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    Micro electro mechanical systems device
    21.
    发明授权
    Micro electro mechanical systems device 失效
    微机电系统装置

    公开(公告)号：US07675671B2

    公开(公告)日：2010-03-09

    申请号：US12215401

    申请日：2008-06-27

    Applicant: Yasuhiro Ohmori

    Inventor： Yasuhiro Ohmori

    IPC: G02B26/00 ,  G02B26/12

    CPC classification number: G02B26/0841 ,  B81B3/0086 ,  B81B2201/045 ,  B81B2203/019 ,  B81B2203/0384 ,  H02N1/002

    Abstract: An aspect of the embodiment, a MEMS device includes a rotating unit, a first hinge, a first frame and an actuator. The actuator has a plurality of electrodes for rotating the rotating unit. The first frame has one of the electrodes. A portion of silicon layer by the electrode of the frame is chamfered.

    Abstract translation: 在该实施例的一个方面，MEMS器件包括旋转单元，第一铰链，第一框架和致动器。 致动器具有用于旋转旋转单元的多个电极。 第一框架具有一个电极。 通过框架的电极的一部分硅层被倒角。

    Waveguide-type optical device
    23.
    发明申请
    Waveguide-type optical device 失效
    波导型光学器件

    公开(公告)号：US20070286545A1

    公开(公告)日：2007-12-13

    申请号：US11712451

    申请日：2007-03-01

    Applicant: Yasuhiro Ohmori

    Inventor： Yasuhiro Ohmori

    IPC: G02F1/035

    CPC classification number: G02F1/0356 ,  G02F1/2255

    Abstract: In the present invention, for example with regards to a Mach-Zehnder type LN modulator which uses a Z-cut LN substrate, by providing a step by forming an etching part on the surface of the LN substrate, and forming an optical waveguide so as to position a pair of branching waveguides of a Mach-Zehnder interferometer in the step portion, a height difference is produced between the branching waveguides, in the perpendicular direction to the substrate surface. As a result, lines of electric force directed from a signal electrode provided above one branching waveguide towards a ground electrode provided above an other branching waveguide are hardly dispersed, and a desired electro-optic effect can be obtained at a lower drive voltage.

    Abstract translation: 在本发明中，例如关于使用Z切LN基板的马赫 - 曾德尔型LN调制器，通过在LN基板的表面上形成蚀刻部分，并形成光波导以提供步骤 在步进部分中定位马赫 - 曾德干涉仪的一对分支波导，在分支波导之间产生与基板表面垂直的方向上的高度差。 结果，从设置在一个分支波导上方的信号电极引导的电力线几乎不分散在另一个分支波导上方的接地电极，并且可以在较低的驱动电压下获得期望的电光效应。

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