BACKSIDE ILLUMINATION IMAGE SENSOR AND MANUFACTURING METHOD

    公开(公告)号:US20220406829A1

    公开(公告)日:2022-12-22

    申请号:US17840437

    申请日:2022-06-14

    Inventor: Maurin DOUIX

    Abstract: An integrated sensor includes a substrate made of a first semiconductor material having a first optical refractive index. The substrate includes a pixel array, wherein each pixel has a photosensitive active zone formed by an index contrast zone including a matrix of the first semiconductor material and a periodic structure embedded in the matrix. The periodic structure extends from the backside of the substrate and has a two-dimensional periodicity in a parallel plane with the backside. A value of the periodicity is linked with the wavelength of the optical signal and with the first refractive index. Elements of the periodic structure are formed of a second optically transparent material having a second refractive index less than the first refractive index. These elements are positioned at locations defined by the periodicity except for at one location defining a region, preferably central, that is devoid of a corresponding one of the elements.

    PHASE CHANGE MEMORY
    32.
    发明申请

    公开(公告)号:US20220384721A1

    公开(公告)日:2022-12-01

    申请号:US17751190

    申请日:2022-05-23

    Abstract: A memory cell is manufactured by: (a) forming a stack comprising a first layer made of a phase change material and a second layer made of a conductive material; (b) forming a mask on the stack covering only the memory cell location; and (c) etching portions of the stack not covered by the first mask. The formation of the mask covering only the memory cell location comprises defining a first mask extending in a row direction for each row of memory cell locations and then patterning the first mask in a column direction for each column of memory cell locations.

    PHASE-CHANGE MEMORY
    33.
    发明申请

    公开(公告)号:US20220336736A1

    公开(公告)日:2022-10-20

    申请号:US17856711

    申请日:2022-07-01

    Abstract: The present disclosure concerns a phase-change memory manufacturing method and a phase-change memory device. The method includes forming a first insulating layer in cavities located vertically in line with strips of phase-change material, and anisotropically etching the portions of the first insulating layer located at the bottom of the cavities; and a phase-change memory device including a first insulating layer against lateral walls of cavities located vertically in line with strips of phase-change material.

    INDIRECT TIME-OF-FLIGHT (ITOF) SENSOR

    公开(公告)号:US20220308190A1

    公开(公告)日:2022-09-29

    申请号:US17704481

    申请日:2022-03-25

    Abstract: An indirect time-of-flight (iTOF) includes a pixel with a photoconversion area, a readout circuit and at least two circuit sets. Each circuit set includes: a capacitive element connected to a first node of the circuit set; a controllable charge transfer device connected between a first electrode of the photoconversion area and the first node; and a first transistor having a gate connected to the first node, a source connected to the readout circuit and a drain configured to receive a bias potential. The capacitive element is configured to store a voltage in response to charges generated by the photoconversion area.

    IMAGE SENSOR
    35.
    发明申请

    公开(公告)号:US20220272291A1

    公开(公告)日:2022-08-25

    申请号:US17667485

    申请日:2022-02-08

    Abstract: The present description describes an image sensor including an array of pixels arranged inside and on top of a region of a semiconductor substrate electrically insulated from the rest of the substrate by insulating trenches crossing the substrate, each pixel including a photoconversion area and at least two assemblies, each including a memory area and a transfer gate coupling the memory area to the photoconversion area, and a circuit configured to apply, for each pixel and at least during each integration phase, a bias voltage different from ground to a portion of the substrate having the pixel arranged inside and on top of it.

    Electronic chip
    36.
    发明授权

    公开(公告)号:US11387195B2

    公开(公告)日:2022-07-12

    申请号:US17130683

    申请日:2020-12-22

    Abstract: An electronic chip includes a substrate made of semiconductor material. Conductive pads are located on a front side of the substrate and cavities extend into the substrate from a backside of the substrate. Each cavity reaches an associated conductive pad. Protrusions are disposed on the backside of the substrate. A conductive layer covers the walls and bottoms of the cavities. The conductive layer includes portions on the backside, each portion partially located on an associated protrusion and electrically connecting two of the conductive pads.

    LIGHT SENSOR PIXEL AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20220181390A1

    公开(公告)日:2022-06-09

    申请号:US17543004

    申请日:2021-12-06

    Abstract: A pixel includes a first electrode layer on an exposed surface of an interconnection structure and in contact with a conductive element of the interconnection structure. An insulating layer extends over the first electrode layer and includes opening crossing through the insulating layer to the first electrode layer. A second electrode layer is on top of and in contact with the first electrode layer and the insulating layer in the opening. A film configured to convert photons into electron-hole pairs is on the insulating layer, the second electrode layer and filling the opening. A third electrode layer covers the film.

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