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78 条记录 (耗时 0.048 秒)

    INTEGRATED IMODS AND SOLAR CELLS ON A SUBSTRATE
    31.
    发明申请
    INTEGRATED IMODS AND SOLAR CELLS ON A SUBSTRATE 失效
    在基底上的集成的IMODS和太阳能电池

    公开(公告)号：US20090308452A1

    公开(公告)日：2009-12-17

    申请号：US12544580

    申请日：2009-08-20

    申请人： Teruo Sasagawa ,  Lior Kogut ,  Ming-Hau Tung

    发明人： Teruo Sasagawa ,  Lior Kogut ,  Ming-Hau Tung

    IPC分类号： H01L31/02 ,  H01L31/18 ,  G02B26/00

    CPC分类号： G02B26/001 ,  H01L27/142 ,  H01L31/072 ,  H01L31/0725 ,  Y02E10/50

    摘要： Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar cell is configured to provide energy to the interferometric modulator. The solar cell and the interferometric modulator may be formed above the same substrate. A layer of the solar cell may be shared with a layer of the interferometric modulator.

    摘要翻译： 本发明的实施例涉及包括干涉式调制器和太阳能电池的干涉式显示装置及其制造方法。 在一些实施例中，太阳能电池被配置为向干涉式调制器提供能量。 太阳能电池和干涉式调制器可以形成在同一衬底上方。 太阳能电池的一层可以与干涉式调制器的一层共享。

    Integrated IMODS and solar cells on a substrate
    32.
    发明授权
    Integrated IMODS and solar cells on a substrate 失效
    在基板上集成IMODS和太阳能电池

    公开(公告)号：US07595926B2

    公开(公告)日：2009-09-29

    申请号：US11773757

    申请日：2007-07-05

    申请人： Teruo Sasagawa ,  Lior Kogut ,  Ming-Hau Tung

    发明人： Teruo Sasagawa ,  Lior Kogut ,  Ming-Hau Tung

    IPC分类号： G02B26/00 ,  G09G3/34

    CPC分类号： G02B26/001 ,  H01L27/142 ,  H01L31/072 ,  H01L31/0725 ,  Y02E10/50

    摘要： Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar cell is configured to provide energy to the interferometric modulator. The solar cell and the interferometric modulator may be formed above the same substrate. A layer of the solar cell may be shared with a layer of the interferometric modulator.

    摘要翻译： 本发明的实施例涉及包括干涉式调制器和太阳能电池的干涉式显示装置及其制造方法。 在一些实施例中，太阳能电池被配置为向干涉式调制器提供能量。 太阳能电池和干涉式调制器可以形成在同一衬底上方。 太阳能电池的一层可以与干涉式调制器的一层共享。

    METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL
    33.
    发明申请
    METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL 有权

    公开(公告)号：US20090213451A1

    公开(公告)日：2009-08-27

    申请号：US12436059

    申请日：2009-05-05

    申请人： Ming-Hau Tung ,  Lior Kogut

    发明人： Ming-Hau Tung ,  Lior Kogut

    IPC分类号： G02B26/00

    CPC分类号： B81B3/0072 ,  B81B2201/042 ,  B81C1/00047 ,  B81C2201/0167

    摘要： Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

    Method of manufacturing MEMS devices providing air gap control
    35.
    发明申请
    Method of manufacturing MEMS devices providing air gap control 有权
    制造提供气隙控制的MEMS器件的方法

    公开(公告)号：US20080003737A1

    公开(公告)日：2008-01-03

    申请号：US11478702

    申请日：2006-06-30

    申请人： Ming-Hau Tung ,  Lior Kogut

    发明人： Ming-Hau Tung ,  Lior Kogut

    IPC分类号： H01L21/8238

    CPC分类号： B81B3/0072 ,  B81B2201/042 ,  B81C1/00047 ,  B81C2201/0167

    摘要： Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

    摘要翻译： 提供了用于控制光调制装置的两层之间的腔的深度的方法和装置。 一种制造光调制装置的方法包括提供衬底，在衬底的至少一部分上形成牺牲层，在牺牲层的至少一部分上形成反射层，以及在衬底上形成一个或多个弯曲控制器 所述挠曲控制器被配置为可操作地支撑所述反射层并且在去除所述牺牲层时形成可能与所述牺牲层的厚度相差的深度的空腔，其中所述深度垂直于所述基板测量。

    METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL
    36.
    发明申请
    METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL 有权
    制造提供空气隙控制的MEMS装置的方法

    公开(公告)号：US20120122259A1

    公开(公告)日：2012-05-17

    申请号：US13356447

    申请日：2012-01-23

    申请人： Ming-Hau Tung ,  Lior Kogut

    发明人： Ming-Hau Tung ,  Lior Kogut

    IPC分类号： H01L21/02

    CPC分类号： B81B3/0072 ,  B81B2201/042 ,  B81C1/00047 ,  B81C2201/0167

    摘要： Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

    摘要翻译： 提供了用于控制光调制装置的两层之间的腔的深度的方法和装置。 一种制造光调制装置的方法包括提供衬底，在衬底的至少一部分上形成牺牲层，在牺牲层的至少一部分上形成反射层，以及在衬底上形成一个或多个弯曲控制器 所述挠曲控制器被配置为可操作地支撑所述反射层并且在去除所述牺牲层时形成可能与所述牺牲层的厚度相差的深度的空腔，其中所述深度垂直于所述基板测量。

    Support structures for free-standing electromechanical devices
    38.
    发明授权
    Support structures for free-standing electromechanical devices 有权
    独立机电设备的支撑结构

    公开(公告)号：US07835061B2

    公开(公告)日：2010-11-16

    申请号：US11476317

    申请日：2006-06-28

    申请人： Lior Kogut ,  Ming-Hau Tung ,  Brian Arbuckle

    发明人： Lior Kogut ,  Ming-Hau Tung ,  Brian Arbuckle

    IPC分类号： G02B26/00

    CPC分类号： B81B3/0072 ,  G02B26/001

    摘要： A microelectromechanical (MEMS) device includes a functional layer including a first material, a deformable layer including a second material different from the first material, and a connecting element including the first material. The connecting element is mechanically coupled to the deformable layer and the functional layer. The connecting element and the deformable layer form an interface between the first material and the second material. The interface is spaced from the functional layer.

    摘要翻译： 微机电（MEMS）装置包括功能层，其包括第一材料，可变形层，其包括不同于第一材料的第二材料，以及包括第一材料的连接元件。 连接元件机械耦合到可变形层和功能层。 连接元件和可变形层在第一材料和第二材料之间形成界面。 界面与功能层间隔开。

    Non-planar surface structures and process for microelectromechanical systems
    40.
    发明授权
    Non-planar surface structures and process for microelectromechanical systems 失效
    微机电系统的非平面表面结构和工艺

    公开(公告)号：US07623287B2

    公开(公告)日：2009-11-24

    申请号：US11406866

    申请日：2006-04-19

    申请人： Teruo Sasagawa ,  Lior Kogut ,  Ming-Hau Tung

    发明人： Teruo Sasagawa ,  Lior Kogut ,  Ming-Hau Tung

    IPC分类号： G02B26/00

    CPC分类号： B81B3/0008 ,  G02B26/001

    摘要： Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. A non-planar surface is formed on one or more layers by flowing an etchant through a permeable layer. In one embodiment the non-planar surface is formed on a sacrificial layer. A movable layer formed over the non-planar surface of the sacrificial layer results in a non-planar interface between the sacrificial and movable layers. Removal of the sacrificial layer results in a released MEMS device having reduced contact area between the movable and stationary layers when the MEMS device is actuated. The reduced contact area results in lower adhesion forces and reduced stiction during actuation of the MEMS device. These methods may be used to manufacture released and unreleased interferometric modulators.

    摘要翻译： 制造包括干涉式调制器的MEMS器件的方法包括在衬底上沉积包括固定层，可移动层和牺牲层的各种层。 通过使蚀刻剂流过可渗透层而在一个或多个层上形成非平面表面。 在一个实施例中，非平面表面形成在牺牲层上。 形成在牺牲层的非平面表面上的可移动层导致牺牲层和可移动层之间的非平面界面。 牺牲层的去除导致释放的MEMS器件在MEMS器件致动时具有减小可移动层和固定层之间的接触面积。 减小的接触面积导致MEMS器件的致动期间较低的粘附力和降低的静摩擦力。 这些方法可用于制造释放和未释放的干涉式调制器。