摘要:
Provided is a transducer in which electrodes in a movable region are less likely to affect the mechanical characteristics of the movable region and in which nonuniform electrical potential distribution of the surface of the electrodes in the movable region is suppressed. The transducer includes first electrodes and second electrodes opposing the first electrodes with gaps interposed between therebetween. The resistance per unit area of the first electrodes differs in a movable region relative to the second electrodes and an unmovable region relative to the second electrodes. The first electrodes in the movable region and the first electrodes in the unmovable region have different thicknesses.
摘要:
A capacitive detection type electro-mechanical transducer comprises; a cell formed by a first electrode arranged on a substrate and a second electrode arranged on a vibration film, and a detection circuit for detecting a displacement of the vibration film, based on a capacity change between the first and second electrodes, wherein a plurality of the cells are classified into a plurality of groups, each one includes at least two cells, and the first electrodes or the second electrodes of the cells of the same one group are commonly connected to the same one detection circuit, and an addition circuit for adding, into single information, signals from the plurality of detection circuits corresponding to the plurality of groups, and for outputting the information, and a capacitive load for each one of the detectors are formulated to be dispersedly arranged.
摘要:
Provided is an angular velocity sensor including: a reference vibrator supported so as to generate reciprocating rotational vibration about a first rotation axis as a center; a detection vibrator supported by the reference vibrator so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center; a reference vibration generating unit for allowing the reference vibrator to generate reciprocating rotational vibration; and a detection unit for detecting a displacement amount of the detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the detection vibrator.
摘要:
The optical deflector includes a deflector, a vibration detector, a driving signal generator, a modulation timing signal generator, and a deflection detector. The deflector has a vibrational system having a movable body with a light deflecting member, and deflects light from a light source by the movable body. The vibration detector detects the vibration condition of the vibrational system of the deflector. The driving signal generator generates a driving signal for driving the vibrational system of the deflector. The modulation timing signal generator generates a modulation timing signal as the reference time for regulating the amount of light from the light source. The deflection detector detects the deflection condition of light deflected by the deflector. The driving signal generator generates the driving signal based on information of the vibration condition detected by the vibration detector, and the modulation timing signal generator generates the modulation timing signal based on information of the deflection condition detected by the deflection detector.
摘要:
0 A light beam deflecting apparatus which measures the passing time of a light beam in reciprocating scans on a specified position on the scanning line, and then calculates time lag data corresponding to the time lag in the reciprocating scan of a light beam deflecting device with respect to the drive signal therefor. From a measurement of two passing times in forward and backward scans, timing data is calculated, corresponding to the modulation start or end time of the light beam within a scanning cycle period. The invention resolves the drawback, in a light beam deflecting device for displaying an image by reciprocating light beam scannings, of image variation by variations for example in amplitude, phase and offset.
摘要:
A structure having a plurality of conductive regions insulated electrically from each other comprises a movable piece supported movably above the upper face of the conductive region, the movable piece having an electrode in opposition to the conductive region, the structure being constructed to be capable of emitting and receiving electric signals through the lower face of the conductive region, the plural conductive regions being insulated by sequentially connected oxidized regions formed from an oxide of a material having through-holes or grooves.
摘要:
An angular velocity sensor includes a supporting substrate, a detecting portion, a displacement detecting portion, a first driving portion, and a second driving portion. The detecting portion is supported by the supporting substrate movably in at least a free direction. The displacement detecting portion detects a displacement of the detecting portion in the free direction. The first driving portion excites a first reference oscillation of at least a portion of the detecting portion so that a first Coriolis' force in the free direction is generated in response to an angular velocity about a first axis. The second driving portion excites a second reference oscillation of at least a portion of the detecting portion so that a second Coriolis' force in the free direction is generated in response to an angular velocity about a second axis.
摘要:
A potential measuring apparatus has a detection electrode on which an electric charge is induced according to a potential of a detection object, and a modulator for altering the generated quantity of the electric charge. The detection electrode has at least one depressed portion on a surface opposite to the detection object.
摘要:
An electromechanical transducer according to an embodiment of the present invention is capable of selectively performing a transmitting and receiving operation by using elements of different shapes. The electromechanical transducer has a plurality of cells, each of which has a vibrating film including two electrodes provided with a gap therebetween, two driving and detecting units, a potential difference setter, and a switch. Each of the driving and detecting units implements a transmitting and/or a receiving function. A first or second element includes first or second electrodes which are electrically connected and further connected to the common first or second driving and detecting unit, respectively. The potential difference setter sets a predetermined potential difference between the reference potentials of the first and second driving and detecting units, respectively, and the switch switches between the first and second driving and detecting units to perform the transmitting and receiving operation.