666
Abstract: A resistive memory device includes a dielectric layer, a via connection structure, a stacked structure, and an insulating structure. The via connection structure is disposed in the dielectric layer. The stacked structure is disposed on the via connection structure and the dielectric layer. The insulating structure penetrates through the stacked structure in a vertical direction and divides the stacked structure into a first memory cell unit and a second memory cell unit. The first memory cell unit includes a first bottom electrode, and the second memory cell unit includes a second bottom electrode separated from the first bottom electrode by the insulating structure. The via connection structure is electrically connected with the first bottom electrode and the second bottom electrode.
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