Enhanced Bonding Layers on Native Oxide Surfaces
    21.
    发明申请
    Enhanced Bonding Layers on Native Oxide Surfaces 有权
    天然氧化物表面上增强的粘结层

    公开(公告)号:US20080166470A1

    公开(公告)日:2008-07-10

    申请号:US11855847

    申请日:2007-09-14

    IPC分类号: A61L27/06

    摘要: Process for forming a coated article by (a) depositing a layer of an omega functionalized organophosphorous compound on an oxide substrate; (b) heating the substrate of step (a) to a temperature sufficient to bond the omega functionalized organophosphorous compound to the oxide substrate; (c) depositing a separate layer onto the layer produced by step (b); and (d) bonding the layers produced by steps (b) and (c) through the omega functional group.

    摘要翻译: 通过(a)在氧化物基底上沉积Ω官能化的有机磷化合物层来形成涂覆制品的方法; (b)将步骤(a)的基底加热到足以将ω官能化的有机磷化合物键合到氧化物基底上的温度; (c)在由步骤(b)制备的层上沉积单独的层; 和(d)通过步骤(b)和(c)产生的层通过ω官能团键合。

    Distance metric for accurate lithographic hotspot classification using radial and angular functions
    22.
    发明授权
    Distance metric for accurate lithographic hotspot classification using radial and angular functions 有权
    使用径向和角度函数的精确光刻热点分类的距离度量

    公开(公告)号:US08490030B1

    公开(公告)日:2013-07-16

    申请号:US13487047

    申请日:2012-06-01

    IPC分类号: G06F17/50

    CPC分类号: G06F17/50 G06F17/5081

    摘要: An dual function distance metric for pattern matching based hotspot clustering is described. The dual function distance metric can handle patterns containing multiple polygons, is easy to compute, and is tolerant of small variations or shifts of the shapes. Compared with an XOR distance metric pattern clustering, the dual function distance metric can achieve up to 37.5% accuracy improvement with 2X-4X computational cost in the context of cluster analysis. The dual function distance metric is reliable and accurate for characterizing clips (e.g. hotspots), thereby making it desirable for industry applications.

    摘要翻译: 描述了基于模式匹配的热点聚类的双功能距离度量。 双功能距离度量可以处理包含多个多边形的图案,易于计算,并且容忍形状的小变化或偏移。 与XOR距离度量模式聚类相比,双重功能距离度量可以在聚类分析的上下文中使用2X-4X计算成本实现高达37.5%的精度提高。 双功能距离度量对于表征剪辑(例如热点)是可靠和准确的,从而使其对于工业应用是理想的。