Vacuum evaporator
    31.
    发明授权
    Vacuum evaporator 有权
    真空蒸发器

    公开(公告)号:US07339182B2

    公开(公告)日:2008-03-04

    申请号:US11325348

    申请日:2006-01-05

    IPC分类号: G21K4/00 H05B33/00

    CPC分类号: C23C14/546

    摘要: A vacuum evaporator including a vacuum chamber and a source arranged in the vacuum chamber to supply a deposition material to a substrate on which a layer is formed. A crystal sensor measures a deposition speed of the deposition material. The crystal sensor includes an insert having a hole, and the insert is arranged in front of the crystal sensor.

    摘要翻译: 一种真空蒸发器,包括设置在真空室中的真空室和源,以将沉积材料供应到其上形成有层的基板。 晶体传感器测量沉积材料的沉积速度。 晶体传感器包括具有孔的插入件,并且插入件布置在晶体传感器的前面。

    Vacuum evaporator
    32.
    发明申请
    Vacuum evaporator 有权
    真空蒸发器

    公开(公告)号:US20060145103A1

    公开(公告)日:2006-07-06

    申请号:US11325348

    申请日:2006-01-05

    IPC分类号: G21K4/00

    CPC分类号: C23C14/546

    摘要: A vacuum evaporator including a vacuum chamber and a source arranged in the vacuum chamber to supply a deposition material to a substrate on which a layer is formed. A crystal sensor measures a deposition speed of the deposition material. The crystal sensor includes an insert having a hole, and the insert is arranged in front of the crystal sensor.

    摘要翻译: 一种真空蒸发器,包括设置在真空室中的真空室和源,以将沉积材料供应到其上形成有层的基板。 晶体传感器测量沉积材料的沉积速度。 晶体传感器包括具有孔的插入件,并且插入件布置在晶体传感器的前面。

    Heating crucible and deposition apparatus including the same
    33.
    发明申请
    Heating crucible and deposition apparatus including the same 有权
    加热坩埚和包括其的沉积设备

    公开(公告)号:US20060096542A1

    公开(公告)日:2006-05-11

    申请号:US11266397

    申请日:2005-11-04

    IPC分类号: C23C16/00

    CPC分类号: C23C14/12 C23C14/243

    摘要: A heating crucible and a deposition apparatus are provided that have a uniform deposition rate and good reproducibility. The heating crucible of the deposition apparatus includes a titanium body with an internal cavity to contain a material to be deposited and an opening to emit the material to be deposited, a wire to heat the body, and an insulator to insulate the body from the wire.

    摘要翻译: 提供了具有均匀沉积速率和良好再现性的加热坩埚和沉积设备。 沉积装置的加热坩埚包括具有内腔的钛体,以容纳待沉积的材料和用于发射待沉积材料的开口,用于加热主体的导线和用于使主体与线绝缘的绝缘体 。