公开(公告)号：US20220384721A1

公开(公告)日：2022-12-01

申请号：US17751190

申请日：2022-05-23

Applicant: STMicroelectronics (Crolles 2) SAS

Inventor： Pascal GOURAUD ,  Laurent FAVENNEC

IPC: H01L45/00 ,  H01L27/24

Abstract: A memory cell is manufactured by: (a) forming a stack comprising a first layer made of a phase change material and a second layer made of a conductive material; (b) forming a mask on the stack covering only the memory cell location; and (c) etching portions of the stack not covered by the first mask. The formation of the mask covering only the memory cell location comprises defining a first mask extending in a row direction for each row of memory cell locations and then patterning the first mask in a column direction for each column of memory cell locations.

公开(公告)号：US20230006132A1

公开(公告)日：2023-01-05

申请号：US17847016

申请日：2022-06-22

Applicant: STMicroelectronics (Crolles 2) SAS

Inventor： Laurent FAVENNEC ,  Fausto PIAZZA

IPC: H01L45/00 ,  H01L27/24 ,  H01L23/522

Abstract: A method for making a phase change memory includes a step of forming an array of phase change memory cells, with each cell being separated from neighboring cells in the same line of the array and from neighboring cells in the same column of the array, by the same first distance. The method further includes a step of etching one memory cell out of N, with N being at least equal to 2, in each line or each column.

公开(公告)号：US20230263082A1

公开(公告)日：2023-08-17

申请号：US18130184

申请日：2023-04-03

Applicant: STMicroelectronics (Crolles 2) SAS ,  STMicroelectronics (Grenoble 2) SAS ,  STMicroelectronics (Rousset) SAS

Inventor： Franck ARNAUD ,  David GALPIN ,  Stephane ZOLL ,  Olivier HINSINGER ,  Laurent FAVENNEC ,  Jean-Pierre ODDOU ,  Lucile BROUSSOUS ,  Philippe BOIVIN ,  Olivier WEBER ,  Philippe BRUN ,  Pierre MORIN

IPC: H10N70/00 ,  G11C13/00 ,  H10B63/00 ,  H10N70/20

CPC classification number: H10N70/8616 ,  G11C13/0004 ,  G11C13/0069 ,  H10B63/30 ,  H10B63/80 ,  H10N70/011 ,  H10N70/021 ,  H10N70/231 ,  H10N70/826 ,  H10N70/882 ,  H10N70/8265 ,  H10N70/8413 ,  G11C2013/008

Abstract: An integrated circuit includes a substrate with an active area, a first insulating layer, a second insulating layer, and a phase-change material. The integrated circuit further includes a heating element in an L-shape, with a long side in direct physical contact with the phase-change material and a short side in direct physical contact with a via. The heating element is surrounded by first, second, and third insulating spacers, with the first insulating spacer having a planar first sidewall in contact with the long side of the heating element, a convex second sidewall, and a planar bottom face in contact with the short side of the heating element. The second and third insulating spacers are in direct contact with the first insulating spacer and the long side of the heating element.

公开(公告)号：US20190140176A1

公开(公告)日：2019-05-09

申请号：US16184246

申请日：2018-11-08

Applicant: STMicroelectronics (Crolles 2) SAS ,  STMicroelectronics (Grenoble 2) SAS ,  STMicroelectronics (Rousset) SAS

Inventor： Franck ARNAUD ,  David GALPIN ,  Stephane ZOLL ,  Olivier HINSINGER ,  Laurent FAVENNEC ,  Jean-Pierre ODDOU ,  Lucile BROUSSOUS ,  Philippe BOIVIN ,  Olivier WEBER ,  Philippe BRUN ,  Pierre MORIN

IPC: H01L45/00 ,  H01L27/24

Abstract: An electronic chip includes memory cells made of a phase-change material and a transistor. First and second vias extend from the transistor through an intermediate insulating layer to a same height. A first metal level including a first interconnection track in contact with the first via is located over the intermediate insulating layer. A heating element for heating the phase-change material is located on the second via, and the phase-change material is located on the heating element. A second metal level including a second interconnection track is located above the phase-change material. A third via extends from the phase-change material to the second interconnection track.