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公开(公告)号：US07149442B2
公开(公告)日：2006-12-12
申请号：US11148277
申请日：2005-06-09
CPC分类号： G03G15/5037
摘要： An electric potential sensor includes a detecting electrode, a capacitor modulating unit for modulating a coupling capacitance between the detecting electrode and a measurement object by using an electrostatic force, and a shielding unit for electrically shielding the detecting electrode from electric fields due to the electrostatic force of the capacitor modulating unit. An electric potential of the measurement object is measured based on a change caused by the capacitor modulating unit in the amount of electrical charge induced in the detecting electrode. Entrance of lines of electric force due to the electrostatic force of the capacity modulating unit into the detecting electrode is prevented or reduced, so that an unfavorable mixture of driving noise into an output signal of the detecting electrode can be prevented or reduced.
摘要翻译： 电位传感器包括检测电极，电容器调制单元，用于通过使用静电力来调制检测电极和测量对象之间的耦合电容;以及屏蔽单元，用于将检测电极与由静电力导致的电场电屏蔽 的电容调制单元。 基于由电容器调制单元在检测电极中感应的电荷量引起的变化来测量测量对象的电位。 防止或减少由于电容调节单元的静电力而导致的检测电极的电力线入口，从而可以防止或减少驱动噪声对检测电极的输出信号的不良混合。
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公开(公告)号：US20060158196A1
公开(公告)日：2006-07-20
申请号：US11385392
申请日：2006-03-21
IPC分类号： G01R29/12
CPC分类号： G01R29/12 , G03G15/5037
摘要： An electric potential measuring apparatus including a substrate disposed facing a measurement object, a detecting electrode provided insulated from the substrate, and a capacity modulating unit for modulating a coupling capacity between the detecting electrode and the measurement object. In the electric potential measuring apparatus, a region with a dielectric constant less than a dielectric constant of the substrate is formed in the substrate to achieve an increase in resistivity of a portion of the substrate between detecting electrodes, or a decrease in a stray capacity between the detecting electrode and the substrate.
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公开(公告)号：US08455964B2
公开(公告)日：2013-06-04
申请号：US13141488
申请日：2009-12-14
CPC分类号： H02N1/00 , B06B1/0292 , B06B3/00 , Y10T29/49005 , Y10T29/49009
摘要： An electromechanical transducer includes a plurality cells that are electrically connected to form a unit. Each of the cells includes a first electrode and a second electrode provided with a gap being disposed therebetween. Dummy cells that are not electrically connected to the cells are provided around the outer periphery of the unit of the cells.
摘要翻译： 机电换能器包括电连接以形成单元的多个单元。 每个电池包括第一电极和设置有间隙的第二电极。 在电池单元的外周附近设置没有电连接到电池的虚拟电池。
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公开(公告)号：US08299550B2
公开(公告)日：2012-10-30
申请号：US12753782
申请日：2010-04-02
IPC分类号： H01L21/00
CPC分类号： B06B1/0292 , Y10T29/49117 , Y10T29/49155
摘要： When the initial displacement greatly varies among cells in an element, there is a need to reduce a bias voltage to be applied between electrodes. This decreases the sensitivity. An electromechanical transducer of the present invention includes an element having a plurality of cells. Each of the cells includes a first electrode and a second electrode that are provided with a cavity being disposed therebetween. A groove is provided at a position at a predetermined distance from the cavity of the cell on the outermost periphery of the element.
摘要翻译： 当元件中的单元之间的初始位移大大变化时，需要减少施加在电极之间的偏置电压。 这降低了灵敏度。 本发明的机电换能器包括具有多个单元的元件。 每个电池包括设置有设置在其间的空腔的第一电极和第二电极。 在元件的最外周上与电池的空腔隔开预定距离的位置设置槽。
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公开(公告)号：US08136212B2
公开(公告)日：2012-03-20
申请号：US12061512
申请日：2008-04-02
申请人： Yoshitaka Zaitsu , Chienliu Chang , Masao Majima
发明人： Yoshitaka Zaitsu , Chienliu Chang , Masao Majima
IPC分类号： H04R17/00
CPC分类号： G02B26/0841 , B81C1/00634 , B81C2201/0101 , Y10T29/42 , Y10T29/49005 , Y10T29/49124 , Y10T29/49165 , Y10T29/49609
摘要： A structure fabricating method plastically deforms a target portion of a substrate, to thereby fabricate a structure having an inclined segment that is inclined relative to a principal surface of the substrate. The method includes forming a projection on the target portion to project from the principal surface of the substrate or from an opposing surface of the substrate on the side opposite to the principal surface, and applying a force to the projection to plastically deform the target portion such that the target portion is bent in a direction from one surface of the substrate on the side where the projection is formed, toward another surface on the side opposite to the one surface.
摘要翻译： 结构制造方法使基板的目标部分塑性变形，从而制造具有相对于基板的主表面倾斜的倾斜段的结构。 所述方法包括在所述目标部分上形成突出部，从所述基板的主表面或与所述基板的与所述主表面相反的一侧的相对表面突出，并且向所述突起施加力以使所述目标部分塑性变形 目标部分沿着从形成有突起的一侧的基板的一个表面朝向与该一个表面相对的一侧的另一表面的方向弯曲。
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公开(公告)号：US08082651B2
公开(公告)日：2011-12-27
申请号：US12173158
申请日：2008-07-15
申请人： Yoshitaka Zaitsu , Chienliu Chang , Masao Majima
发明人： Yoshitaka Zaitsu , Chienliu Chang , Masao Majima
CPC分类号： B81C1/00174 , B81B2203/058 , Y10T29/4902 , Y10T29/49861 , Y10T29/49904 , Y10T29/49922
摘要： A micro-structure fabrication method fabricates a micro-structure including an inclined part inclined to a principal plane of a substrate by plastically deforming a work piece having the substrate with the principal plane. The structure fabrication method includes the steps of providing in the work piece a projection configured to protrude from a first surface and away from the principal plane of the substrate, and bending the work piece toward a second surface opposite to the first surface. The bending is accomplished by applying a force on a block including an inclined pressure plane that is abutted on the projection for plastically deforming the work piece, in which in bending the work piece, the direction of a first force applied on the work piece intersects with the direction of a second force of the inclined pressure plane pushing the projection.
摘要翻译： 微结构制造方法通过使具有主平面的基板的工件塑性变形来制造微结构，该微结构包括倾斜部分，其倾斜于基板的主平面。 该结构制造方法包括以下步骤：在工件中设置突起，该突起被构造成从第一表面突出并远离基板的主平面，并且将工件朝向与第一表面相对的第二表面弯曲。 弯曲是通过在包括倾斜压力平面的块上施加力来实现的，所述倾斜压力平面抵靠在突出部上，用于使工件塑性变形，其中在弯曲工件时，施加在工件上的第一力的方向与 推动突起的倾斜压力平面的第二力的方向。
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公开(公告)号：US20110254405A1
公开(公告)日：2011-10-20
申请号：US13141488
申请日：2009-12-14
CPC分类号： H02N1/00 , B06B1/0292 , B06B3/00 , Y10T29/49005 , Y10T29/49009
摘要： An electromechanical transducer includes a plurality cells that are electrically connected to form a unit. Each of the cells includes a first electrode and a second electrode provided with a gap being disposed therebetween. Dummy cells that are not electrically connected to the cells are provided around the outer periphery of the unit of the cells.
摘要翻译： 机电换能器包括电连接以形成单元的多个单元。 每个电池包括第一电极和设置有间隙的第二电极。 在电池单元的外周附近设置没有电连接到电池的虚拟电池。
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公开(公告)号：US20090315217A1
公开(公告)日：2009-12-24
申请号：US12486749
申请日：2009-06-18
申请人： Yoshitaka Zaitsu , Chienliu Chang , Masao Majima , Hironobu Maeda
发明人： Yoshitaka Zaitsu , Chienliu Chang , Masao Majima , Hironobu Maeda
IPC分类号： B29C53/84
CPC分类号： B81C1/00634 , B81B2201/033 , B81B2201/042 , B81B2203/019 , G02B26/0833 , Y10T29/49833 , Y10T29/49861 , Y10T29/49908
摘要： In a method of fabricating a structure by plastically deforming a processing portion provided at a movable segment, a restraint segment configured to restrain movement of the movable segment is provided before an external force is applied to the processing portion. After processing of the processing portion is completed, the restraint segment is removed.
摘要翻译： 在通过使设置在可移动部分处的处理部分发生塑性变形来制造结构的方法中，在对加工部分施加外力之前，设置限制可动部分的移动的约束部分。 在处理部分的处理完成之后，约束段被去除。
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39.发明授权公开(公告)号：US07612569B2
公开(公告)日：2009-11-03
申请号：US11670277
申请日：2007-02-01
CPC分类号： G03G15/5037 , G02B26/105
摘要： Oscillating device including a movable member that is vibratable, a fixed section that is provided opposite to the movable member, a driving unit configured to drive the movable member, and at least two electrodes configured to generate a first signal corresponding to a drive state of the movable member. At least one electrode is provided on the movable member, and at least one electrode is provided on the fixed section. The driving unit can control the driving of the movable member on the basis of the first signal.
摘要翻译： 振动装置，包括可振动的可动构件，与可动构件相对设置的固定部分，驱动单元，其构造成驱动可动构件;以及至少两个电极，被配置为产生对应于所述可动构件的驱动状态的第一信号 活动件。 至少一个电极设置在可动构件上，并且至少一个电极设置在固定部分上。 驱动单元可以基于第一信号来控制可动构件的驱动。
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公开(公告)号：US07548066B2
公开(公告)日：2009-06-16
申请号：US11430992
申请日：2006-05-10
CPC分类号： G03G15/0266 , G03G15/5037
摘要： A potential measuring device for measuring a potential of a measurement object, includes a detection electrode that faces the measurement object, a reference electrode disposed in a vicinity of the detection electrode that is electrostatically shielded by an electrostatic shield structure with respect to the measurement object, and capacitance modulator for modulating an electrostatic coupled capacitance between the detection electrode and the measurement object to measure a potential of the measurement object by using an electric signal generated on the detection electrode and an electric signal generated on the reference electrode.
摘要翻译： 用于测量测量对象的电位的电位测量装置包括面向测量对象的检测电极，设置在相对于测量对象被静电屏蔽结构静电屏蔽的检测电极附近的参考电极， 以及电容调制器，用于调制检测电极和测量对象之间的静电耦合电容，以通过使用在检测电极上产生的电信号和在参考电极上产生的电信号来测量测量对象的电位。
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