公开(公告)号：US08605445B2

公开(公告)日：2013-12-10

申请号：US12679487

申请日：2008-10-09

申请人： Xavier Baillin

发明人： Xavier Baillin

IPC分类号： H05K7/00

CPC分类号： B81B7/0038 ,  H01L23/10 ,  H01L23/26 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/00

摘要： The structure comprises at least a device, for example a microelectronic chip, and at least a getter arranged in a cavity under a controlled atmosphere delineated by a substrate and a sealing cover. The getter comprises at least one preferably metallic getter layer, and an adjustment sub-layer made from pure metal, situated between the getter layer and the substrate, on which it is formed. The adjustment sub-layer is designed to modulate the activation temperature of the getter layer. The getter layer comprises two elementary getter layers.

摘要翻译： 该结构至少包括一个装置，例如微电子芯片，以及至少一个排气孔，该吸气剂被布置在由基板和密封盖所描绘的受控气氛下的空腔中。 吸气剂包括至少一个优选金属吸气剂层和由纯金属制成的调节子层，位于吸气剂层和衬底之间，其上形成有吸收剂层。 调整子层设计为调节吸气剂层的活化温度。 吸气剂层包括两个基本吸气剂层。

公开(公告)号：US08414963B2

公开(公告)日：2013-04-09

申请号：US12729634

申请日：2010-03-23

申请人： Xavier Baillin

发明人： Xavier Baillin

IPC分类号： B05D5/12

CPC分类号： B81B7/0038 ,  H01L23/10 ,  H01L23/26 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/00

摘要： The structure comprises at least a device, for example a microelectronic chip, and at least a getter arranged in a cavity under a controlled atmosphere delineated by a substrate and a sealing cover. The getter comprises at least one preferably metallic getter layer, and an adjustment sub-layer made from pure metal, situated between the getter layer and the substrate, on which it is formed. The adjustment sub-layer is designed to modulate the activation temperature of the getter layer. The getter layer comprises two elementary getter layers.

公开(公告)号：US08399299B2

公开(公告)日：2013-03-19

申请号：US12899077

申请日：2010-10-06

申请人： Xavier Baillin

发明人： Xavier Baillin

IPC分类号： H01L21/44

CPC分类号： B81B7/0038 ,  B81C2203/019 ,  G01J5/045 ,  H01L23/10 ,  H01L23/26 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method for making a structure including at least the steps of: making at least one first portion of at least one getter material against a first substrate or a second substrate, making at least one second portion of at least one getter material against the second substrate when the first portion of getter material is placed against the first substrate, or against the first substrate when the first portion of getter material is placed against the second substrate, and attaching the second substrate to the first substrate by thermocompression of a first part of the first portion of getter material against at least one part of the second portion of getter material, forming at least one cavity delimited by the first substrate and the second substrate, a second part of the first portion of getter material being placed in the cavity.

摘要翻译： 一种用于制造结构的方法，至少包括以下步骤：将至少一种吸气剂材料的至少一个第一部分制成在第一衬底或第二衬底上，使至少一个吸气剂材料的第二部分抵靠第二衬底 当吸气剂材料的第一部分靠着第一衬底放置时，或者当第一部分吸气材料被放置在第二衬底上时，或者抵靠第一衬底，并且通过热压第一衬底的第一部分，将第二衬底附接到第一衬底 吸气材料的第一部分抵靠第二部分吸气材料的至少一部分，形成由第一衬底和第二衬底界定的至少一个空腔，吸气材料的第一部分的第二部分放置在空腔中。

公开(公告)号：US20090094816A1

公开(公告)日：2009-04-16

申请号：US12285623

申请日：2008-10-09

申请人： Xavier Baillin ,  Jean Brun ,  Thierry Enot ,  David Henry

发明人： Xavier Baillin ,  Jean Brun ,  Thierry Enot ,  David Henry

IPC分类号： B23P17/00

CPC分类号： B81C1/00269 ,  B81B2203/0315 ,  B81C2203/0118 ,  B81C2203/019 ,  H01L23/10 ,  H01L2924/0002 ,  Y10T29/49002 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49146 ,  Y10T29/49171 ,  Y10T29/49181 ,  Y10T29/49218 ,  H01L2924/00

摘要： The structure comprises facing substrates bonded to one another by crushing a closed peripheral sealing strip delineating a closed cavity in which a microsystem is disposed between the substrates. Before crushing, the sealing strip comprises perforated patterns delineating a plurality of voids inside the strip.

摘要翻译： 该结构包括通过粉碎描绘其中微系统设置在基板之间的封闭空腔的封闭的外围密封条彼此接合的面对的基板。 在破碎之前，密封条包括描绘条带内的多个空隙的穿孔图案。