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公开(公告)号：US20130175884A1
公开(公告)日：2013-07-11
申请号：US13737848
申请日：2013-01-09
申请人： Fidelus Adrianus Boon , Hendrikus Pascal Gerardus Johannes Van Agtmaal , Abdelhamid Kechroud , Sven Antoin Johan Hol , Peter Michel Silvester Maria Heijmans
发明人： Fidelus Adrianus Boon , Hendrikus Pascal Gerardus Johannes Van Agtmaal , Abdelhamid Kechroud , Sven Antoin Johan Hol , Peter Michel Silvester Maria Heijmans
IPC分类号： H02K1/06
CPC分类号： H02K1/06 , G03F7/70758
摘要： A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each attached opposite to each other to the first part of the apparatus, the first magnet assembly including a first main magnet system and a first outer subsidiary magnet system, and the second magnet assembly including a second main magnet system and a second outer subsidiary magnet system, the first and second main magnet system defining a space between them in a second direction perpendicular to the first direction. The actuator includes a coil attached to the second part. The distance between the first outer subsidiary magnet system and the second outer subsidiary magnet system in the second direction is substantially zero.
摘要翻译： 光刻设备包括用于在包括第一磁体组件和第二磁体组件的第一和第二部分之间沿第一方向产生力的致动器，每个第一磁体组件和第二磁体组件彼此相对地安装到装置的第一部分，第一磁体组件包括 第一主磁体系统和第一外部辅助磁体系统，第二磁体组件包括第二主磁体系统和第二外部辅助磁体系统，第一和第二主磁体系统在垂直于第二主磁体系统的第二方向上在它们之间限定空间 第一个方向。 致动器包括附接到第二部件的线圈。 第一外辅助磁体系统和第二外辅助磁体系统在第二方向上的距离基本为零。
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32.发明授权Lithographic apparatus having a controlled motor, and motor control system and method 失效具有受控电机的光刻设备，以及电机控制系统和方法公开(公告)号：US07468589B2
公开(公告)日：2008-12-23
申请号：US11331337
申请日：2006-01-13
IPC分类号： H02K41/00
CPC分类号： H02P25/06
摘要： A lithographic apparatus includes an illumination system to condition a radiation beam. A patterning support holds a patterning device that imparts the radiation beam with a pattern to form a patterned radiation beam. A substrate support holds a substrate. A projection system projects the patterned radiation beam onto the substrate. A positioning system positions the patterning support and the substrate support. The positioning system has a motor with a stator and a mover coupled to a support, and an associated motor control system with a controller providing an output for controlling currents applied to the motor. The motor control system determines a controller output required to compensate for a weight of mover and associated support, determines a deviation of this output from an output required to compensate the gravity force acting on the mover and associated support, and corrects the currents applied to the motor based on the deviation.
摘要翻译： 光刻设备包括用于调节辐射束的照明系统。 图案形成支撑件保持图案形成装置，其使得辐射束具有图案以形成图案化的辐射束。 衬底支撑件保持衬底。 投影系统将图案化的辐射束投射到衬底上。 定位系统定位图形支撑件和基板支撑件。 定位系统具有带有定子的电动机和耦合到支撑件的动子，以及具有控制器的相关联的电动机控制系统，该控制器提供用于控制施加到电动机的电流的输出。 电动机控制系统确定需要补偿动力和相关支撑的重量的控制器输出，确定该输出与补偿作用在动子和相关支撑上的重力所需的输出的偏差，并校正施加到 电机基于偏差。
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公开(公告)号：US07459808B2
公开(公告)日：2008-12-02
申请号：US11273634
申请日：2005-11-15
申请人： Sven Antoin Johan Hol , Angelo Cesar Peter De Klerk , Erik Roelof Loopstra , Fransicus Mathijs Jacobs , Mark Scholten , Arjan Franklin Bakker
发明人： Sven Antoin Johan Hol , Angelo Cesar Peter De Klerk , Erik Roelof Loopstra , Fransicus Mathijs Jacobs , Mark Scholten , Arjan Franklin Bakker
CPC分类号： H02K41/03 , G03F7/70758 , H02K2201/18
摘要： A motor includes a magnet assembly to generate a magnetic field. The field includes along the first direction parts which are alternately orientated in the first and the second direction. The parts extend in a third direction which is perpendicular to the first and the second direction. The motor further includes a first coil winding to carry a first current. The first coil winding to extend in the first direction between parts of the magnetic field orientated in the second direction, to generate the force in the first direction. The motor also includes a second coil winding to carry a second current. The second coil winding to extend in the first direction between parts of the magnetic field substantially orientated in the first direction, to generate the force in the second direction.
摘要翻译： 电动机包括用于产生磁场的磁体组件。 该场包括沿着第一方向的部分，其沿第一方向和第二方向交替取向。 这些部件在垂直于第一和第二方向的第三方向上延伸。 电动机还包括用于承载第一电流的第一线圈绕组。 所述第一线圈绕组在所述第一方向上沿着在所述第二方向上定向的所述磁场的部分之间延伸，以在所述第一方向上产生力。 电动机还包括用于承载第二电流的第二线圈绕组。 所述第二线圈绕组在所述磁场的各部分之间沿所述第一方向沿所述第一方向大致取向，以在所述第二方向上产生所述力。
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34.发明授权Actuator assembly and lithographic apparatus comprising such an actuator assembly 有权包括这种致动器组件的致动器组件和光刻设备公开(公告)号：US07167234B2
公开(公告)日：2007-01-23
申请号：US10967306
申请日：2004-10-19
CPC分类号： G03F7/70758
摘要： An actuator assembly includes a coil moveably positionable in a magnetic field generated by a magnet assembly, each of the coil and the magnet having substantially only one side facing the other. A magnetized field-shaping element is provided for shaping the magnetic field such that the magnetic field is substantially perpendicular to the direction of the electrical current for generating a force in a first degree of freedom. Thus, the coil may easily be mounted, since it does not need to be enclosed by magnet poles.
摘要翻译： 致动器组件包括能够由磁体组件产生的磁场中的可移动地定位的线圈，线圈和磁体中的每一个基本上只有一个面朝向另一侧。 提供磁化场成形元件用于使磁场成形，使得磁场基本上垂直于用于产生第一自由度的电流的方向。 因此，线圈可以容易地安装，因为它不需要被磁极包围。
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35.发明授权Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method 有权光刻致动器机构，光刻设备和器件制造方法公开(公告)号：US07079226B2
公开(公告)日：2006-07-18
申请号：US10797568
申请日：2004-03-11
CPC分类号： G03F7/70758 , G03F7/70858
摘要： The present invention relates to a Lorentz actuator in the context of a lithographic projection apparatus. The present invention improves the thermal performance of a Lorentz actuator over the prior art by employing a plurality of coils, separated by separation layers of high thermal conductivity material in good thermal contact with a cooling element. In this way, heat flows more quickly from hotspot regions near the center of the coils into the cooling element. According to an embodiment of the invention, the cooling element is arranged to be in line with the separation layers so as to optimize the thermal connection between these two members. It is found that splitting a parent coil into two coils provides a practical balance between improved thermal performance and undesirable increases in volume and complexity.
摘要翻译： 本发明涉及在光刻投影装置的上下文中的洛伦兹致动器。 本发明通过采用多个线圈来提高洛伦兹致动器的热性能，该多个线圈由与散热元件良好热接触的高热导率材料的分离层隔开。 以这种方式，热量从线圈中心附近的热点区域更快地流入冷却元件。 根据本发明的实施例，冷却元件布置成与分离层成一直线，以便优化这两个构件之间的热连接。 发现将母线圈分成两个线圈提供了改进的热性能和不期望的体积和复杂性增加之间的实际平衡。
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公开(公告)号：US06879377B2
公开(公告)日：2005-04-12
申请号：US10305266
申请日：2002-11-27
申请人： Hernes Jacobs , Piet Vosters , Sven Antoin Johan Hol , Harmen Klaas Van Der Schoot , Robert Johannes Petrus Van Diesen , David William Callan
发明人： Hernes Jacobs , Piet Vosters , Sven Antoin Johan Hol , Harmen Klaas Van Der Schoot , Robert Johannes Petrus Van Diesen , David William Callan
IPC分类号： G03F7/20 , H01L21/027 , G03B27/42 , G03B27/58
CPC分类号： G03F7/70991
摘要： A lithographic projection apparatus includes a conduit that supplies utilities to a movable component in a vacuum chamber such as an object table, associated motor or sensor. The conduit comprises flexible metal bellows preventing out-gassing of the conduit due to the vacuum in the vacuum chamber while allowing movement of the movable component in at least a first degree of freedom.
摘要翻译： 光刻投影装置包括向诸如对象台，相关联的电动机或传感器的真空室中的可移动部件供应电力的导管。 导管包括柔性金属波纹管，以防止由于真空室中的真空引起的导管的泄气，同时允许可移动部件以至少第一自由度的运动。
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37.发明授权Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby 有权光刻设备，其中使用的磁性支撑件，装置制造方法以及由此制造的装置公开(公告)号：US06831285B2
公开(公告)日：2004-12-14
申请号：US10157029
申请日：2002-05-30
IPC分类号： G01N2186
CPC分类号： G03F7/70716 , G03F7/70833 , G03F7/709
摘要： A lithographic apparatus includes a support that provides a magnetic force in a first direction between a first part and a second part of the apparatus. The support comprises first, second and third magnet assemblies, the first and third magnet assemblies attached to the first part and each including at least one magnet oriented such that its magnetic polarization is substantially parallel or anti-parallel to the support direction. The first and third magnet assemblies define a space between them in a second direction that is substantially perpendicular to the first direction. The second magnet assembly is attached to the second part and includes at least one magnet. The second magnet assembly is at least partly located in the space. The at least one magnet of the second magnet assembly has its magnetic polarization oriented so as to produce a bias force substantially along the support direction by magnetic interaction between the first, second and third magnet assemblies.
摘要翻译： 光刻设备包括在设备的第一部分和第二部分之间沿第一方向提供磁力的支撑件。 支撑件包括第一，第二和第三磁体组件，第一和第三磁体组件附接到第一部分，并且每个磁体组件包括定向的至少一个磁体，使得其磁极化基本上平行或反平行于支撑方向。 第一和第三磁体组件在基本上垂直于第一方向的第二方向上限定它们之间的空间。 第二磁体组件附接到第二部分并且包括至少一个磁体。 第二磁体组件至少部分地位于该空间中。 第二磁体组件的至少一个磁体具有取向的磁极化，从而通过第一，第二和第三磁体组件之间的磁相互作用产生基本沿着支撑方向的偏压力。
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