LIQUID EJECTION HEAD AND METHOD OF MANUFACTURING SAME

    公开(公告)号:US20200001604A1

    公开(公告)日:2020-01-02

    申请号:US16452162

    申请日:2019-06-25

    Abstract: A liquid ejection head includes an ejection port member that includes an ejection port that ejects a liquid, an energy generating element that generates energy for ejecting the liquid from the ejection port, a terminal electrically connected to the energy generating element, and a substrate portion that supports the ejection port member, the energy generating element, and the terminal. The terminal is connected to a wire member that supplies electric power that drives the energy generating element to the energy generating element, the substrate portion includes a hole portion formed from a surface of the substrate portion on a side opposite to a surface of the substrate portion on which the terminal is provided to a surface where the terminal is exposed, and an area of the surface where the terminal is exposed is smaller than an area of an opening of the hole portion.

    Liquid ejection head and method of manufacturing liquid ejection head

    公开(公告)号:US10265956B2

    公开(公告)日:2019-04-23

    申请号:US15813351

    申请日:2017-11-15

    Inventor: Toru Nakakubo

    Abstract: Liquid ejection head includes a substrate, a piezoelectric element provided on the substrate, an ejection port forming member provided on the substrate carrying the piezoelectric element. The ejection port forming member has an ejection port and forms a pressure chamber with the substrate. A first thin film is arranged between the substrate and the piezoelectric element to produce a space between the substrate and the first thin film. A second thin film is arranged on the piezoelectric element. The first thin film is arranged so as not to contact the lateral (edge) surface of the piezoelectric element and has a higher rigidity than the second thin film.

    LIQUID EJECTION HEAD
    33.
    发明申请

    公开(公告)号:US20180154635A1

    公开(公告)日:2018-06-07

    申请号:US15808140

    申请日:2017-11-09

    Inventor: Toru Nakakubo

    Abstract: A liquid ejection head includes a substrate, a piezoelectric element above the substrate, an orifice forming member above the substrate on the piezoelectric-element-provided-side, in which the orifice forming member has an ejection orifice for ejecting liquid and defines a pressure chamber between the orifice forming member and the substrate, and the pressure chamber communicates with the ejection orifice and includes the piezoelectric element therein, a first thin film provided between the substrate and piezoelectric element and defining a space between the first film and the substrate, and a second thin film on the piezoelectric element on the side opposite to the first film side and differing from the first film in rigidity. A communicating port is formed in the substrate in a region facing the space, communicates with the space through an opening having a smaller area than the area of the region, and is closed at an end.

    Liquid ejection head and liquid ejection device
    35.
    发明授权
    Liquid ejection head and liquid ejection device 有权
    液体喷射头和液体喷射装置

    公开(公告)号:US09573370B2

    公开(公告)日:2017-02-21

    申请号:US14990143

    申请日:2016-01-07

    Abstract: A liquid ejection head includes a plurality of liquid ejection units, each including a plate-like piezoelectric element, a first substrate and a second substrate laid one on the other in this order, the units being laid one on the other. The first substrate defines a plurality of pressure chambers for storing liquid, each of the pressure chambers communicating with an ejection port for ejecting liquid. At least either the first substrate or the second substrate defines a first liquid chamber, the first liquid chamber being either one of a feed chamber for feeding liquid to the pressure chambers and a recovery chamber for recovering liquid from the pressure chambers. The second substrate defines a second liquid chamber, the second liquid chamber being the other one of the feed chamber and the recovery chamber.

    Abstract translation: 液体喷射头包括多个液体喷射单元,每个液体喷射单元包括依次铺设在另一个上的板状压电元件,第一基板和第二基板。 第一基板限定用于存储液体的多个压力室,每个压力室与用于喷射液体的喷射口连通。 至少第一衬底或第二衬底中的至少任一个限定第一液体室,第一液体室是用于将液体供应到压力室的进料室和用于从压力室中回收液体的回收室中的一个。 第二基板限定第二液体室,第二液体室是进料室和回收室中的另一个。

    METHOD OF MANUFACTURING ELEMENT SUBSTRATE
    36.
    发明申请
    METHOD OF MANUFACTURING ELEMENT SUBSTRATE 有权
    制造元件基板的方法

    公开(公告)号:US20160059562A1

    公开(公告)日:2016-03-03

    申请号:US14820823

    申请日:2015-08-07

    Abstract: Provided is a method of manufacturing an element substrate, including: forming first and second resists on a predetermined surface of a substrate so that part of the predetermined surface is exposed; etching the substrate with the first and second resists being used as a mask to form a first recess in the substrate; removing the second resist to expose a portion of the substrate that is different from the first recess; etching the substrate with the first resist being used as a mask to deepen the first recess and to form a second recess communicating with the first recess in the substrate; and covering openings of the first and second recesses with an orifice forming member to form a pressure chamber by the first recess and an orifice forming member and to form a flow reducing portion by the second recess and the orifice forming member.

    Abstract translation: 提供一种元件基板的制造方法,包括:在基板的规定表面上形成第一和第二抗蚀剂,使得规定面的一部分露出; 用第一和第二抗蚀剂蚀刻衬底作为掩模,以在衬底中形成第一凹槽; 去除第二抗蚀剂以暴露与第一凹部不同的基板的一部分; 用第一抗蚀剂作为掩模蚀刻衬底,以加深第一凹部并形成与衬底中的第一凹部连通的第二凹部; 并且用孔口形成构件覆盖第一和第二凹部的开口,以通过第一凹部和孔形成构件形成压力室,并且通过第二凹部和孔口形成构件形成流动减小部分。

    LIQUID EJECTION HEAD AND LIQUID EJECTION APPARATUS

    公开(公告)号:US20240109326A1

    公开(公告)日:2024-04-04

    申请号:US18533488

    申请日:2023-12-08

    CPC classification number: B41J2/175 B41J2/14233 B41J2/1631

    Abstract: A liquid ejection head includes a print element substrate including multiple ejection openings, pressure chambers, a common flow path, and pumps, the pumps being configured to circulate liquid between the common flow path and the pressure chamber; and a flow path member laminated to the print element substrate. The flow path member includes a supply flow path and a collection flow path, the supply flow path being configured to supply liquid to the print element substrate, and the collection flow path being configured to collect liquid that is not ejected. The supply flow path and the collection flow path have liquid connection with the same common flow path. A circulating pump generates a flow of liquid flowing in an order of the supply flow path, the common flow path, and the collection flow path, the circulating pump being provided at a position different from the print element substrate.

    Liquid ejecting head and liquid ejecting apparatus

    公开(公告)号:US10668736B2

    公开(公告)日:2020-06-02

    申请号:US15976470

    申请日:2018-05-10

    Abstract: A liquid ejecting head has a laminated flow path member on which a supply flow path for individually supplying a plurality of liquids to an element substrate and a collection flow path for individually collecting the liquids are formed. The supply flow path includes first and second common supply flow paths for horizontally leading first and second liquids to positions corresponding to a plurality of element substrates. The first and second common supply flow paths are formed in the same layer of the laminated flow path member. The collection flow path includes a first common collection flow path for horizontally collecting the first liquid and a second common collection flow path for horizontally collecting the second liquid from positions corresponding to the plurality of element substrates. The first and second common collection flow paths are formed in the same layer of the laminated flow path member.

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