Control apparatus for capacitive electromechanical transducer, and method of controlling the capacitive electromechanical transducer
    1.
    发明授权
    Control apparatus for capacitive electromechanical transducer, and method of controlling the capacitive electromechanical transducer 有权
    用于电容式机电换能器的控制装置,以及控制电容式机电换能器的方法

    公开(公告)号:US09238250B2

    公开(公告)日:2016-01-19

    申请号:US13500284

    申请日:2010-11-16

    摘要: Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacity between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode. The driving/detecting unit adjusts frequency characteristics by changing a parameter defining the frequency domain used in a transmitting/receiving operation, corresponding to the change of the external stress.

    摘要翻译: 提供了一种用于容量式机电换能器的控制装置和控制方法,其具有小的发送/接收效率的降低以及具有不同频率范围的发送/接收特性的集合。 该装置具有各自包括经由间隙彼此面对的第一和第二电极的单元; 包括驱动/检测单元和外部应力施加单元。 驱动/检测单元执行以下至少一种:使第二电极通过在电极之间产生AC静电吸引力而振动并传播弹性波,并且检测电极之间的容量变化,由第二电极振动引起的变化 收到弹性波。 外部应力施加单元改变施加到第二电极的外部应力。 驱动/检测单元通过改变与发生/接收操作中使用的频域相对应的外部应力变化的参数来调整频率特性。

    Structure having plural conductive regions and process for production thereof
    2.
    发明授权
    Structure having plural conductive regions and process for production thereof 有权
    具有多个导电区域的结构及其制造方法

    公开(公告)号:US08928042B2

    公开(公告)日:2015-01-06

    申请号:US12935270

    申请日:2009-05-29

    IPC分类号: H01L29/84 B81B3/00

    CPC分类号: B81B3/0086 B81B2207/07

    摘要: A structure having a plurality of conductive regions insulated electrically from each other comprises a movable piece supported movably above the upper face of the conductive region, the movable piece having an electrode in opposition to the conductive region, the structure being constructed to be capable of emitting and receiving electric signals through the lower face of the conductive region, the plural conductive regions being insulated by sequentially connected oxidized regions formed from an oxide of a material having through-holes or grooves.

    摘要翻译: 具有彼此电绝缘的多个导电区域的结构包括可移动件,其被可移动地支撑在导电区域的上表面上方,所述可移动件具有与导电区域相对的电极,该结构被构造为能够发射 并且通过导电区域的下表面接收电信号,多个导电区域通过由具有通孔或凹槽的材料的氧化物形成的顺序连接的氧化区域而被绝缘。

    Sensor and method of manufacturing the same
    3.
    发明授权
    Sensor and method of manufacturing the same 有权
    传感器及其制造方法

    公开(公告)号:US08336381B2

    公开(公告)日:2012-12-25

    申请号:US12516007

    申请日:2007-11-29

    IPC分类号: G01C19/00

    摘要: A sensor includes a movably supported movable element and an opposing member, and sensor detects a relative positional relationship between the movable element and the opposing member which are provided with a spacing therebetween. The opposing member has an impurity-doped portion which is provided at either an opposing portion, which is opposed to the movable element, or an adjoining portion, which adjoins the opposing portion. At least a part of the impurity-doped portion is formed on an opposite surface (that is, opposite to a surface that faces the movable element), from which opposite surface an electrical wiring is led out.

    摘要翻译: 传感器包括可移动支撑的可移动元件和相对构件,并且传感器检测可移动元件和相对构件之间的间隔的相对位置关系。 相对的构件具有杂质掺杂部分,其被设置在与可移动元件相对的相对部分或邻接相对部分的相邻部分。 杂质掺杂部分的至少一部分形成在与其相反的表面上(即,面向可移动元件的表面的相对表面),电线从该表面引出。

    CONTROL APPARATUS AND METHOD FOR ELECTROMECHANICAL TRANSDUCER DEVICE, AND MEASUREMENT SYSTEM
    4.
    发明申请
    CONTROL APPARATUS AND METHOD FOR ELECTROMECHANICAL TRANSDUCER DEVICE, AND MEASUREMENT SYSTEM 有权
    电动传感器装置的控制装置和方法及测量系统

    公开(公告)号:US20120227498A1

    公开(公告)日:2012-09-13

    申请号:US13508437

    申请日:2010-11-11

    IPC分类号: G01N29/36

    摘要: There is a case in which a generated acoustic wave is decreased owing to the attenuation of light, whereby a desired output is not obtained from an electromechanical transducer device that receives the acoustic wave. The control apparatus for controlling an electromechanical transducer device of the present invention includes: a conversion unit that converts a current output from a first electrode of the electromechanical transducer device to a voltage; a DC voltage applying unit that applies a DC voltage to a second electrode arranged with a gap between itself and the first electrode; and a generation unit that generates a control signal which makes at least one of the DC voltage and a conversion ratio for converting the current to the voltage be changed, on the basis of information about an elapsed time from a point in time at which an inspection object was irradiated with light.

    摘要翻译: 存在由于光的衰减而产生的声波降低的情况,从而从接收声波的机电换能器装置不能获得期望的输出。 本发明的机电换能器装置的控制装置包括:转换单元,其将从机电换能器装置的第一电极输出的电流转换为电压; 直流电压施加单元,其向在其自身和所述第一电极之间设置有间隙的第二电极施加DC电压; 以及生成单元,其基于关于从检查的时间点起的经过时间的信息,生成将DC电压和用于将电流转换为电压的转换比中的至少一个变化的控制信号 物体用光照射。

    CONTROL APPARATUS FOR CAPACITIVE ELECTROMECHANICAL TRANSDUCER, AND METHOD OF CONTROLLING THE CAPACITIVE ELECTROMECHANICAL TRANSDUCER
    5.
    发明申请
    CONTROL APPARATUS FOR CAPACITIVE ELECTROMECHANICAL TRANSDUCER, AND METHOD OF CONTROLLING THE CAPACITIVE ELECTROMECHANICAL TRANSDUCER 有权
    电容式电磁传感器的控制装置及其控制电容式电磁传感器的方法

    公开(公告)号:US20120194107A1

    公开(公告)日:2012-08-02

    申请号:US13500284

    申请日:2011-11-16

    IPC分类号: H02N1/00

    摘要: Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacity between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode. The driving/detecting unit adjusts frequency characteristics by changing a parameter defining the frequency domain used in a transmitting/receiving operation, corresponding to the change of the external stress.

    摘要翻译: 提供了一种用于容量式机电换能器的控制装置和控制方法,其具有小的发送/接收效率的降低以及具有不同频率范围的发送/接收特性的集合。 该装置具有各自包括经由间隙彼此面对的第一和第二电极的单元; 包括驱动/检测单元和外部应力施加单元。 驱动/检测单元执行以下至少一种:使第二电极通过在电极之间产生AC静电吸引力而振动并传播弹性波,并且检测电极之间的容量变化,由第二电极振动引起的变化 收到弹性波。 外部应力施加单元改变施加到第二电极的外部应力。 驱动/检测单元通过改变与发生/接收操作中使用的频域相对应的外部应力变化的参数来调整频率特性。

    Angular velocity sensor
    6.
    发明授权
    Angular velocity sensor 有权
    角速度传感器

    公开(公告)号:US08176780B2

    公开(公告)日:2012-05-15

    申请号:US12371530

    申请日:2009-02-13

    IPC分类号: G01C19/56

    CPC分类号: G01C19/5755 G01C19/5762

    摘要: An angular velocity sensor includes a supporting substrate, a detecting portion, a displacement detecting portion, a first driving portion, and a second driving portion. The detecting portion is supported by the supporting substrate movably in at least a free direction. The displacement detecting portion detects a displacement of the detecting portion in the free direction. The first driving portion excites a first reference oscillation of at least a portion of the detecting portion so that a first Coriolis' force in the free direction is generated in response to an angular velocity about a first axis. The second driving portion excites a second reference oscillation of at least a portion of the detecting portion so that a second Coriolis' force in the free direction is generated in response to an angular velocity about a second axis.

    摘要翻译: 角速度传感器包括支撑基板,检测部分,位移检测部分,第一驱动部分和第二驱动部分。 检测部分由至少沿自由方向可移动地由支撑基板支撑。 位移检测部分检测检测部分在自由方向上的位移。 第一驱动部分激发检测部分的至少一部分的第一参考振荡,使得响应于关于第一轴的角速度产生沿自由方向的第一科里奥利力。 第二驱动部分激发检测部分的至少一部分的第二基准振荡,使得响应于关于第二轴的角速度产生在自由方向上的第二科里奥利力。

    Potential measuring apparatus
    7.
    发明授权
    Potential measuring apparatus 失效
    潜在测量仪器

    公开(公告)号:US07382137B2

    公开(公告)日:2008-06-03

    申请号:US11434780

    申请日:2006-05-17

    IPC分类号: G01R29/12

    CPC分类号: G01R5/28

    摘要: A potential measuring apparatus has a detection electrode on which an electric charge is induced according to a potential of a detection object, and a modulator for altering the generated quantity of the electric charge. The detection electrode has at least one depressed portion on a surface opposite to the detection object.

    摘要翻译: 电位测量装置具有根据检测对象的电位感应电荷的检测电极和用于改变所产生的电荷量的调制器。 检测电极在与检测对象相反的表面上具有至少一个凹陷部分。

    Optical deflector
    9.
    发明授权

    公开(公告)号:US07126733B2

    公开(公告)日:2006-10-24

    申请号:US11359441

    申请日:2006-02-23

    IPC分类号: G02B26/08

    摘要: An optical deflector comprises a control means for controlling at least either a light source or a deflection means adapted to gauge the distance between the position of a deflected beam of light moving on a light receiving element in one direction and the position of another deflected beam of light moving on the light receiving element in the opposite direction and control the distance so as to make it agree with a predetermined value. Thus, the optical deflector can very accurately control the operation of the deflection means in such a way that it is not affected by changes of environmental temperature of the deflection means and the detection circuit, because a detection means for detecting the time when a beam of light passes by a predetermined angle of deflection of the deflection means is not used.