公开(公告)号：US20230129289A1

公开(公告)日：2023-04-27

申请号：US18145164

申请日：2022-12-22

Applicant: Brooks Automation US, LLC

Inventor： Daniel BABBS ,  Robert Chris May ,  Robert T. Caveney

IPC: H01L21/677 ,  B25J9/00

Abstract: A vacuum substrate transport apparatus including a frame, a drive section having a drive axis, at least one arm, having an end effector for holding a substrate, having at least one degree of freedom axis effecting extension and retraction, and a bearing defining a guideway that defines the axis, the bearing including at least one rolling load bearing element disposed in a bearing case, interfacing between a bearing raceway and bearing rail to support arm loads, and effecting sliding of the case along the rail, and at least one rolling, substantially non-load bearing, spacer element disposed in the case, intervening between each of the load bearing elements, wherein the spacer element is a sacrificial buffer material compatible with sustained substantially unrestricted service commensurate with a predetermined service duty of the apparatus in a vacuum environment at temperatures over 260° C. for a specified predetermined service period.

公开(公告)号：US20230065160A1

公开(公告)日：2023-03-02

申请号：US18047170

申请日：2022-10-17

Applicant: BROOKS AUTOMATION US, LLC

Inventor： Robert CAVENEY

IPC: B25J9/12 ,  B25J18/04 ,  H01L21/677 ,  B25J11/00

Abstract: A sealed actuator including stacked motor modules. Each motor module has a motor module housing, a motor stator attached to a respective motor module housing, a motor rotor in communication with a respective motor stator, and a stator seal disposed between the motor stator and motor rotor, surrounding the motor rotor and having a sealing surface interface, that interfaces with a respective sealing housing surface of the motor module housing, facing the motor rotor to seal the motor stator from the motor rotor. The motor module housings are stacked against each other and the sealing housing surface interfaced, at the sealing surface interface facing the rotors, to the respective stacked stator seals of the motor module housings forms a substantially continuous seal interface of the stacked motor modules sealed by the stacked stator seals to form a continuous barrier seal between the motor rotors and the motor stators.

公开(公告)号：US20230021180A1

公开(公告)日：2023-01-19

申请号：US17664752

申请日：2022-05-24

Applicant: BROOKS AUTOMATION US, LLC

Inventor： Aaron GAWLIK ,  Jairo T. MOURA

IPC: B25J9/16 ,  G05B23/02 ,  G07C3/08

Abstract: A method for health assessment of a system including a transport apparatus including registering predetermined operating data embodying at least one dynamic performance variable output by the transport apparatus, determining a base value (CpkBase) characterized by a probability density function of each of the dynamic performance variable output, resolving from the transport apparatus in situ process motion commands of the apparatus controller and defining another predetermined motion set of the transport apparatus, registering predetermined operating data embodying the at least one dynamic performance variable output by the transport apparatus and determining with the processor another value (CpkOther) characterized by the probability density function of each of the dynamic performance variable output by the transport apparatus, and comparing the other value and the base value (CpkBase) for each of the dynamic performance variable output by the transport apparatus respectively corresponding to the predetermined motion base set and the other predetermined motion set.

公开(公告)号：US20220385142A1

公开(公告)日：2022-12-01

申请号：US17816876

申请日：2022-08-02

Applicant: Brooks Automation US, LLC

Inventor： Jairo T. MOURA ,  Reza SAEIDPOURAZAR ,  Branden Gunn ,  Matthew W. Coady ,  Ulysses Gilchrist

IPC: H02K11/215 ,  H01L21/67 ,  H01L21/677 ,  H02K1/14 ,  H02K1/24 ,  H02K5/128 ,  H01L21/687

Abstract: A transport apparatus comprising a housing, a variable reluctance drive mounted to the housing, and at least one transport arm connected to the variable reluctance drive where the drive includes at least one rotor having salient poles of magnetic permeable material and disposed in an isolated environment, at least one stator having salient pole structures each defining a salient pole with corresponding coil units coiled around the respective salient pole structure and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, at least one seal partition configured to isolate the isolated environment; and at least one sensor including a magnetic sensor member connected to the housing, at least one sensor track connected to the at least one rotor, where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment.

公开(公告)号：US20220336247A1

公开(公告)日：2022-10-20

申请号：US17658060

申请日：2022-04-05

Applicant: BROOKS AUTOMATION US, LLC

Inventor： Caspar Hansen

IPC: H01L21/68 ,  B25J9/16 ,  H01L21/687

Abstract: A semiconductor wafer transport apparatus having a transport arm and at least one end effector. An optical edge detection sensor is coupled to the transport arm and is configured so as to register and effect edge detection of a wafer supported by the end effector. An illumination source illuminates a surface of the wafer and is disposed with respect to the optical edge detection sensor so that the surface directs reflected surface illumination, from the illumination source, toward the optical edge detection sensor, and optically blanks, at the peripheral edge of the wafer, background reflection light of a background, viewed by the optical edge detection sensor coincident with linear traverse of the wafer supported by the at least one end effector. The peripheral edge of the wafer is defined in relief in image contrast to effect edge detection coincident with traverse of the wafer supported by the end effector.

公开(公告)号：US20240290642A1

公开(公告)日：2024-08-29

申请号：US18655873

申请日：2024-05-06

Applicant: Brooks Automation US, LLC

Inventor： Radik SUNUGATOV ,  Roy R. WANG ,  Karl SHIEH ,  Justo GRACIANO ,  Austin WISE ,  Casper HANSEN ,  Erick PASTOR

IPC: H01L21/67 ,  G06T7/13 ,  H01L21/673 ,  H01L21/677

CPC classification number: H01L21/67265 ,  G06T7/13 ,  H01L21/6732 ,  H01L21/67778

Abstract: A semiconductor wafer mapping apparatus comprising a frame forming a wafer load opening communicating with a load station for a substrate carrier disposed to hold more than one wafers vertically distributed in the substrate carrier for loading through the wafer load opening, a movable arm movably mounted to the frame so as to move relative to the wafer load opening and having at least one end effector movably mounted to the movable arm to load wafers from the substrate carrier through the wafer load opening, an image acquisition system including an array of cameras arranged on a common support and each camera fixed with respect to the common support that is static with respect to each camera of the array of cameras, wherein each respective camera is positioned with a field of view disposed to view through the wafer load opening with the common support positioned by the movable arm.

公开(公告)号：US12046499B2

公开(公告)日：2024-07-23

申请号：US17167831

申请日：2021-02-04

Applicant: Brooks Automation, Inc.

Inventor： Christopher Bussiere ,  Kevin M. Bourbeau ,  Emilien Joseph Claude Auderbrand ,  Joseph M. Hallisey

IPC: H01L21/67 ,  B65G47/90 ,  B65G49/06 ,  H01L21/677

CPC classification number: H01L21/67742 ,  B65G47/90 ,  B65G49/061 ,  H01L21/67766

Abstract: A substrate transport apparatus comprising a support frame an articulated arm connected to the support frame, having at least one movable arm link and an end effector connected to the movable arm link, with a substrate holding station located thereon. Wherein the movable arm link is a reconfigurable arm link having a modular composite arm link casing, formed of link case modules rigidly coupled to each other, and a pulley system cased in and extending through the rigidly coupled link case modules substantially end to end of the modular composite arm link casing, wherein the rigidly coupled link case modules include link case end modules connected by at least one interchangeable link case extension module having a predetermined characteristic determining a length of the movable arm link, wherein at least one interchangeable link case extension module is selectable for connection to link case end modules forming the reconfigurable arm link.

公开(公告)号：US12002694B2

公开(公告)日：2024-06-04

申请号：US18187345

申请日：2023-03-21

Applicant: Brooks Automation US, LLC

Inventor： Radik Sunugatov ,  Robert Carlson

IPC: H01L21/67 ,  B65G49/06

CPC classification number: H01L21/67201 ,  B65G49/068

Abstract: Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and the substrate processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container for transfer of substrates to and from the at least one substrate cassette container through the transport opening, and selectably variable cassette support purge ports with a variable purge port nozzle outlet, variable between more than one selectable predetermined purge port nozzle characteristics, disposed on the cassette support, each of the more than one purge port nozzle characteristics being configured so that the purge port nozzle outlet with each selected predetermined purge port nozzle characteristic complements and couples to at least one purge port of the at least one substrate cassette container.

公开(公告)号：US11978651B2

公开(公告)日：2024-05-07

申请号：US17654852

申请日：2022-03-15

Applicant: Brooks Automation US, LLC

Inventor： Robert T. Caveney

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/67742 ,  H01L21/67167 ,  H01L21/67748

Abstract: A transport apparatus including a drive section connected to a frame and including a multi-drive shaft spindle, with at least one coaxial shaft spindle, more than one different interchangeable motor module arranged in a stack, each having a motor operably coupled thereto and defining a corresponding independent drive axis, and a can seal disposed between the stator and rotor of each motor module and hermetically sealing the stator and rotor from each other, at least one of the motor modules is selectable for placement in the stack from other different interchangeable motor modules, each having a different predetermined characteristic, independent of placement in the stack, that defines a different predetermined drive characteristic of the corresponding drive axis, independent of shaft spindle location, so that selection of the at least one motor module determines the different predetermined drive characteristic of the corresponding axis different from another of the independent drive axis.

公开(公告)号：US20240112937A1

公开(公告)日：2024-04-04

申请号：US18480297

申请日：2023-10-03

Applicant: BROOKS AUTOMATION US, LLC

Inventor： Bing YIN ,  Jairo MOURA ,  Vincent TSANG ,  Aaron GAWLIK ,  Nathan SPIKER

IPC: H01L21/68 ,  H01L21/687

CPC classification number: H01L21/68 ,  H01L21/68707

Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.