MEMS device with nanowire standoff layer
    26.
    发明授权
    MEMS device with nanowire standoff layer 有权
    具有纳米线隔离层的MEMS器件

    公开(公告)号:US07477441B1

    公开(公告)日:2009-01-13

    申请号:US11881076

    申请日:2007-07-24

    IPC分类号: G02B26/00 G02B26/08

    摘要: A microelectromechanical systems (MEMS) device and related methods are described. The MEMS device comprises a first member having a first surface and a second member having a second surface, the first and second surfaces being separated by a gap that is closable by a MEMS actuation force applied to at least one of the first and second members. A standoff layer is disposed on the first surface of the first member, the standoff layer providing standoff between the first and second surfaces upon a closing of the gap by the MEMS actuation force. The standoff layer comprises a plurality of nanowires that are anchored to the first surface of the first member and that extend outward therefrom.

    摘要翻译: 描述了微机电系统(MEMS)装置及相关方法。 MEMS装置包括具有第一表面的第一构件和具有第二表面的第二构件,第一和第二表面被可由施加到第一和第二构件中的至少一个的MEMS致动力封闭的间隙分开。 隔离层设置在第一构件的第一表面上,间隔层通过MEMS致动力在间隙闭合时在第一和第二表面之间提供间隔。 隔离层包括锚定到第一构件的第一表面并从其向外延伸的多个纳米线。