Micro electro mechanical device having an opening between a fixing portion and a torsion bar
    31.
    发明申请
    Micro electro mechanical device having an opening between a fixing portion and a torsion bar 有权
    具有在固定部分和扭杆之间的开口的微机电装置

    公开(公告)号:US20090296181A1

    公开(公告)日:2009-12-03

    申请号:US12382133

    申请日:2009-03-09

    CPC classification number: G02B26/0841 G02B26/101

    Abstract: A micro electro mechanical device includes an inner frame provided with a movable part and an outer frame provided in a circumference of the inner frame. The outer frame has a fixing part fixed by a joining material. A first torsion bar is provided between the outer frame and the inner frame so as to swingablly support the inner frame on the outer frame. A first opening is formed in the outer frame in a vicinity of the first torsion bar. The first opening is positioned between the fixing part of the outer frame and the first torsion bar.

    Abstract translation: 微电子机械装置包括设置有可移动部分的内框架和设置在内框架的圆周中的外框架。 外框具有通过接合材料固定的固定部。 第一扭杆设置在外框架和内框架之间,以可摆动地支撑外框架上的内框架。 第一开口形成在第一扭杆附近的外框架中。 第一开口位于外框架的固定部分和第一扭杆之间。

    Micro oscillating element
    32.
    发明授权
    Micro oscillating element 有权
    微振荡元件

    公开(公告)号:US07453182B2

    公开(公告)日:2008-11-18

    申请号:US11290489

    申请日:2005-12-01

    CPC classification number: G02B26/0841

    Abstract: A micro oscillating element is formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer. This oscillating element includes an oscillation section, an oscillation section supporting frame, and a torsional joining section. The oscillation section includes a movable functional section. The torsional joining section joins the oscillation section and the frame, and also defines an oscillation axis for oscillating action of the oscillation section. The movable functional section is a part formed in the first conductive layer, while the frame is a part formed in the second conductive layer.

    Abstract translation: 从由第一导电层,第二导电层和布置在第一导电层和第二导电层之间的绝缘层构成的材料基板一体地形成微振荡元件。 该振动元件包括振动部,振动部支承框和扭转接合部。 振荡部包括可动功能部。 扭转接合部连接振动部和框架,并且还限定振动部的摆动动作的摆动轴。 可动功能部是形成在第一导电层中的部分,而框架是形成在第二导电层中的部分。

    MICROMIRROR UNIT WITH TORSION CONNECTOR HAVING NONCONSTANT WIDTH
    33.
    发明申请
    MICROMIRROR UNIT WITH TORSION CONNECTOR HAVING NONCONSTANT WIDTH 有权
    具有不连续宽度的扭矩连接器的MICROMIRROR单元

    公开(公告)号:US20080165409A1

    公开(公告)日:2008-07-10

    申请号:US11544726

    申请日:2006-10-10

    CPC classification number: G02B26/085 G02B26/0841 Y10S359/904

    Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

    Abstract translation: 提供了一种微镜单元,其包括框架,形成有镜面的反射镜形成基座以及连接到反射镜形成基座的第一端和连接到框架的第二端的扭转连接器。 扭转连接器限定了旋转轴线,镜子形成基座围绕该轴线相对于框架旋转。 扭转连接器具有在与镜面平行且垂直于旋转轴线的方向上测量的宽度。 第一端扭转连接器的宽度相对较大。 宽度从第一端朝向第二端逐渐变小。

    Method of making microstructure device, and microstructure device made by the same
    34.
    发明申请
    Method of making microstructure device, and microstructure device made by the same 有权
    制造微结构器件的方法及其制造的微结构器件

    公开(公告)号:US20080075924A1

    公开(公告)日:2008-03-27

    申请号:US11902011

    申请日:2007-09-18

    Abstract: A microstructure device is made by processing a material substrate consisting of e.g. a first process layer, a second process layer and a middle layer arranged between the first and the second process layers. The microstructure device includes a first structural part and a second structural part that has a portion facing the first structural part via a gap. The first and the second structural parts are connected to each other by a connecting part extending across the gap. This connecting part is formed in the first process layer to be in contact with the middle layer. The microstructure device also includes a protective part extending from the first structural part toward the second structural part or vice versa. The protective part is formed in the first or second process layer to be in contact with the middle layer.

    Abstract translation: 微结构装置是通过加工由例如玻璃, 布置在第一和第二处理层之间的第一处理层,第二处理层和中间层。 微结构装置包括第一结构部分和第二结构部分,其具有经由间隙面对第一结构部分的部分。 第一和第二结构部件通过跨越间隙延伸的连接部分相互连接。 该连接部形成在第一处理层中以与中间层接触。 微结构装置还包括从第一结构部件朝向第二结构部件延伸的保护部件,反之亦然。 保护部分形成在第一或第二处理层中以与中间层接触。

    Micro-oscillation element
    35.
    发明申请
    Micro-oscillation element 有权
    微振荡元件

    公开(公告)号:US20080054758A1

    公开(公告)日:2008-03-06

    申请号:US11889754

    申请日:2007-08-16

    CPC classification number: H02N1/008

    Abstract: A micro-oscillation element facilitates adjusting the natural frequency relevant to the oscillating motion of the oscillating portion. The micro-oscillation element includes, for example, an oscillating portion, a frame, and a link portion that connects the oscillating portion and the frame. The link portion defines the oscillation axial center of oscillating motion of the oscillating portion with respect to the frame. The oscillating portion includes a main oscillating body, and a weight portion attached to the main oscillating body. The weight portion is movable in a direction intersecting the oscillation axial center.

    Abstract translation: 微振荡元件有助于调节与振荡部分的振荡运动相关的固有频率。 微振荡元件例如包括振荡部分,框架和连接振荡部分和框架的连接部分。 连杆部分限定摆动部分相对于框架的摆动运动的振荡轴向中心。 摆动部分包括主振动体和附接到主振动体的重物部分。 重物部分可在与振动轴心相交的方向上移动。

    Micro-oscillation element and method for driving the same
    37.
    发明申请
    Micro-oscillation element and method for driving the same 有权
    微振荡元件及其驱动方法

    公开(公告)号:US20070063614A1

    公开(公告)日:2007-03-22

    申请号:US11603006

    申请日:2006-11-22

    CPC classification number: H02N1/008

    Abstract: A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.

    Abstract translation: 微振荡元件包括可移动主体部分,第一框架和第二框架,以及第一连接部分,其连接可移动主体部分和第一框架,并且限定第一旋转轴线用于可移动主体的第一旋转操作 相对于第一帧的截面。 元件还包括第二连接部分,其连接第一框架和第二框架并且限定第二旋转轴线用于第一框架和可移动主体部分相对于第二框架的第二旋转操作。 第一驱动机构被提供用于产生用于第一旋转操作的驱动力。 提供第二驱动机构用于产生用于第二旋转操作的驱动力。 第一旋转轴线和第二旋转轴线不正交。

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